Optical modulation device and method of operating the same

Patent metadata

Field	Value
Publication number	US-10670941-B2
Application number	US-201815971044-A
Country	US
Kind code	B2
Filing date	May 4, 2018
Priority date	Jul 13, 2017
Publication date	Jun 2, 2020
Grant date	Jun 2, 2020

Abstract

Provided are an optical modulation device and a method of operating the same. The optical modulation device may include a nano-antenna, a conductor, and an active layer located between the nano-antenna and the conductor. The optical modulation device may further include a first dielectric layer located between the active layer and the conductor and a second dielectric layer located between the active layer and the nano-antenna. The optical modulation device may further include a signal applying unit configured to independently apply an electrical signal to at least two of the nano-antenna, the active layer, and the conductor.

First claim

What is claimed is:

1. An optical modulation device comprising:
a nano-antenna;
a conductor;
an active layer disposed between the nano-antenna and the conductor, wherein at least one property of the active layer is variable based on a voltage applied thereto;
a first dielectric layer disposed between the active layer and the conductor;
a second dielectric layer disposed between the active layer and the nano-antenna; and
a signal applying unit configured to independently apply a first voltage to the conductor and apply a second voltage that is different from the first voltage to the non-antenna.

2. The optical modulation device of claim 1 , wherein the signal applying unit comprises:
a first voltage applying unit configured to apply the first voltage between the conductor and the active layer; and
a second voltage applying unit configured to apply the second voltage between the active layer and the nano-antenna.

3. The optical modulation device of claim 1 , wherein the signal applying unit is configured to apply a third voltage to the active layer.

4. The optical modulation device of claim 3 , wherein the third voltage is a reference voltage for the first voltage and the second voltage.

5. The optical modulation device of claim 3 , wherein the third voltage is a ground voltage.

6. The optical modulation device of claim 1 , wherein the active layer comprises a first charge concentration varying region and a second charge concentration varying region, wherein the first charge concentration varying region and the second charge concentration varying region are formed by an electrical signal applied to the active layer by the signal applying unit, and
wherein the first charge concentration varying region is adjacent to the first dielectric layer, and the second charge concentration varying region is adjacent to the second dielectric layer.

7. The optical modulation device of claim 1 , wherein the conductor is a back reflector electrode disposed under the active layer.

8. The optical modulation device of claim 1 , wherein the conductor is a metal layer.

9. The optical modulation device of claim 1 , wherein the active layer is a first active layer, and the optical modulation device further comprises a second active layer disposed between the conductor and the first dielectric layer, wherein the second active layer electrically contacts the conductor.

10. The optical modulation device of claim 1 , wherein the active layer is a first active layer, and the optical modulation device further comprises:
a second active layer disposed between the first dielectric layer and the second dielectric layer; and
an intermediate dielectric layer disposed between the first active layer and the second active layer.

11. The optical modulation device of claim 1 , wherein the active layer comprises a lower active layer and an upper active layer, and
wherein one of a material of the lower layer and doping characteristics of the lower layer is different from a material of the upper layer and doping characteristics of the upper layer, respectively.

12. The optical modulation device of claim 1 , wherein the conductor, the first dielectric layer, the active layer, the second dielectric layer, and the nano-antenna constitute one unit device, and
wherein the optical modulation device comprises a plurality of the unit devices.

13. The optical modulation device of claim 12 , wherein the plurality of unit devices are arranged in one of a one-dimensional (1D) array and a two-dimensional (2D) array.

14. The optical modulation device of claim 1 , wherein the nano-antenna comprises a plurality of the nano-antennas corresponding to the conductor.

15. The optical modulation device of claim 1 , wherein the active layer comprises an electro-optic material and a permittivity of the electro-optic material varies according to an electrical signal applied by the signal applying unit to the active layer.

16. The optical modulation device of claim 1 , wherein the active layer comprises at least one of a transparent conductive oxide and a transition metal nitride.

17. The optical modulation device of claim 1 , wherein at least one of the first dielectric layer and the second dielectric layer comprises at least one of an insulating silicon compound and an insulating metal compound.

18. The optical modulation of claim 1 , wherein the optical modulation device is configured to change a reflection phase of incident light by increasing the first voltage at a same time while decreasing the second voltage, or by decreasing the first voltage at a same time while increasing the second voltage.

19. The optical modulation device of claim 1 , wherein the optical modulation device is configured to change a reflection phase of incident light by up to 360°.

20. An optical apparatus comprising the optical modulation device of claim 1 .

21. The optical apparatus of claim 20 , wherein the optical modulation device is configured to steer a beam in one of a one-dimensional (1D) manner and two-dimensional (2D) manner.

22. The optical apparatus of claim 20 , wherein the optical apparatus comprises at least one of a light detection and ranging (LiDAR) apparatus, a three-dimensional (3D) image acquisition apparatus, a holographic display apparatus, and a structured light generating apparatus.

23. An optical modulation device comprising:
a nano-antenna;
a conductor;
an active layer disposed between the nan-antenna and the conductor, wherein at least one property of the active layer is variable based on a voltage applied thereto;
a first dielectric layer dispose between the active layer and the conductor;
a second dielectric layer disposed between the active layer and he nano-antenna; and
a signal applying unit configured to independently apply an electrical signal to at least two of the nano-antenna, the active layer, and the conductor, wherein the conductor comprises a plurality of the conductors spaced apart from one another, and the nano-antenna comprises a plurality of nano-antennas are spaced apart from one another.

24. The optical modulation device of claim 1 , wherein the optical modulation device is configured to induce a phase modulation of light reflected by the nano-antenna.

25. The optical modulation device of claim 23 , wherein the signal applying unit is configured to apply different voltages to at least two of the plurality of conductors, and to apply different voltages to at least two of the plurality of nano-antennas.

26. The optical modulation device of claim 23 , wherein the signal applying unit is configured to apply voltages independently to each of the plurality of conductors, and to apply voltages independently to each of the plurality of nano-antennas.

27. An optical modulation device comprising:
a plurality of conductive elements spaced apart from one another;
a plurality of nano-antennas facing the plurality of conductive elements;
an active layer disposed between the plurality of conductive elements and the plurality of nano-antennas, wherein the active layer is spaced apart from the plurality of conductive elements and from the plurality of nano-antennas and wherein at least one property of the active layer is variable based on a voltage applied thereto; and
a voltage applying unit configured to independently apply a voltage to each of the plurality of conductive elements and to each of the pluralit

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Junghyun
• Kyoung Jisoo
• Kim Sunil
• Shin Changgyun
• Jeong Byunggil
• Choi Byounglyong

Classifications

• G02F2203/50

  Phase-only modulation · CPC title

• G02F2201/18

  parallel · CPC title

• G02F1/0123

  Circuits for the control or stabilisation of the bias voltage, e.g. automatic bias control [ABC] feedback loops · CPC title

• G02F2201/12

  electrode · CPC title

• G02F2202/20

  LiNbO3, LiTaO3 · CPC title