Composition for forming a coating type silicon-containing film, substrate, and patterning process
US-2016096977-A1 · Apr 7, 2016 · US
US10689514B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10689514-B2 |
| Application number | US-201615740227-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 8, 2016 |
| Priority date | Jul 9, 2015 |
| Publication date | Jun 23, 2020 |
| Grant date | Jun 23, 2020 |
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A silicon-containing resin composition with which it is possible to form a silica-based coating film in which generation of cracks is minimized, a method for forming a silica-based coating film using the silicon-containing resin composition, and a crack-free silica-based coating film formed using the silicon-containing resin composition. The silicon-containing resin composition includes a silicon-containing resin and a solvent, in which one or more of siloxane resins and polysilanes is used as the silicon-containing resin, and the solvent contains a cycloalkyl acetate having a specific structure.
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The invention claimed is: 1. A silicon-containing resin composition comprising a silicon-containing resin, a nitroxy compound, and a solvent, wherein the silicon-containing resin is one or more selected from the group consisting of a siloxane resin and a polysilane, and the solvent contains a cycloalkyl acetate represented by the following formula (S1): wherein R s1 represents an alkyl group having 1 to 3 carbon atoms; p is an integer of 1 to 6; and q is an integer of 0 to (p+1) and a content of the cycloalkyl acetate represented by the above formula (S1) in the solvent is 30 to 100% by mass. 2. The silicon-containing resin composition according to claim 1 , further comprising a curing agent. 3. The silicon-containing resin composition according to claim 2 , wherein the curing agent comprises at least one curing agent selected from the group consisting of curing agents that generate a base component by the action of light or heat, Brønsted acids, imidazoles, organic amines, organophosphorus compounds, organophosphorus compound complexes, complexes of a Lewis acid and an organic amine, and amidines. 4. A method for forming a silica-based coating film, comprising: applying the silicon-containing resin composition according to claim 1 to a substrate to form a coating film; and baking the coating film. 5. The method for forming a silica-based coating film according to claim 4 , wherein the silica-based coating film has a film thickness of 0.01 to 20 μm. 6. A method for forming a silica-based coating film, comprising: applying the silicon-containing resin composition according to claim 2 to a substrate to form a coating film; and baking the coating film. 7. The method for forming a silica-based coating film according to claim 6 , wherein the silica-based coating film has a film thickness of 0.01 to 20 μm.
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