Optical modulating device having gate structure

Patent metadata

Field	Value
Publication number	US-9632216-B2
Application number	US-201615010967-A
Country	US
Kind code	B2
Filing date	Jan 29, 2016
Priority date	Feb 3, 2015
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

An optical modulation device includes a plasmonic nano-antenna layer, a metal layer that faces the plasmonic nano-antenna layer, and a permittivity variation layer and a dielectric material layer between the plasmonic nano-antenna layer and the metal layer. An active area formed in the permittivity variation layer according to an external signal may function as a gate that controls optical modulation performance.

First claim

What is claimed is:

1. An optical modulation device comprising:
a plasmonic nano-antenna layer;
a metal layer;
a permittivity variation layer disposed between the plasmonic nano-antenna layer and the metal layer, the permittivity variation layer having a permittivity that varies according to a signal applied thereto; and
a dielectric material layer disposed between the plasmonic nano-antenna layer and the metal layer.

2. The optical modulation device of claim 1 , further comprising: a signal applying means configured to apply the signal to the permittivity variation layer, thereby causing a change in the permittivity of the permittivity variation layer.

3. The optical modulation device of claim 2 , wherein the signal applying means comprises a power source configured to apply a voltage between the plasmonic nano-antenna layer and the metal layer.

4. The optical modulation device of claim 3 , wherein the permittivity variation layer comprises an electro-optic material having a permittivity that varies according to an electrical signal applied thereto.

5. The optical modulation device of claim 4 , wherein the permittivity variation layer comprises a transparent conductive material.

6. The optical modulation device of claim 4 , wherein the permittivity variation layer comprises a transition metal nitride.

7. The optical modulation device of claim 4 , wherein the permittivity variation layer comprises an active area having a carrier concentration that varies according to a voltage applied between the plasmonic nano-antenna layer and the metal layer.

8. The optical modulation device of claim 7 , wherein the active area of the permittivity variation layer is adjacent to the dielectric material layer.

9. The optical modulation device of claim 7 , wherein a real part of a dielectric constant of the permittivity variation layer is equal to 0 in a predetermined wavelength band.

10. The optical modulation device of claim 9 , wherein the predetermined wavelength band is different according to the carrier concentration in the active area.

11. The optical modulation device of claim 9 , wherein the voltage applied by the power source between the plasmonic nano-antenna layer and the metal layer is in a range including a voltage value at which a resonance wavelength band of the plasmonic nano-antenna layer and the predetermined wavelength band are identical.

12. The optical modulation device of claim 4 ,
wherein the plasmonic nano-antenna layer comprises a plurality of nano-antenna lines spaced apart from each other in a first direction, and
wherein each of the plurality of nano-antenna lines comprises a plurality of nano-antennas connected to each other in a second direction different from the first direction.

13. The optical modulation device of claim 12 , wherein each of the plurality of nano-antennas has a crisscross shape in which a nano rod having a length in the first direction and a nano rod having a length in the second direction cross each other.

14. The optical modulation device of claim 12 , wherein each of the plurality of nano-antennas is one of circular, oval, polygonal, X-shaped, and star-shaped.

15. The optical modulation device of claim 12 , wherein the power source is configured to independently apply a voltage between each of the plurality of nano-antenna lines and the metal layer.

16. The optical modulation device of claim 15 , wherein values of voltages applied between the metal layer and each of the plurality of nano-antenna lines have a predetermined regularity in the first direction.

17. The optical modulation device of claim 1 ,
wherein the permittivity variation layer is disposed on the metal layer and the dielectric material layer is disposed on the permittivity variation layer.

18. The optical modulation device of claim 1 ,
wherein the dielectric material layer is disposed on the metal layer and the permittivity variation layer is disposed on the dielectric material layer.

19. The optical modulation device of claim 18 , wherein the permittivity variation layer is patterned in a same shape as the plasmonic nano-antenna layer.

20. The optical modulation device of claim 1 , wherein the plasmonic nano-antenna layer comprises a metal material and a nano pattern of a plurality of through holes formed in the metal material.

21. An optical apparatus comprising the optical modulation device of claim 1 .

22. An optical modulation device comprising:
a plasmonic nano-antenna layer comprising a two-dimensional array of a plurality of nano-antennas;
a metal layer;
a permittivity variation layer disposed between the plasmonic nano-antenna layer and the metal layer, wherein the permittivity variation layer comprises a two-dimensional array of a plurality of active areas, corresponding to the two-dimensional array of the plurality of nano-antennas, each of the plurality of active areas having a carrier concentration that varies according to a voltage applied thereto; and
a dielectric material layer disposed between the plasmonic nano-antenna layer and the metal layer.

Assignees

• Samsung Electronics Co Ltd
• California Inst Of Techn

Inventors

• Han Seunghoon
• Huang Yao-Wei
• Atwater Harry A
• Lee Ho Wai
• Sohkoyan Ruzan
• Papadakis Georgia
• THYAGARAJAN Krishnan

Classifications

• G02F1/0018

  Electro-optical materials · CPC title

• G02F1/292

  by controlled diffraction or phased-array beam steering (controlled diffraction for optical switching G02F1/31) · CPC title

• G02F2203/50

  Phase-only modulation · CPC title

• G02F2203/11

  involving infrared radiation · CPC title

• G02B5/008 Primary

  Surface plasmon devices (diffractive gratings with a pitch less than or comparable to the wavelength G02B5/1809; surface plasmons in integrated optics G02B6/1226; optical analysis of materials by means of surface plasmons G01N21/553) · CPC title