Substrate treating method

Patent metadata

Field	Value
Publication number	US-10698315-B2
Application number	US-201715668801-A
Country	US
Kind code	B2
Filing date	Aug 4, 2017
Priority date	Aug 18, 2016
Publication date	Jun 30, 2020
Grant date	Jun 30, 2020

Abstract

Disclosed is a substrate treating method including a solvent supplying step of supplying a solvent to a center part of a substrate while increasing a rotation speed of the substrate. In the solvent supplying step, the solvent is successively supplied to the substrate until the solvent reaches a periphery edge of the substrate. With such a substrate treating method, the solvent is able to cover a substrate surface entirely with effective suppression of particles. In other words, a process of supplying the solvent to the substrate is performable with effectively improved quality.

First claim

What is claimed is:

1. A substrate treating method for treating a substrate, the substrate treating method comprising:
a solvent supplying step of supplying a solvent at a center part of the substrate while increasing a rotation speed of the substrate, wherein
in the solvent supplying step, the solvent is continuously supplied to the substrate until the solvent reaches a periphery edge of the substrate,
the solvent supplying step further comprises:
a first constant speed step of maintaining the rotation speed of the substrate at a first speed while the solvent is supplied to the substrate; and
a first accelerating step of increasing the rotation speed of the substrate from the first speed to a second speed, higher than the first speed, subsequent to the first constant speed step while the solvent is continuously supplied to the substrate, and
the first accelerating step starts before the solvent reaches the periphery edge of the substrate.

2. The substrate treating method according to claim 1 , wherein
the solvent supplying step further comprises a second constant speed step of maintaining the rotation speed of the substrate at the second speed subsequent to the first accelerating step while the solvent is continuously supplied to the substrate, and
the second constant speed step starts before the solvent reaches the periphery edge of the substrate.

3. The substrate treating method according to claim 2 , wherein
the solvent supplying step further comprises a second accelerating step of increasing the rotation speed of the substrate from the second speed to a third speed, higher than the second speed, subsequent to the second constant speed step while the solvent is continuously supplied to the substrate, and
the second accelerating step starts before the solvent reaches the periphery edge of the substrate.

4. The substrate treating method according to claim 3 , wherein
the solvent supplying step further comprises a third constant speed step of maintaining the rotation speed of the substrate at the third speed subsequent to the second accelerating step while the solvent is continuously supplied to the substrate, and
the third constant speed step starts before the solvent reaches the periphery edge of the substrate.

5. The substrate treating method according to claim 1 , wherein
the first speed is 0 rpm or more and less than 30 rpm.

6. The substrate treating method according to claim 1 , wherein
the rotation speed of the substrate when the solvent reaches the periphery edge of the substrate is less than 1500 rpm.

7. The substrate treating method according to claim 1 , wherein
the rotation speed of the substrate when the solvent reaches the periphery edge of the substrate is less than 200 rpm.

8. The substrate treating method according to claim 1 , wherein
in the solvent supplying step, the rotation speed of the substrate increases in an S-shaped manner during at least a part of a period from when the solvent starts to be supplied to the substrate until when the solvent reaches the periphery edge of the substrate.

9. The substrate treating method according to claim 1 , further comprising:
a chemical supplying step of supplying a chemical to the substrate after supply of the solvent to the substrate is completed.

10. The substrate treating method according to claim 1 , further comprising:
a simple rotation step of rotating the substrate without supplying any processing liquid to the substrate after supply of the solvent to the substrate is completed.

11. A substrate treating method for treating the substrate, the substrate treating method comprising:
a solvent supplying step of supplying a solvent to a center part of the substrate while increasing a rotation speed of the substrate, wherein
in the solvent supplying step, the rotation speed of the substrate increases by three or more stages during a period from when the solvent starts to be supplied to the substrate until when the solvent reaches a periphery edge of the substrate,
the solvent supplying step further comprises:
a first constant speed step of maintaining the rotation speed of the substrate at a first speed while the solvent is supplied to the substrate;
a second constant speed step of maintaining the rotation speed of the substrate at a second speed, higher than the first speed, subsequent to the first constant speed step; and
a third constant speed step of maintaining the rotation speed of the substrate at a third speed, higher than the second speed, subsequent to the second constant speed step, and
the third constant speed step starts before the solvent reaches the periphery edge of the substrate.

12. The substrate treating method according to claim 11 , wherein
in the solvent supplying step, the solvent is supplied to the substrate continuously until the solvent reaches the periphery edge of the substrate.

13. The substrate treating method according to claim 11 , wherein
the rotation speed of the substrate when the solvent reaches the periphery edge of the substrate is less than 1500 rpm.

14. The substrate treating method according to claim 11 , wherein
the rotation speed of the substrate when the solvent reaches the periphery edge of the substrate is less than 200 rpm.

15. The substrate treating method according to claim 11 , wherein
in the solvent supplying step, the rotation speed of the substrate increases in an S-shaped manner during at least a part of a period from when the solvent starts to be supplied to the substrate until when the solvent reaches the periphery edge of the substrate.

16. The substrate treating method according to claim 11 , further comprising:
a chemical supplying step of supplying a chemical to the substrate after supply of the solvent to the substrate is completed.

17. A substrate treating method for treating a substrate, the substrate treating method comprising:
a solvent supplying step of supplying a solvent at a center part of the substrate while increasing a rotation speed of the substrate, wherein
the solvent supplying step further comprises:
a first constant speed step of maintaining the rotation speed of the substrate at a first speed while the solvent is supplied to the substrate;
a first accelerating step of increasing the rotation speed of the substrate from the first speed to a second speed, higher than the first speed, subsequent to the first constant speed step while the solvent is continuously supplied to the substrate;
a second constant speed step of maintaining the rotation speed of the substrate at the second speed subsequent to the first accelerating step while the solvent is continuously supplied to the substrate; and
a second accelerating step of increasing the rotation speed of the substrate from the second speed to a third speed, higher than the second speed, subsequent to the second constant speed step while the solvent is continuously supplied to the substrate.

18. A substrate treating method for treating a substrate according to claim 17 , wherein the second accelerating step starts before the solvent reaches the periphery edge of the substrate.

Assignees

• Screen Holdings Co Ltd

Inventors

• Sagae Chikara
• Imamura Masanori

Classifications

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10P72/0604

  Process monitoring, e.g. flow or thickness monitoring · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• H10P70/54

  Cleaning of wafer edges · CPC title

• G03F7/30

  Imagewise removal using liquid means · CPC title