Apparatus and methods to remove residual precursor inside gas lines post-deposition

Patent metadata

Field	Value
Publication number	US-10752990-B2
Application number	US-201715471291-A
Country	US
Kind code	B2
Filing date	Mar 28, 2017
Priority date	Mar 28, 2016
Publication date	Aug 25, 2020
Grant date	Aug 25, 2020

Abstract

Apparatus and methods for supplying a gas to a processing chamber are described. The apparatus comprises an inlet line and an outlet line, each with two valves, in fluid communication an ampoule. A bypass line connects the inlet valve and outlet valve closest to the ampoule. The apparatus and methods of use allow a precursor residue to be removed from the delivery lines of a processing chamber.

First claim

What is claimed is:

1. An apparatus comprising:
an ampoule lid having an outside surface and an inside surface; and
a valve cluster connected to the outside surface of the ampoule lid, the valve cluster including:
an inlet line connected to the ampoule lid to allow fluid communication through the ampoule lid;
an outlet line connected to the ampoule lid to allow fluid communication through the ampoule lid;
a first inlet valve adjacent to the outside surface and in fluid communication with the inlet line and connected to a bypass line, the first inlet valve being a three-way valve with a first upstream leg connected to the inlet line, a first downstream leg connected to the inlet line and a second downstream leg connected to the bypass line, the first inlet valve configured to operate in first, second, and third inlet positions, the first inlet position allowing a flow of fluid from the first upstream leg exclusively to the first downstream leg, the second inlet position allowing a flow of fluid from the first upstream leg exclusively to the second downstream leg, and the third inlet position allowing a flow of fluid from the first upstream leg to both the first downstream leg and the second downstream leg simultaneously;
a second inlet valve in fluid communication with the inlet line and upstream of the first inlet valve;
a first outlet valve adjacent to the outside surface and in fluid communication with the outlet line and connected to the bypass line, the first outlet valve being a three-way valve with a second upstream leg connected to the outlet line, a third upstream leg connected to the bypass line and a third downstream leg connected to the outlet line, the first outlet valve configured to operate in first, second, and third outlet positions, the first outlet position allowing a flow of fluid to pass exclusively from the second upstream leg to the third downstream leg, the second outlet position allowing a flow of fluid to pass exclusively from the third upstream leg to the third downstream leg, and the third outlet position allowing a flow of fluid to pass from both the second upstream leg and the third upstream leg simultaneously to the third downstream leg;

a second outlet valve in fluid communication with the outlet line and downstream of the first outlet valve; and
a bypass valve in fluid communication with the bypass line.

2. The apparatus of claim 1 , wherein the first inlet valve is a pneumatic valve.

3. The apparatus of claim 1 , wherein the first outlet valve is a pneumatic valve.

4. The apparatus of claim 1 , wherein the bypass valve is a pneumatic valve.

5. The apparatus of claim 1 , wherein the second inlet valve is a manual valve.

6. The apparatus of claim 1 , wherein the second outlet valve is a manual valve.

7. The apparatus of claim 1 , further comprising an inlet disconnect in fluid communication with the inlet line and positioned upstream of the second inlet valve at an outside end of the inlet line.

8. The apparatus of claim 1 , further comprising an outlet disconnect in fluid communication with the outlet line and positioned downstream of the second outlet valve at an outside end of the outlet line.

9. The apparatus of claim 1 , wherein the inlet line extends through the ampoule lid a distance from the inside surface of the ampoule lid.

10. The apparatus of claim 9 , further comprising a sparger on an end of the inlet line on the inside surface of the ampoule lid.

