Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces

Patent metadata

Field	Value
Publication number	US-10755901-B2
Application number	US-201415532845-A
Country	US
Kind code	B2
Filing date	Dec 5, 2014
Priority date	Dec 5, 2014
Publication date	Aug 25, 2020
Grant date	Aug 25, 2020

Abstract

The present invention relates generally to a plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction for deposition of thin film coatings and modification of surfaces. More particularly, the present invention relates to a plasma source comprising one or more plasma-generating electrodes, wherein a macro-particle reduction coating is deposited on at least a portion of the plasma-generating surfaces of the one or more electrodes to shield the plasma-generating surfaces of the electrodes from erosion by the produced plasma and to resist the formation of particulate matter, thus enhancing the performance and extending the service life of the plasma source.

First claim

What is claimed is:

1. A plasma source comprising:
a first electrode and a second electrode separated by a gas containing space, wherein a macro-particle reduction coating is deposited on at least a portion of each of the first electrode and the second electrode;
a power source to which the first and second electrodes are electrically connected configured to supply a voltage that alternates between positive and negative to cause the voltage supplied to the first electrode to be out of phase with the voltage supplied to the second electrode and creating a current that flows between the electrodes;
wherein the current creates a plasma between the electrodes that is substantially uniform over its length;
wherein the first and second electrodes are shielded from contact with the plasma by the coating; and
wherein the coating is resistant to forming particulate matter,
wherein the coating comprises carbon and a transition metal, and
wherein the coating further comprises a binder, said binder comprising a metal or metal alloy.

2. The plasma source of claim 1 , wherein plasma is substantially uniform in its length in the substantial absence of closed circuit electron drift.

3. The plasma source of claim 1 , wherein the plasma source is configured to deposit a coating using plasma enhanced chemical vapor deposition (PECVD).

4. The plasma source of claim 1 , wherein the plasma source is provided with a power input greater than 20 kW per linear meter of plasma length.

5. The plasma source of claim 4 , wherein the plasma source is provided with a power input greater than 40 kW per linear meter of plasma length.

6. The plasma source of claim 1 , wherein the first electrode and the second electrode produce reduced particulate matter compared to uncoated electrodes.

7. The plasma source of claim 1 , wherein the coating comprises a material having a low rate of sputtering.

8. The plasma source of claim 1 , wherein the coating is substantially resistant to chemical reaction with the plasma.

9. The plasma source of claim 1 , wherein the coating material has a resistivity less than 105 ohm cm.

10. The plasma source of claim 9 , wherein the coating material has a resistivity less than 103 ohm cm.

11. The plasma source of claim 1 , wherein the plasma comprises argon gas, and the rate of sputtering is less than 0.5 atoms per ion at 500 eV ion energies.

12. The plasma source of claim 11 , wherein the rate of sputtering is less than 0.2 atoms per ion at 500 eV ion energies.

13. The plasma source of claim 1 , wherein the coating comprises tungsten carbide.

14. The plasma source of claim 1 , wherein the coating comprises chromium carbide.

15. The plasma source of claim 1 , wherein the coating comprises bor on carbide.

16. The plasma source of claim 1 , wherein the coating comprises silicon carbide.

17. The plasma source of claim 1 , wherein the coating comprises aluminum carbide.

18. The plasma source of claim 1 , wherein the coating comprises indium oxide doped with tin.

19. The plasma source of claim 1 , wherein the coating comprises a material selected from the group consisting of tungsten, chromium, titanium, molybdenum, and zirconium.

20. The plasma source of claim 1 , wherein the coating comprises a metal alloy.

21. The plasma source of claim 1 , wherein the coating comprises greater than 50 weight percent of one or more materials selected from the group consisting of cobalt, molybdenum, nickel, chromium, and alloys thereof.

22. The plasma source of claim 21 , wherein the coating additionally comprises less than or equal to 49 weight percent of aluminum or silicon.

23. The plasma source of claim 21 , wherein the coating contains ionic or covalent bonding.

24. The plasma source of claim 1 , wherein the coating comprises a metal alloy selected from the group consisting of aluminum, silicon, nickel, chromium, and nickel-chromium.

25. The plasma source of claim 1 , wherein the coating comprises a conductive ceramic material.

26. The plasma source of claim 1 , wherein the coating has a sputter yield of less than 1 atom per ion when exposed to argon ions with energies of about 500 eV.

27. The plasma source of claim 26 , wherein the coating has a sputter yield of less than 0.5 atoms per ion when exposed to argon ions with energies of about 500 eV.

28. The plasma source of claim 1 , wherein the coating has a bond energy of greater than 12 ev per molecule.

29. The plasma source of claim 1 , wherein the coating comprises a carbide selected from the group consisting of titanium carbide, zirconium carbide, hafnium carbide, chromium carbide, and tantalum carbide.

30. The plasma source of claim 1 , wherein the first electrode and the second electrode form a first pair of electrodes, and the plasma source further comprises at least a third electrode and a fourth electrode forming a second pair of electrodes; wherein the first pair and the second pair of electrodes are disposed adjacently in an array.

31. The plasma source of claim 30 , wherein the first electrode and the second electrode are each configured to produce a hollow cathode discharge.

32. The plasma source of claim 30 , wherein the first, second, third, and fourth electrodes are each configured to produce a hollow cathode discharge.

33. The plasma source of claim 1 ,
wherein the coating comprises a material having a resistivity less than 107 ohm cm.

34. The plasma source of claim 33 , wherein the thickness of the coating is between 100 and 500 μm.

35. The plasma source of claim 33 , wherein the thickness of the coating is between 1 and 100 μm.

36. The plasma source of claim 33 , wherein the coating is resistant to sputtering by the plasma.

37. The plasma source of claim 33 , wherein the coating is deposited on at least a portion of the first plasma-generating surface of the electrode by a thermal spray coating process.

38. The plasma source of claim 37 , wherein the spray coating process used to deposit the coating comprises one of plasma thermal spray coating, plasma cold spray coating, flame spraying, wire arc spraying, detonation spraying, and high velocity oxygen fuel (HVOF) thermal spray coating.

39. The plasma source of claim 33 , wherein the electrode comprises a material selected from the group consisting of steel, stainless steel, aluminum, and copper.

40. The plasma source of claim 33 , wherein the voltage is between 400 V and 700 V.

41. The plasma source of claim 33 , wherein the coating on the electrode prevents voltage drift during extended operation of the plasma source.

42. The plasma source of claim 33 , wherein the coating contacts a plasma-forming gas, and wherein the coating is substantially resistant to chemical reaction with the plasma-forming gas.

43. The plasma source of claim 42 , wherein the coating is substantially resistant to chemical reaction with the plasma-forming gas for at least 100 hours of continuous plasma source operation.

44. The plasma source of claim 42 , wherein the coating is substantially resistant to chemical reaction with the plasma-forming gas for at least 30

Assignees

• Agc Flat Glass Na Inc
• Agc Glass Europe
• Asahi Glass Co Ltd

Inventors

• Chambers John
• Maschwitz Peter
• Lin Yuping
• Johnson Herb

Classifications

• C03C2218/153

  by plasma-enhanced cvd · CPC title

• C03C17/245

  by deposition from the vapour phase · CPC title

• H01J37/32596

  Hollow cathodes · CPC title

• H01J37/32559 Primary

  Protection means, e.g. coatings · CPC title

• H01J2237/3321

  CVD [Chemical Vapor Deposition] · CPC title