Separators for handling, transporting, or storing semiconductor wafers
US-2024429080-A1 · Dec 26, 2024 · US
US9512876B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9512876-B2 |
| Application number | US-201414583751-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 28, 2014 |
| Priority date | Nov 25, 2014 |
| Publication date | Dec 6, 2016 |
| Grant date | Dec 6, 2016 |
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Official abstract text for this publication.
The present invention relates to a latch guide assembly configured on the bottom of a wafer carrier. The latch guide assembly comprises a guide module having at least one guiding groove, a latch module having at least one side plate and at least one recess on the at least one side plate, and at least one rolling unit configured between the at least one guiding groove and the at least one recess. The latch module combines with the guide module via the at least one rolling unit and moves along with the guide module. The latch guide assembly provides a precise moving mechanism to lock/unlock the wafer carrier and reduces both the failure rate and dust production.
Opening claim text (preview).
What is claimed is: 1. A latch guide assembly configured on a bottom of a wafer carrier, comprising: a guide module, connected to the bottom and comprising at least one guiding groove; a latch module, comprising at least one side plate, at least one front plate, and a rear plate, wherein the at least one side plate further comprises at least one recess; and at least one rolling unit, wherein the at least one rolling unit is configured between the at least one guiding groove and the at least one recess; a latch slot, comprising at least two mouths configured to accommodate the at least one front plate; a lock module, connected to the bottom of the wafer carrier and the rear plate respectively and comprising a pivot member and an elastic positioning member; wherein the pivot member contains two auxiliary units and the elastic positioning member contains four arcuate notches; wherein the two auxiliary units are surrounded by the elastic positioning member and the four arcuate notches are configured to accommodate the two auxiliary units; wherein the latch module combines with the guide module via the at least one rolling unit and the latch module is able to protrude or retract along the guide module. 2. The latch guide assembly as claimed in claim 1 , wherein two ends of the guide module have different thicknesses, and wherein the at least one guiding groove is a linear groove and is configured on the guide module obliquely. 3. The latch guide assembly as claimed in claim 1 , wherein the guide module further comprises at least one engaging member. 4. The latch guide assembly as claimed in claim 1 , wherein the at least one rolling unit is a ball, a roller or a bearing. 5. The latch guide assembly as claimed in claim 1 , wherein the at least one front plate further connects to a roller member. 6. The latch guide assembly as claimed in claim 1 , wherein the rear plate further connects to a connector member. 7. The latch guide assembly as claimed in claim 6 , wherein the at least one side plate, the at least one front plate, the rear plate, and the connector member are formed integrally. 8. The latch guide assembly as claimed in claim 1 , wherein the guide module, the latch module, or the at least one rolling unit is made of polyetheretherketone (PEEK).
characterised by locking systems · CPC title
Fixing of a carriage or rail, e.g. rigid mounting to a support structure or a movable part · CPC title
with snap-fit, e.g. by clips · CPC title
Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along · CPC title
Ball or roller bearings · CPC title
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