Electrodeposition processes for magnetostrictive resonators
US-10132699-B1 · Nov 20, 2018 · US
US10683580B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10683580-B2 |
| Application number | US-201815881242-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2018 |
| Priority date | May 15, 2017 |
| Publication date | Jun 16, 2020 |
| Grant date | Jun 16, 2020 |
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A method for manufacturing a metallic nanospring includes preparing a nanotemplate having a nanopore and including a working electrode disposed on its one surface, preparing a first metal precursor mixture including ascorbic acid (C 6 H 8 O 6 ), vanadium (IV) oxide sulfate (VOSO 4 .xH 2 O), and a metal precursor solution including a metal desired to be deposited, preparing a second metal precursor mixture by mixing the first metal precursor mixture with nitric acid (HNO 3 ), depositing a metallic nanospring into the nanopore using electrodeposition by dipping the nanotemplate into the second metal precursor mixture and applying current between a counter electrode inserted into the second metal precursor mixture and the working electrode, and selectively removing the working electrode on the nanotemplate with the deposited metallic nanospring and the nanotemplate.
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What is claimed is: 1. A method for manufacturing a metallic nanospring, comprising: preparing a nanotemplate having a nanopore and including a working electrode disposed on a surface of the nanotemplate; preparing a first metal precursor mixture including ascorbic acid (C 6 H 8 O 6 ), vanadium (IV) oxide sulfate hydrate (VOSO 4 .xH 2 O), and a metal precursor solution including a metal desired to be deposited; preparing a second metal precursor mixture by mixing the first metal precursor mixture with nitric acid (HNO 3 ); depositing a metallic nanospring into the nanopore using electrodeposition by dipping the nanotemplate into the second metal precursor mixture and applying current between a counter electrode inserted into the second metal precursor mixture and the working electrode; and selectively removing both the working electrode and the nanotemplate, on which the metallic nanospring was deposited, to obtain the metallic nanospring. 2. The method according to claim 1 , wherein: the metal precursor solution includes at least one of cobalt (II) sulfate heptahydrate (CoSO 4 .7H 2 O) and iron (II) sulfate heptahydrate (FeSO 4 .7H 2 0 ). 3. The method according to claim 2 , wherein: a concentration of cobalt (II) sulfate heptahydrate (CoSO 4 .7H 2 O) is 40 mM in the second metal precursor mixture, a concentration of vanadium (IV) oxide sulfate hydrate (VOSO 4 .xH 2 O) is 20 mM in the second metal precursor mixture, a concentration of iron (II) sulfate heptahydrate (FeSO 4 .7H 2 O) is 40 mM in the second metal precursor mixture, and a concentration of ascorbic acid (C 6 H 8 O 6 ) is 20 mM in the second metal precursor mixture. 4. The method according to claim 3 , wherein: a pH of the second metal precursor mixture is between 1.5 and 2.5. 5. The method according to in claim 1 , wherein: a mean diameter of the nanopore is between 5 and 500 nanometers. 6. The method according to claim 1 , further comprising: dipping the nanotemplate into the second metal precursor mixture and depressurizing a plating bath storing the second metal precursor solution, wherein a pressure of the plating bath is between 100 and 700 Torr. 7. The method according to claim 1 , wherein: a concentration of the ascorbic acid is between 20 and 100 mM in the second metal precursor mixture. 8. The method according to claim 1 , wherein: a density of current flowing to the working electrode during electrodeposition is between 0.1 and 300 mA/cm 2 , and a time required for the electrodeposition is between one minute and 48 hours.
for forming AAO templates · CPC title
using moulds and master templates, e.g. for hot-embossing · CPC title
containing more than 50% by weight of iron or nickel or cobalt · CPC title
Nanostructures, e.g. using aluminium anodic oxidation templates [AAO] · CPC title
characterised by their composition, e.g. comprising materials providing for particular spring properties (composition and manufacture of clock or watch springs G04B1/145) · CPC title
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