Method for producing a batch of acoustic wave filters

Patent metadata

Field	Value
Publication number	US-10727802-B2
Application number	US-201515514525-A
Country	US
Kind code	B2
Filing date	Jun 29, 2015
Priority date	Sep 29, 2014
Publication date	Jul 28, 2020
Grant date	Jul 28, 2020

Abstract

A method for the batch production of acoustic wave filters comprises: synthesizing N theoretical filters, each filter defined by a set of j theoretical resonator(s) having a triplet C0ij,eq, ωrij,eq and ωaij,eq, these parameters grouped into subsets; determining a reference resonator structure for each subset, naturally having a resonant frequency ωr,ref, where ωaij,eq<ωr,ref<ωrij,eq; determining, for each theoretical resonator, an elementary building block comprising an intermediate resonator R′ij, a parallel reactance Xpij and/or a series reactance Xsij, the intermediate resonator R′ij having a triplet C0ij, ωr,ref and ωa,ref, the parameters C0ij, Xpij and/or Xsij defined so the elementary building block has a triplet: C0ij,eq, ωrij,eq and ωaij,eq; determining the geometrical dimensions of the actual resonators Rij of the filters so they have a capacitance C0ij; producing each actual resonator; associating series and/or parallel reactances with actual resonators in order to form the elementary building blocks.

First claim

The invention claimed is:

1. A method for a batch production of a set of N filters F i , where 1≤i≤N each acoustic wave filter comprising M i actual acoustic wave resonators R ij , where 1≤j≤M i , and comprising center frequencies f i and bandwidths l i , which are different for at least two of them, comprising the following steps:
synthesizing N theoretical filters, each filter being defined on the basis of a set of M i theoretical resonator(s), where 1≤i≤N, such that said theoretical filters have said center frequencies f i and said bandwidths l i , the theoretical resonators of each filter respectively having a triplet of parameters: a theoretical static capacitance C 0ij,eq where 1≤j≤M j , a theoretical resonant frequency ωr ij,eq and a theoretical antiresonant frequency ω aij,eq , these parameters being grouped into one or more subsets;
determining a reference resonator structure for each subset such that said reference resonator naturally has a resonant frequency ω r,ref that is lower than the lowest of the theoretical resonant frequencies ω rij,eq of said subset and an antiresonant frequency ω a,ref that is higher than the highest of the theoretical antiresonant frequencies ω aij,eq of said subset;
determining, subsequent to the preceding step for each theoretical resonator of each subset, an elementary building block comprising an intermediate resonator R′ ij , at least one of a parallel reactance Xp ij associated with the actual acoustic wave resonators R ij to form the elementary building blocks and a series reactance Xs ij associated with the actual acoustic wave resonators R ij to form the elementary building blocks, the intermediate resonator R′ ij having a static capacitance C 0ij , the resonant frequency ω r,ref and the antiresonant frequency ω a,ref , parameters of at least one of the static capacitance C 0ij , the parallel reactance Xp ij and the series reactance Xs ij being defined such that the elementary building block has the static capacitance that is equal to the theoretical static capacitance C 0ij,eq , the resonant frequency that is equal to the theoretical resonant frequency ω rij,eq and the antiresonant frequency that is equal to the theoretical antiresonant frequency ω aij,eq ;
determining geometrical dimensions of the actual acoustic wave resonators of the filters base on geometrical dimensions of said reference resonator structure such that they respectively have the static capacitance C 0ij of the intermediate resonator R′ ij ;
producing each of said actual acoustic wave resonators.

2. The method for the batch production of the set of N filters F i as claimed in claim 1 , wherein the elementary building block comprises a reactance connected in parallel which is connected, on the one hand, to an input/output terminal and, on the other hand, to an intermediate node between the intermediate resonator and a reactance connected in series.

3. The method for the batch production of the set of N filters F i as claimed in claim 1 , wherein the elementary building block comprises a reactance connected in parallel with the series reactance and with the intermediate resonator.

Assignees

• Commissariat Energie Atomique

Inventors

• Reinhardt Alexandre
• David Jean-Baptiste

Classifications

• H03H3/0073 Primary

  Integration with other electronic structures · CPC title

• H03H2009/02496

  Horizontal, i.e. parallel to the substrate plane · CPC title

• H03H2210/033

  Continuous · CPC title

• H03H2003/027

  the resonators or networks being of the microelectro-mechanical [MEMS] type · CPC title

• H03H2009/02165

  Tuning · CPC title