Method for fabricating two dimensional nanostructured tungsten carbide
US-9175387-B2 · Nov 3, 2015 · US
US10697073B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10697073-B2 |
| Application number | US-201715608082-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 30, 2017 |
| Priority date | Aug 8, 2016 |
| Publication date | Jun 30, 2020 |
| Grant date | Jun 30, 2020 |
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A method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake may include: forming a tungsten carbide nanoflake on a nanocrystalline diamond film by means of a chemical vapor deposition process in which hydrogen plasma is applied; and increasing activity of the tungsten carbide nanoflake to a hydrogen evolution reaction by removing an oxide layer or a graphene layer from a surface of the tungsten carbide nanoflake. Since an oxide layer and/or a graphene layer of a surface of tungsten carbide is removed by means of cyclic cleaning after tungsten carbide is formed, hydrogen evolution reaction (HER) activity of the tungsten carbide may be increased, thereby enhancing utilization as a catalyst electrode.
Opening claim text (preview).
What is claimed is: 1. A method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake, comprising: forming a tungsten carbide nanoflake on a nanocrystalline diamond film by means of a chemical vapor deposition process in which hydrogen plasma is applied; and increasing activity of the tungsten carbide nanoflake to a hydrogen evolution reaction by removing an oxide layer or a graphene layer from a surface of the tungsten carbide nanoflake, wherein removing the oxide layer or the graphene layer from the surface of the tungsten carbide nanoflake comprises reducing a thickness of the oxide layer or the graphene layer by immersing the tungsten carbide nanoflake in a cleaning solution, applying a voltage to the tungsten carbide nanoflake immersed in the cleaning solution, and performing a plurality of cycles, each cycle comprising changing the applied voltage. 2. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 1 , wherein in the chemical vapor deposition process in which hydrogen plasma is applied, in a state where a substrate having a nanocrystalline diamond film is provided on an anode in a chamber and a surface-carburized tungsten cathode is provided at a location upwardly spaced apart from the substrate, hydrogen plasma is applied into the chamber. 3. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 1 , wherein the step of forming a tungsten carbide nanoflake includes controlling the degree of supersaturation at a growth front of tungsten carbide so that the tungsten carbide grows to have a nanowall structure. 4. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 3 , wherein the step of controlling the degree of supersaturation at a growth front of tungsten carbide includes controlling a flux of growth species by adjusting a process temperature of the chemical vapor deposition process in which hydrogen plasma is applied. 5. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 3 , wherein the step of controlling the degree of supersaturation at a growth front of tungsten carbide includes controlling a flux of growth species by adjusting a discharge voltage and current which is applied for generating hydrogen plasma in the chemical vapor deposition process in which hydrogen plasma is applied. 6. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 2 , wherein the surface-carburized tungsten cathode has a carbonization layer formed to a predetermined depth from the surface of the tungsten carbide nanoflake by exposing the tungsten cathode to a carbon environment of a predetermined temperature, and the carbonization layer forms a WC x structure. 7. The method for manufacturing an electrode for hydrogen production using a tungsten carbide nanoflake according to claim 1 , after the increasing activity of the tungsten carbide nanoflake to a hydrogen evolution reaction, further comprising: forming a protection film to partially cover the surface of the tungsten carbide nanoflake.
consisting of a single element or compound · CPC title
After-treatment · CPC title
Controlling or regulating the coating process {(C23C16/45557, C23C16/279 take precedence)} · CPC title
using radio frequency discharges · CPC title
using electric discharges {(generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34)} · CPC title
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