Mask free methods of depositing compositions to form heterostructures

Patent metadata

Field	Value
Publication number	US-10752794-B2
Application number	US-201715816574-A
Country	US
Kind code	B2
Filing date	Nov 17, 2017
Priority date	Nov 18, 2016
Publication date	Aug 25, 2020
Grant date	Aug 25, 2020

Abstract

The present disclosure provides methods of preparing heterostructures of two or more transition metal dichalcogenides on a surface in a pattern in which the method does not require a mask or blocking agent to create a pattern on the surface. Also provided herein are ink compositions which are used in the methods described herein and include precursor materials that generate these transition metal dichalcogenides.

First claim

What is claimed is:

1. A method of preparing a heterostructure comprising:
(A) applying a first ink composition comprising a first metal salt to a substrate;
wherein the ink composition is further defined as:
(A) a metal salt of the formula: X 2 ML 2 , wherein:
X is a monovalent cation;
M is a transition metal; and
L is a divalent chalcogen ligand; and

(B) deionized water;

wherein the ink composition is substantially free of particles greater than 0.2 μm; or
an ink composition of the formula:
(A) a metal salt of the formula: Y a Z b , wherein:
Y is a monovalent cation;
Z is a transition metal oxide of Group 6; and
a and b are each independently integers sufficient to balance the charge of the transition metal ion of Group 6; and

(B) deionized water;

wherein the ink composition is substantially free of particles greater than 0.2 μm and the composition is formulated for use in deposition process

(B) heating the substrate to a first temperature to crystallize the first ink composition to obtain a first metal dichalcogenide;
(C) applying a second ink composition comprising a second metal salt, wherein the second metal salt is different from the first metal salt; and
(D) heating the substrate to a second temperature to crystallize the second ink composition to obtain a second metal dichalcogenide,
wherein the first ink composition is different from the second ink composition.

2. The method of claim 1 , wherein the first ink composition or second ink composition is applied in a pattern.

3. The method of claim 1 , wherein the pattern is an array of dots, an array of ribbons or lines, an array of zig-zag or another meandering shaped line or pattern, a lateral nanostructure assemblies of dots and/or ribbons or lines, a vertical structure assemblies made up of dots and/or ribbons or lines, or a complex geometric shape comprises of lines and/or dots.

4. The method of claim 1 , wherein the method further comprises applying one or more additional ink compositions to the substrate and heating the substrate to one or more additional temperatures to crystallize the one or more additional ink composition to obtain a one or more additional metal dichalcogenide.

5. The method of claim 1 , wherein the first temperature is from about 275° C. to about 1200° C. or the second temperature is from about 275° C. to about 1250° C.

6. The method of claim 1 , wherein the substrate is heated at the first temperature or the second temperature in the presence of hydrogen gas.

7. The method of claim 1 , wherein the substrate is a silica and/or silicon dioxide surface, a graphene surface, or a silicon nitride, quartz, sapphire, or polyimide surface.

8. The method of claim 1 , wherein the ink composition is applied using a pen cantilever.

9. The method of claim 8 , wherein the ink composition is applied using a method comprising:
(a) placing the pen of the pen cantilever into the ink composition such that some of the ink composition is transferred to the pen;
(b) placing the pen over the location on the substrate to which the ink composition is to be deposited; and
(c) contacting the ink composition on the pen with the substrate such that at least some of the ink composition on the pen is transferred to the substrate.

10. The method of claim 1 , wherein the first metal dichalcogenide forms a feature with a width from about 0.25 μm to about 10 μm or the second metal dichalcogenide forms a feature with a width from about 0.25 μm to about 10 μm.

11. The method of claim 1 , wherein the first metal dichalcogenide forms a feature with a thickness from about 0.1 nm to about 1 μm or the second metal dichalcogenide forms a feature with a thickness from about 0.1 nm to about 0.5 μm.

12. An article of manufacture comprising a heterostructure prepared using the methods of claim 1 .

13. The method of claim 1 , wherein the metal salt is homogenously dispersed in the deionized water.

14. The method of claim 1 , wherein X is a quaternary ammonium.

15. The method of claim 1 , wherein M is tungsten(VI) or molybdenum(VI).

16. The method of claim 1 , wherein L is sulfide or selenide.

17. The method of claim 1 , wherein the metal salt is (NH 4 ) 2 MoS 4 or (NH 4 ) 2 WS 4 .

18. The method of claim 1 , wherein M is a transition metal oxide of Group 6 is of the formula:
( M 1 ) x ( L 1 ) y z+

wherein:
M 1 is a transition metal of Group 6;
L 1 is an oxide ligand;
x is 2, 3, 4, 5, 6, 7, 8, 9, or 10;
y is 3-24; and
z is the resultant charge of the formula.

19. The method of claim 1 , wherein the metal salt is (NH 4 ) 6 Mo 7 O 24 or (NH 4 ) 10 H 2 (W 2 O 7 ) 6 .

Assignees

• Univ Saint Louis

Inventors

• Kuljanishvili Irma
• Dong Rui
• Moore Logan

Classifications

• C01G39/006

  Compounds containing molybdenum, with or without oxygen or hydrogen, and containing two or more other elements · CPC title

• C23C16/30

  Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides · CPC title

• C01P2004/04

  obtained by TEM, STEM, STM or AFM · CPC title

• C01P2002/82

  by IR- or Raman-data · CPC title

• C01P2002/72

  by d-values or two theta-values, e.g. as X-ray diagram · CPC title