Fe-Pt based magnetic material sintered compact

Patent metadata

Field	Value
Publication number	US-10755737-B2
Application number	US-201314414518-A
Country	US
Kind code	B2
Filing date	Aug 6, 2013
Priority date	Sep 21, 2012
Publication date	Aug 25, 2020
Grant date	Aug 25, 2020

Abstract

Provided is an Fe—Pt based magnetic material sintered compact, comprising BN and SiO 2 as non-magnetic materials, wherein Si and O are present in a region where B or N is present at a cut surface of the sintered compact. An object of the present invention is to provide a high density sputtering target which enables production of a magnetic thin film for heat-assisted magnetic recording media, and also reduces the amount of particles generated during sputtering.

First claim

The invention claimed is:

1. A Fe—Pt based magnetic material sintered compact, consisting of iron and platinum forming sintered Fe—Pt alloy and particles of hexagonal BN and SiO 2 dispersed in the sintered Fe—Pt alloy, wherein, in an element mapping image obtained by a Field Emission Electron Probe Micro Analyzer (FE-EPMA) of a cross-sectional surface of the sintered compact, elements of Si and O are detected in the same area as that where elements of B and N are detected, and wherein, in X-ray diffraction analysis of a cross-sectional surface of the sintered compact which is parallel to a pressurized face of the sintered compact, an X-ray diffraction peak from (002) plane of hexagonal BN is present, and an X-ray diffraction peak from (101) plane of cristobalite has an intensity ratio of 1.40 or less to a back-ground intensity of the (101) X-ray diffraction peak.

2. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the X-ray diffraction peak from (002) plane of hexagonal BN has an intensity ratio of 1.50 or more to a back-ground intensity of the (002) X-ray diffraction peak.

3. The Fe—Pt based magnetic material sintered compact according to claim 2 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less, and remainder of content of Fe.

4. The Fe—Pt based magnetic material sintered compact according to claim 3 , wherein the content of SiO 2 has a ratio of 1% or more relative to the content of hexagonal BN.

5. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein a content of SiO 2 in the sintered compact has a ratio of 1% or more relative to a content of hexagonal BN.

6. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the sintered compact has a content of Pt in an amount of 5 mol % or more and 60 mol % or less, a content of BN in an amount of 1 mol % or more and 50 mol % or less, a content of SiO 2 in an amount of 0.5 mol % or more and 20 mol % or less, and remainder of content of Fe.

7. The Fe—Pt based magnetic material sintered compact according to claim 1 , wherein the sintered compact is made from raw material powders of Fe powder and Pt powder, or Fe—Pt powder, and BN powder and SiO 2 powder having a grain diameter of 0.5 to 10 μm.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Ogino Shin-Ichi

Classifications

• H01F41/183

  Sputtering targets therefor · CPC title

• H01F10/123

  having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films · CPC title

• G11B5/851

  Coating a support with a magnetic layer by sputtering · CPC title

• C22C33/0292

  with more than 5% preformed carbides, nitrides or borides · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title