11. An ampoule comprising:
an ampoule base having a bottom with a sidewall extending from the bottom forming an interior of the ampoule;
an ampoule lid having an outside surface and an inside surface, the ampoule lid connected to a top end of the sidewall of the ampoule base enclosing the interior of the ampoule;
an inlet line having an outside end and an inside end, the inlet line in fluid communication with the interior of the ampoule;
an outlet line having an outside end and an inside end, the outlet line in fluid communication with the interior of the ampoule;
a first inlet valve adjacent to the outside surface and in fluid communication with the inlet line and connected to a bypass line, the first inlet valve upstream of the ampoule lid, the first inlet valve being a three-way pneumatic valve with a first upstream leg connected to the inlet line, a first downstream leg connected to the inlet line and a second downstream leg connected to the bypass line, the first inlet valve configured to operate in first, second, and third inlet positions, the first inlet position allowing a flow of fluid from the first upstream leg exclusively to the first downstream leg, the second inlet position allowing a flow of fluid from the first upstream leg exclusively to the second downstream leg, and the third inlet position allowing a flow of fluid from the first upstream leg to both the first downstream leg and the second downstream leg simultaneously; a second inlet valve in fluid communication with the inlet line and upstream of and spaced from the first inlet valve, the second inlet valve being a manual valve; a first outlet valve adjacent to the outside surface and in fluid communication with the outlet line and connected to the bypass line, the first outlet valve downstream of the ampoule lid, the first outlet valve being a three-way pneumatic valve with a second upstream leg connected to the outlet line, a third upstream leg connected to the bypass line and a third downstream leg connected to the outlet line, the first outlet valve configured to operate in first, second, and third outlet positions, the first outlet position allowing a flow of fluid to pass exclusively from the second upstream leg to the third downstream leg, the second outlet position allowing a flow of fluid to pass exclusively from the third upstream leg to the third downstream leg, and the third outlet position allowing a flow of fluid to pass from both the second upstream leg and the third upstream leg simultaneously to the third downstream leg;
a second outlet valve in fluid communication with the outlet line and downstream of and spaced from the first outlet valve, the second outlet valve being a manual valve; and
a bypass valve in fluid communication with the bypass line.

12. The ampoule of claim 11 , further comprising an inlet disconnect at the outside end of the inlet line, the inlet disconnect in fluid communication with the inlet line.

13. The ampoule of claim 11 , further comprising an outlet disconnect at the outside end of the outlet line, the outlet disconnect in fluid communication with the outlet line.

14. The ampoule of claim 11 , wherein the inlet line extends through the ampoule lid a distance from the inside surface of the ampoule lid.

15. The ampoule of claim 14 , further comprising a sparger on an end of the inlet line on the inside surface of the ampoule lid.

16. An ampoule comprising:
an ampoule base having a bottom with a sidewall extending from the bottom forming an interior of the ampoule;
an ampoule lid having an outside surface and an inside surface, the ampoule lid connected to a top end of the sidewall of the ampoule base enclosing the interior of the ampoule;
an inlet line having an outside end with an inlet disconnect and an inside end within the interior of the ampoule spaced a distance from the inside surface of the ampoule lid, the inlet line in fluid communication with the interior of the ampoule, the inlet line having a sparger connected to and in fluid communication with the inside end;
an outlet line having an outside end with an outlet disconnect and an inside end, the outlet line in fluid communic

Assignees

• Applied Materials Inc

Inventors

• Yao Daping
• Choi Kenric
• Yuan Xiaoxiong
• Lu Jiang
• Xu Can
• Ma Paul F
• Chang Mei

Classifications

• C23C16/4408 Primary

  by purging residual gases from the reaction chamber or gas lines · CPC title

• F16K31/60

  Handles {(form, features or function of taps or faucet handles for domestic plumbing installations E03C1/04)} · CPC title

• F16K31/12

  actuated by fluid ({fluid-actuated lift valves F16K1/126} ; fluid-actuated check valves F16K15/00; fluid-actuated safety valves F16K17/00) · CPC title

• C23C16/45561

  Gas plumbing upstream of the reaction chamber · CPC title

• C23C16/18

  from metallo-organic compounds · CPC title