Imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate using a mold, and related methods

Patent metadata

Field	Value
Publication number	US-10663858-B2
Application number	US-201715423613-A
Country	US
Kind code	B2
Filing date	Feb 3, 2017
Priority date	Oct 14, 2011
Publication date	May 26, 2020
Grant date	May 26, 2020

Abstract

An imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold. The imprint apparatus includes a light irradiation unit configured to irradiate the imprint material with light having a first wavelength for curing, and a heating unit configured to heat a partial region of the substrate, the partial region corresponding to the substrate-side pattern region, by irradiating the substrate with light that has passed through the mold and has a second wavelength different from the light having the first wavelength. The heating unit is configured to heat the partial region to deform the substrate-side pattern region by forming an uneven temperature distribution on the substrate-side pattern region by irradiation of the light having the second wavelength with an uneven illumination distribution.

First claim

We claim:

1. An imprint apparatus that forms a pattern of an imprint material on a substrate-side pattern region of a substrate by using a mold, the imprint apparatus comprising:
a light irradiation unit configured to irradiate the imprint material with light having a first wavelength for curing; and
a heating unit configured to heat a region of the substrate, the region corresponding to the substrate-side pattern region, by irradiating the substrate with light that has passed through the mold and has a second wavelength different from the light having the first wavelength, wherein the heating unit is configured to heat the region of the substrate to deform the substrate-side pattern region by forming an uneven temperature distribution on the substrate-side pattern region by irradiation of the light having the second wavelength, with an uneven illumination distribution.

2. The imprint apparatus according to claim 1 , wherein the heating unit heats the region of the substrate by irradiation of the light having the second wavelength, even while the imprint material is irradiated with the light having the first wavelength.

3. The imprint apparatus according to claim 1 , wherein the heating unit includes an optical adjuster configured to adjust the illumination distribution of the light having the second wavelength.

4. The imprint apparatus according to claim 3 , wherein the optical adjuster is one of (i) a liquid crystal device in which a plurality of liquid crystal elements are arranged and (ii) a digital mirror device in which a plurality of mirror elements are arranged.

5. The imprint apparatus according to claim 1 , wherein the heating unit heats the region of the substrate based on a difference between a shape of a mold-side pattern region of the mold and a shape of the substrate-side pattern region.

6. The imprint apparatus according to claim 1 , wherein the heating unit heats the region of the substrate such that a shape difference between a shape of a mold-side pattern region of the mold and a shape of the substrate-side pattern region are reduced.

7. The imprint apparatus according to claim 1 , wherein the heating unit heats the region of the substrate to adjust a shape of the substrate-side pattern region.

8. The imprint apparatus according to claim 1 , wherein the region of the substrate includes the substrate-side pattern region and an outside region other than the substrate-side pattern region, the outside region being next to the substrate-side pattern region.

9. The imprint apparatus according to claim 1 , wherein the second wavelength is from 400 nm to 800 nm.

10. The imprint apparatus according to claim 3 , wherein the optical adjuster comprises a plurality of elements that are adjustable in their irradiation doses to the substrate, and the heating unit performs an irradiation of the light having the second wavelength with the uneven illumination distribution formed by individually adjusting the plurality of elements of the optical adjuster.

Assignees

• Canon Kk

Inventors

• Hayashi Tatusya
• Murakami Yosuke
• Hasegawa Noriyasu
• Torii Hirotoshi
• Tanaka Yusuke

Classifications

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• B29C43/021

  characterised by the shape of the surface · CPC title

• B29C59/026

  of layered or coated substantially flat surfaces · CPC title