Wafer container with latching mechanism for large diameter wafers

Patent metadata

Field	Value
Publication number	US-10723525-B2
Application number	US-201816209142-A
Country	US
Kind code	B2
Filing date	Dec 4, 2018
Priority date	Apr 26, 2013
Publication date	Jul 28, 2020
Grant date	Jul 28, 2020

Abstract

A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements for rotating the central rotatable cam plate. In various embodiments, a camming slot formed in the rotatable cammed plate is arcuate and defined by opposing cam surfaces which are selectively engaged by a cam follower, such as a roller, attached to a proximal end of a latch arm. The roller can include unitary axle portions that snap into the proximal end of the latch arm and is supported at both axial ends of the roller. The proximal end of the latch arm can include parallel extensions separated by a gap, and have guide in surfaces to deflect the extensions as the axle portions of the roller are forced into position thereby seating the roller at both axial ends.

First claim

What is claimed is:

1. A door latching mechanism for a wafer container, comprising:
a cammed plate having a central axis and comprising a camming slot having an outer perimeter and defining a cam surface;
a latch arm translatable along an actuation axis and including a proximal end having a first extension and a second extension, the first extension and said second extension extending over said outer perimeter of the cammed plate; and
a cam follower disposed within said camming slot and wherein the cam follower has opposing axial ends with one axial end coupled to the first extension and the other axial end coupled to the second extension of the latch arm to stabilize the cam follower in the latch arm, wherein said cam follower comprises a roller having an engagement portion for engaging the cam surface, the roller being rotatable about a rotational axis that substantially parallel to the central axis of the cammed plate.

2. The door latching mechanism of claim 1 , wherein the engagement portion of the roller defines one of a convex cross-sectional profile and a concave cross-sectional profile, the cross-sectional profile of the roller being complementary to a cross-sectional profile of the cam surface.

3. The door latching mechanism of claim 1 , wherein the engagement portion of the roller defines a flat cross sectional profile.

4. The door latching mechanism of claim 1 , wherein the engagement portion of the roller defines one of a convex cross-sectional profile and a concave cross-sectional profile, the cross-sectional profile of the roller being mis-matched to a cross-sectional profile of the cam surface.

5. The door latching mechanism of claim 1 , wherein the engagement portion of the roller defines convex cross-sectional profile having planar surfaces that are inclined with respect to each other and that intersect to define an apex.

6. The door latching mechanism of claim 1 , wherein the roller is rotatable about an axle having opposing axial ends.

7. The door latching mechanism of claim 6 , wherein an outer diameter of the engagement portion of the roller is at least two times greater and less than or equal to five times greater than the axle diameter.

8. The door latching mechanism of claim 6 , wherein the axle is in the range of 20% to 40% inclusive of the outer diameter of the engagement portion.

9. The door latching mechanism of claim 6 , wherein the axle is integrally formed with said roller.

10. The door latching mechanism of claim 6 , wherein the axle is selected from a group consisting of a dowel pin, a rivet, a snap-in plug, and a shaft with retaining ring.

11. The door latching mechanism of claim 1 , wherein the first extension and the second extension each include a mounting structure for engagement with the opposing axial ends of the cam follower.

Assignees

• Entegris Inc

Inventors

• Gregerson Barry
• Fuller Matthew A

Classifications

• H10P72/3404

  Storage means · CPC title

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1916

  characterised by sealing arrangements · CPC title

• H10P72/1914 Primary

  characterised by locking systems · CPC title

• H10P72/19

  closed carriers · CPC title