Substrate processing method and substrate processing apparatus

Patent metadata

Field	Value
Publication number	US-10727043-B2
Application number	US-201815910393-A
Country	US
Kind code	B2
Filing date	Mar 2, 2018
Priority date	Mar 27, 2017
Publication date	Jul 28, 2020
Grant date	Jul 28, 2020

Abstract

A hole is formed on a liquid film of a low surface tension liquid which covers an entire region of an upper surface of a substrate, and a central portion of the upper surface of the substrate is exposed. The hole in the liquid film of the low surface tension liquid is expanded up to an outer circumference of the substrate. Discharge of hot water is stopped before formation of the hole in the liquid film of the low surface tension liquid. After the liquid film of the low surface tension liquid has been expelled from the upper surface of the substrate, hot water is supplied again to a lower surface of the substrate. A liquid adhering to the substrate is shaken off after stoppage of discharge of the hot water.

First claim

What is claimed is:

1. A substrate processing method comprising:
a low surface tension liquid supplying step of replacing a rinse liquid on a substrate with a low surface tension liquid lower in surface tension than the rinse liquid and forming a liquid film of the low surface tension liquid covering an upper surface of the substrate by supplying the low surface tension liquid to the upper surface of the substrate to which the rinse liquid is adhering and which is held horizontally while rotating the substrate about a vertical rotation axis passing through a central portion of the substrate;
a hole forming step of forming, after the low surface tension liquid supplying step is started, a hole at a central portion of the liquid film of the low surface tension liquid and exposing a central portion of the upper surface of the substrate from the liquid film of the low surface tension liquid by stopping supply of the low surface tension liquid to the central portion of the upper surface of the substrate while rotating the substrate around the rotation axis;
a hole expanding step of removing the liquid film of the low surface tension liquid from the upper surface of the substrate by expanding the hole to an outer circumference of the substrate while rotating the substrate around the rotation axis after the hole forming step;
a drying step of shaking off a liquid adhering to the substrate and drying the substrate by rotating the substrate around the rotation axis after the hole expanding step;
a first heating liquid supplying step of supplying a heating liquid having a temperature higher than a room temperature to a lower surface of the substrate in parallel with at least a portion of the low surface tension liquid supplying step and thereafter stopping supply of the heating liquid to the lower surface of the substrate before the hole forming step is started; and
a second heating liquid supplying step of supplying, after the hole expanding step is ended, the heating liquid to the lower surface of the substrate while rotating the substrate around the rotation axis and thereafter stopping supply of the heating liquid to the lower surface of the substrate before the drying step is started; wherein
a rotation speed of the substrate in the drying step is larger than a rotation speed of the substrate in the hole expanding step.

2. The substrate processing method according to claim 1 , wherein
a period of time from the time when the first heating liquid supplying step is ended to the time when supply of the low surface tension liquid to the central portion of the upper surface of the substrate is stopped in the hole forming step is longer than a period of time from the time when supply of the heating liquid is started in the second heating liquid supplying step to the time when supply of the heating liquid is stopped in the second heating liquid supplying step.

3. The substrate processing method according to claim 2 , wherein
the hole forming step is a step of stopping, after the low surface tension liquid supplying step is started, supply of the low surface tension liquid to the central portion of the upper surface of the substrate in a state in which a temperature of the central portion of the substrate is higher than a temperature of the low surface tension liquid to be supplied to the upper surface of the substrate.

4. The substrate processing method according to claim 1 , wherein
a minimum value of a rotation speed of the substrate in the second heating liquid supplying step is larger than a minimum value of a rotation speed of the substrate in the first heating liquid supplying step.

5. The substrate processing method according to claim 1 , wherein
a period of time during which the heating liquid is supplied in the second heating liquid supplying step is shorter than a period of time during which the heating liquid is supplied in the first heating liquid supplying step.

6. The substrate processing method according to claim 1 , further comprising:
a closed-space forming step of locating an upper end of a tubular guard, which surrounds the substrate and a shielding member in a plan view, at a position higher than a facing surface of the shielding member disposed above the substrate while causing the facing surface of the shielding member to face the upper surface of the substrate in parallel with the hole expanding step.

7. The substrate processing method according to claim 6 , wherein
the low surface tension liquid supplying step includes a scanning step of causing a landing position of the low surface tension liquid with respect to the upper surface of the substrate to move outward by moving a low surface tension liquid supplying port, which supplies the low surface tension liquid, between the facing surface of the shielding member and the upper surface of the substrate in parallel with the hole expanding step.

8. The substrate processing method according to claim 1 , wherein
the drying step includes a step of raising a rotation speed of the substrate after the hole has expanded to the outer circumference of the substrate and the liquid film of the low surface tension liquid has been removed from the upper surface of the substrate.

9. A substrate processing apparatus comprising:
a substrate holding unit which rotates a substrate around a vertical rotation axis passing through a central portion of the substrate while holding the substrate horizontally to which a rinse liquid adhering;
a low surface tension liquid nozzle which discharges a low surface tension liquid lower in surface tension than the rinse liquid to an upper surface of the substrate held by the substrate holding unit;
a lower surface nozzle which discharges a heating liquid having a higher temperature than a room temperature to a lower surface of the substrate held by the substrate holding unit; and
a controller which conducts the substrate processing method according to claim 1 , wherein the controller comprises a computer including a memory that stores information and a processor that controls the substrate processing apparatus according to the information stored in the memory.

Assignees

• Screen Holdings Co Ltd

Inventors

• Hinode Taiki
• Fujii Sadamu

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0434

  mainly by convection · CPC title

• H10P72/0414

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0406

  for cleaning followed by drying, rinsing, stripping, blasting or the like · CPC title

• H10P70/20 Primary

  Cleaning during device manufacture · CPC title