Movable body apparatus, moving method, exposure apparatus, exposure method, flat-panel display manufacturing method, and device manufacturing method

Patent metadata

Field	Value
Publication number	US-10670977-B2
Application number	US-201716337272-A
Country	US
Kind code	B2
Filing date	Sep 29, 2017
Priority date	Sep 30, 2016
Publication date	Jun 2, 2020
Grant date	Jun 2, 2020

Abstract

A movable body apparatus that moves a substrate equipped with: a substrate holder which can move in the X-axis and the Y-axis directions; a Y coarse movement stage can move in the Y-axis direction, a first measurement system acquiring position information on the substrate holder with heads provided at the substrate holder and a scale provided at the Y coarse movement stage; a second measurement system acquiring position information on the Y coarse movement stage with heads at the Y coarse movement stage and a scale; and a control system controlling the position of the substrate holder based on position information acquired by the first and the second measurement systems, and the first measurement system irradiates a measurement beam on the scale while moving the heads in the X-axis direction, and the second measurement system irradiates a measurement beam on the scale while moving the heads in the Y-axis direction.

First claim

The invention claimed is:

1. A movable body apparatus, comprising:
a first movable body that holds an object and can move in a first direction and a second direction intersecting with each other;
a second movable body that can move in the second direction;
a reference member that serves as a reference on movement of the first movable body in the first direction and the second direction;
a first measurement system that acquires position information on the first movable body with respect to the reference member with a first head and a first grating area, the first head being provided at one of the first movable body and the second movable body, the first grating area being provided at the other of the first movable body and the second movable body, and the first grating area having measurement components in the first direction and the second direction that allow measurement of a moving range in the first direction of the first movable body;
a second measurement system that acquires position information on the second movable body with respect to the reference member with a second head and a second grating area, the second head being provided at one of the second movable body and the reference member, the second grating area being provided at the other of the second movable body and the reference member, and the second grating area having measurement components in the first direction and the second direction that allow measurement of a moving range in the second direction of the second movable body; and
a control system that controls a position of the first movable body in the first direction and the second direction with respect to the reference member, based on the position information acquired by the first measurement system and the second measurement system, wherein
the first measurement system acquires the position information on the first movable body by irradiating the first grating area with a measurement beam while the first head is moved in the first direction with respect to the first grating area, and

the second measurement system acquires the position information on the second movable body by irradiating the second grating area with a measurement beam while the second head is moved in the second direction with respect to the second grating area.

2. The movable body apparatus according to claim 1 , wherein
the first movable body moves in the first direction in a manner that measurement beams irradiated from the first head and from the second head do not move off from the first grating area and the second grating area, respectively.

3. The movable body apparatus according to claim 2 , wherein
the first movable body moves in the second direction in a manner that a measurement beam irradiated from the first head does not move off from the first grating area.

4. The movable body apparatus according to claim 1 , wherein
the other of the second grating area and the second head is provided at the reference member.

5. The movable body apparatus according to claim 1 , further comprising:
a measurement system that measures relative position information between the other of the first grating area and the first head and one of the second grating area and the second head.

6. The movable body apparatus according to claim 1 , wherein
the first head is provided at the first movable body.

7. The movable body apparatus according to claim 1 , wherein
the second movable body supports the first movable body.

8. The movable body apparatus according to claim 1 , further comprising:
a drive system that makes the second movable body move in the second direction.

9. The movable body apparatus according to claim 1 , further comprising:
a support section that supports the object in a non-contact manner, wherein
the first movable body moves the object supported in a non-contact manner by the support section in the first direction and the second direction.

10. The movable body apparatus according to claim 1 , wherein
the first movable body supports an edge section of the object supported in a non-contact manner by the support section.

11. The movable body apparatus according to claim 10 , wherein
the first movable body is structured by a plurality of members provided separately in one of the first direction and the second direction, and
the plurality of members hold different areas of the object.

12. The movable body apparatus according to claim 1 , wherein
the first movable body holds a side at one end of an outer periphery edge section of the object.

13. The movable body apparatus according to claim 12 , wherein
the first movable body is structured by a plurality of members provided separately in one of the first direction and the second direction, and
the plurality of members hold different areas of the object.

14. An exposure apparatus, comprising:
the movable body apparatus according to claim 1 ; and
an optical system that irradiates the object with an energy beam, and exposes the object.

15. The exposure apparatus according to claim 14 , wherein
the first direction is a direction in which the object is relatively moved with respect to the optical system by the first movable body at a time of the exposure.

16. The exposure apparatus according to claim 14 , wherein
the second direction is a direction in which the object having a plurality of divided areas is moved to change a target area of the exposure.

17. The exposure apparatus according to claim 14 , wherein
the object is a substrate used in a flat-panel display.

18. The exposure apparatus according to claim 17 , wherein
the substrate has at least one of a side length and a diagonal length that is 500 mm and over.

19. A flat-panel display manufacturing method, comprising:
exposing the object using the exposure apparatus according to claim 14 ; and
developing the object that has been exposed.

20. A device manufacturing method, comprising:
exposing the object using the exposure apparatus according to claim 14 ; and
developing the object that has been exposed.

21. A movable body apparatus, comprising:
a first movable body that holds an object and can move in a first direction and a second direction intersecting with each other;
a first measurement system in which one of a first grating area including measurement components in the first direction and the second direction and a first head that irradiates the first grating area with a measurement beam while moving in the first direction with respect to the first grating area is provided at the first movable body, the first measurement system measuring position information on the first movable body in the first direction and the second direction;

a second movable body that is provided with the other of the first grating area and the first head, and can move in the second direction;
a second measurement system in which one of a second grating area including measurement components in the first direction and the second direction and a second head that irradiates the second grating area with a measurement beam while moving in the second direction with respect to the second grating area is provided at the second movable body, and the other of the second grating area and the second head is provided facing the second movable body, the second measurement system measuring position information on the second movable body in the first direction and the second direction; and
a control system that performs movement control of the first movable body in

Assignees

• Nikon Corp

Inventors

• Aoki Yasuo

Classifications

• G01B11/272

  using photoelectric detection means · CPC title

• G03F9/00

  Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/70358

  Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging · CPC title

• G03F9/70

  for microlithography (measuring printed patterns for monitoring overlay G03F7/70633 or focus G03F7/70641; projection system adjustment G03F7/70258; position control G03F7/70775) · CPC title

• G03F7/70775 Primary

  Position control, e.g. interferometers or encoders for determining the stage position · CPC title