Substrate attachment/detachment device, plating device, control device for a substrate attachment/detachment device, and storage medium that stores a program for causing a computer to execute a method of controlling a substrate attachment/detachment device

Patent metadata

Field	Value
Publication number	US-10665495-B2
Application number	US-201715851655-A
Country	US
Kind code	B2
Filing date	Dec 21, 2017
Priority date	Dec 22, 2016
Publication date	May 26, 2020
Grant date	May 26, 2020

Abstract

A substrate attachment/detachment device which clamps and holds a substrate by means of first and second retaining members of a substrate holder, the device comprising a first holder retainer configured to hold the first retaining member in a first posture; and a second holder retainer configured to be movable in a linear manner toward and away from the first holder retainer, capable of holding the second retaining member in the first posture and a second posture which is substantially orthogonal to the first posture, configured to push the second retaining member against the first retaining member in the first posture to lock the first and second retaining members to each other.

First claim

What is claimed is:

1. A substrate attachment/detachment device which operates a substrate holder to clamp and hold a substrate by means of first and second retaining members of the substrate holder, the substrate attachment/detachment device being a device separate from the substrate holder, the substrate attachment/detachment device comprising:
a first holder retainer configured to hold the first retaining member of the substrate holder in a first posture;
a second holder retainer configured to be movable in a linear manner toward and away from the first holder retainer, capable of holding the second retaining member of the substrate holder in the first posture and a second posture which is substantially orthogonal to the first posture, configured to push the second retaining member of the substrate holder against the first retaining member of the substrate holder in the first posture to lock the first and second retaining members of the substrate holder to each other; and
a support part coupling the second holder retainer to the first holder retainer so that the second holder retainer is movable in the linear manner by way of the support part.

2. The substrate attachment/detachment device of claim 1 , wherein the first posture is a posture substantially perpendicular to an installation surface of the substrate attachment/detachment device.

3. The substrate attachment/detachment device of claim 1 , further comprising a support device including:
a first support plate for supporting the first retaining member on a side opposite to the second holder retainer; and
a locking mechanism for keeping the first retaining member on the first support plate.

4. The substrate attachment/detachment device of claim 3 , wherein
the support device includes a plurality of rods coupled to a face of the first support plate, which is opposite to a face on which the first retaining member is supported, and the first support plate can be shifted by shifting the plurality of rods.

5. The substrate attachment/detachment device of claim 3 , wherein
the locking mechanism includes a pressing member which is rotatable between a position overlapping a face of the first retaining member and a position not overlapping the face of the first retaining member.

6. The substrate attachment/detachment device of claim 3 , wherein
the first retaining member has an arm;
the first holder retainer further has an arm receiver which supports the arm of the first retaining member, the first retaining member being suspended by the arm receiver.

7. The substrate attachment/detachment device of claim 6 , wherein
the arm receiver has a positioning pin which is movable between a position in which the positioning pin is engaged with a positioning hole formed in the arm of the first retaining member and a position in which the positioning pin is not engaged with the positioning hole.

8. The substrate attachment/detachment device of claim 6 , wherein
the arm receiver includes an energization determining device for checking electrical conduction of the substrate via a connector of the first retaining member, and the energization determining device measures a resistance value between external connection contact points of a plurality of external connection contact point pairs of the connector.

9. The substrate attachment/detachment device of claim 3 , wherein
the first support plate has a rectangular shape and is configured to support the first retaining member having a polygonal shape.

10. The substrate attachment/detachment device of claim 1 , wherein
the second holder retainer includes a first actuator configured to actuate a clamp which is provided to the first retaining member supported by the first holder retainer, and thus cause the first retaining member to hold the second retaining member.

11. The substrate attachment/detachment device of claim 10 , wherein
the first actuator includes a first rod-like member configured to shift in a perpendicular direction to the first support plate, and uses the first rod-like member to press a lever coupled to the clamp to rotate the clamp of the first retaining member around an axis parallel to the first support plate.

12. The substrate attachment/detachment device of claim 11 , wherein
the first rod-like member is a piston which is driven by an air cylinder.

13. The substrate attachment/detachment device of claim 1 , wherein
the second holder retainer includes a second support plate for supporting the second retaining member and a second actuator provided to the second support plate, and the second actuator operates a clip provided to the second retaining member to cause the clip to hold the substrate.

14. The substrate attachment/detachment device of claim 13 , wherein
the second actuator includes a second rod-like member configured to shift in a perpendicular direction to the second support plate, and uses the second rod-like member to rotate the clip of the second retaining member around an axis parallel to the second support plate.

15. The substrate attachment/detachment device of claim 14 , wherein
the second rod-like member is a piston which is driven by an air cylinder.

16. The substrate attachment/detachment device of claim 1 , wherein the second holder retainer includes:
a second support plate for supporting the second retaining member;
an adsorption device for keeping the second retaining member on the second support plate;
a turning mechanism actuated by a third actuator to turn the second support plate; and
a linear motion mechanism actuated by a fourth actuator to shift the second support plate toward and away from the first holder retainer.

17. The substrate attachment/detachment device of claim 16 , wherein
the adsorption device includes a pressure adsorption cylinder; and
the pressure adsorption cylinder includes a suction disk that is pressed against the second retaining member, and an opening that opens in the suction disk and supplies gas to a side of the second retaining member.

18. The substrate attachment/detachment device of claim 16 , wherein
the third actuator includes a first electric motor for rotating the second support plate.

19. The substrate attachment/detachment device of claim 16 , wherein the fourth actuator includes a second electric motor, and a rotation-linear motion conversion mechanism configured to convert a motive power of the second electric motor into a linear motion, and the second electric motor includes an electromagnetic brake.

20. The substrate attachment/detachment device of claim 16 , wherein
the second holder retainer further includes a horizontal position determining device configured to come into contact with a lateral face of the second retaining member to position the second retaining member within a plane of the second support plate.

21. The substrate attachment/detachment device of claim 16 , wherein
the second support plate has a rectangular shape and is configured to support the second retaining member having a polygonal shape.

22. A plating device comprising:
a substrate attachment/detachment device which operates a substrate holder to clamp and hold a substrate by means of first and second retaining members of the substrate holder, the substrate attachment/detachment device being a device separate from the substrate holder; and
a plating processing section which receives the substrate holder holding the substrate which has been held in the substrate attachment/detachment device

Assignees

• Ebara Corp

Inventors

• Yokoyama Toshio
• Mukaiyama Yoshitaka
• Tsushima Takuya

Classifications

• C25D7/123 Primary

  Semiconductors first coated with a seed layer or a conductive layer · CPC title

• C25D17/06

  Suspending or supporting devices for articles to be coated · CPC title

• C25D17/001 Primary

  Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells · CPC title

• C25D17/00

  Constructional parts, or assemblies thereof, of cells for electrolytic coating · CPC title

• H10P72/7618

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title