Processing apparatus, method, and program

Patent metadata

Field	Value
Publication number	US-10748253-B2
Application number	US-201816161847-A
Country	US
Kind code	B2
Filing date	Oct 16, 2018
Priority date	Oct 17, 2017
Publication date	Aug 18, 2020
Grant date	Aug 18, 2020

Abstract

A processing apparatus that enables margin correction of X-ray intensity data includes a calculation unit configured to calculate an expansion rate of X-ray intensity data detected in a unit region on a marginal side on a basis of an intensity distribution resulted from detection of uniform X-ray and a first function generation unit configured to generate an allocation function that allocates the X-ray intensity data detected in the unit region on the marginal side to an outside unit region, on the basis of the expansion rate. Enabling margin correction on the basis of the intensity distribution resulting from detection of uniform X-ray makes it possible to correct the distortion of intensity distribution on the marginal side. As a result, it is possible to expand the detection region of X-ray intensity data.

First claim

The invention claimed is:

1. A processing apparatus that enables margin correction of X-ray intensity data, the apparatus comprising:
a calculation unit configured to calculate an expansion rate of X-ray intensity data detected in a unit region on a marginal side, on a basis of an intensity distribution resulted from detection of uniform X-ray; and
a first function generation unit configured to generate an allocation function that allocates the X-ray intensity data detected in the unit region on the marginal side to an outside unit region, on the basis of the expansion rate.

2. The processing apparatus according to claim 1 , wherein the calculation unit is configured to calculate the expansion rate using a ratio of X-ray intensity data detected in the unit region on the marginal side against X-ray intensity data detected in an inner unit region.

3. The processing apparatus according to claim 2 , wherein the calculation unit is configured to use a mean value of X-ray intensity data detected in a unit region within a particular range provided inside, as the X-ray intensity data detected in the inner unit region.

4. The processing apparatus according to claim 1 , further comprising a second function generation unit configured to generate a uniformity correction function for the intensity distribution obtained via correction by the allocation function of the intensity distribution resulted from detection of uniform X-ray.

5. The processing apparatus according to claim 1 , further comprising a correction unit configured to use the allocation function to perform margin correction of the intensity distribution detected by measurement.

6. The processing apparatus according to claim 5 , wherein the correction unit is configured to allocate the X-ray intensity data detected in the unit region on the marginal side, providing randomness to the allocation.

7. The processing apparatus according to claim 5 , wherein the correction unit is configured to use the uniformity correction function to perform uniformity correction of the intensity distribution corrected by the margin correction.

8. The processing apparatus according to claim 5 , wherein the intensity distribution detected by the measurement is data provided by diffraction measurement of a single crystal.

9. A method that enables margin correction of X-ray intensity data, the method comprising the steps of:
calculating an expansion rate of X-ray intensity data detected in a unit region on the marginal side, on a basis of an intensity distribution resulting from detection of uniform X-ray; and
generating an allocation function that allocates the X-ray intensity data detected in the unit region on the marginal side to an outside unit region, on the basis of the expansion rate.

10. The method that enables margin correction of X-ray intensity data according to claim 9 , further comprising the step of calculating the expansion rate using a ratio of X-ray intensity data detected in the unit region on the marginal side against X-ray intensity data detected in an inner unit region.

11. The method that enables margin correction of X-ray intensity data according to claim 10 , further comprising the step of using a mean value of X-ray intensity data detected in a unit region within a particular range provided inside, as the X-ray intensity data detected in the inner unit region.

12. The method that enables margin correction of X-ray intensity data according to claim 9 , further comprising a second function generation unit configured to generate a uniformity correction function for the intensity distribution obtained via correction by the allocation function of the intensity distribution resulted from detection of uniform X-ray.

13. The method that enables margin correction of X-ray intensity data according to claim 9 , further comprising a correction unit configured to use the allocation function to perform margin correction of the intensity distribution detected by measurement.

14. The method that enables margin correction of X-ray intensity data according to claim 13 , further comprising the step of allocating the X-ray intensity data detected in the unit region on the marginal side, providing randomness to the allocation.

15. The method that enables margin correction of X-ray intensity data according to claim 13 , further comprising the step of using the uniformity correction function to perform uniformity correction of the intensity distribution corrected by the margin correction.

16. The method that enables margin correction of X-ray intensity data according to claim 13 , wherein the intensity distribution detected by the measurement is data provided by diffraction measurement of a single crystal.

17. A computer-readable non-transitory storage medium storing a control program that enables margin correction of X-ray intensity data, the control program causing a computer to perform:
calculating an expansion rate of X-ray intensity data detected in a unit region on a marginal side, on the basis of an intensity distribution resulting from detection of uniform X-ray; and
generating an allocation function that allocates the X-ray intensity data detected in the unit region on the marginal side to an outside unit region, on the basis of the expansion rate.

Assignees

• Rigaku Denki Co Ltd

Inventors

• Sakumura Takuto
• Nakaye Yasukazu
• Matsushita Kazuyuki

Classifications

• G01T1/17 Primary

  Circuit arrangements not adapted to a particular type of detector {(pulse-selection circuits H03K, G01R)} · CPC title

• G01N2223/056

  diffraction · CPC title

• G01N2223/501

  array · CPC title

• G01N2223/1016

  X-ray · CPC title

• G06T3/40

  Scaling of whole images or parts thereof, e.g. expanding or contracting · CPC title