Apparatus for controlling flow and method of calibrating same

Patent metadata

Field	Value
Publication number	US-10663337-B2
Application number	US-201715858689-A
Country	US
Kind code	B2
Filing date	Dec 29, 2017
Priority date	Dec 30, 2016
Publication date	May 26, 2020
Grant date	May 26, 2020

Abstract

Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. In one embodiment, a method of calibrating an apparatus for controlling gas flow is disclosed. Specifically, the apparatus may be calibrated on installation using a two-step process of measuring the volume of gas box downstream from the apparatus by flowing nitrogen gas into the gas box and measuring the resulting temperature and rate of pressure rise. Using the computed volume of the gas box, a sweep of several mass flow rates may be performed using the process gas and the gas map for the process gas. The apparatus is calibrated based on the measured temperature and pressure values, which allow calculation of the actual mass flow rate for the process gas as compared with the commanded mass flow rates.

First claim

What is claimed is:

1. An in-situ method of calibrating a gas flow control apparatus for supply of a process gas, the method comprising:
a) installing the gas flow control apparatus in a system for processing articles, the gas flow apparatus being pre-calibrated for a reference gas;
b) providing the reference gas to a gas box of the system at a predetermined flow rate using the gas flow control apparatus, the gas box being sealed;
c) measuring pressure within the gas box as the reference gas is provided to the gas box;
d) determining a volume of the gas box based on the measured pressure of step c);
e) removing the reference gas from the gas box;
f) providing the process gas to the gas box of the system at a plurality of flow rates using the gas flow control apparatus, the gas box being sealed;
g) measuring pressure within the gas box as the process gas is provided to the gas box; and
h) determining a gas map for the process gas based on the determined volume and the measured pressure of step g).

2. The method of claim 1 wherein the system for processing articles further comprises a vacuum valve and a vacuum source, the vacuum valve being opened to remove the reference gas from the gas box in step e).

3. The method of claim 1 wherein the gas flow control apparatus further comprises a valve and the system further comprises a pressure transducer, the pressure transducer operatively coupled to the gas box downstream of the valve of the gas flow control apparatus.

4. The method of claim 3 wherein the pressure transducer is mounted to the gas flow control apparatus.

5. The method of claim 3 wherein the pressure transducer is mounted to the gas box.

6. The method of claim 3 wherein the apparatus controller further comprises a pressure transducer interface and a communication interface, an output from the pressure transducer measured by the pressure transducer interface and communicated to a data logger by the communication interface.

7. The method of claim 3 wherein the system further comprises a second gas flow control apparatus, the pressure transducer mounted to the second gas flow control apparatus.

8. The method of claim 7 wherein the second gas flow control apparatus further comprises a second apparatus controller, the second apparatus controller further comprising a pressure transducer interface and a communication interface, an output from the pressure transducer measured by the pressure transducer interface and communicated to a data logger by the communication interface.

9. The method of claim 3 wherein an output from the pressure transducer is measured by a data acquisition unit and recorded by a data logger.

10. The method of claim 1 wherein the predetermined flow rate of the reference gas is constant, linear, exponential, logarithmic, or parabolic.

11. The method of claim 1 wherein the reference gas is one of nitrogen, oxygen, carbon dioxide, carbon monoxide, argon, or helium.

12. The method of claim 1 wherein the process gas comprises one of nitrogen, oxygen, carbon dioxide, carbon monoxide, argon, helium, hydrogen, hydrogen bromide, hydrogen chloride, hydrogen fluoride, hydrogen sulfide, ammonia, nitric oxide, nitrous oxide, nitrogen trifluoride, chlorine, chlorine trifluoride, dichlorosilane, fluorine, sulfur hexafluoride, arsine, an arsenic compound, boron, a boron compound, germane, a germanium compound, phospine, phosgene, a phospohorous compound, silane, or a silicon compound.

13. The method of claim 1 wherein the plurality of flow rates is a plurality of set points, a linear curve, a parabolic curve, a logarithmic curve, or an exponential curve.

14. An in-situ method of calibrating a gas flow control apparatus for supply of a process gas, the method comprising:
a) installing the gas flow control apparatus in a system for processing articles, the gas flow apparatus comprising a gas flow path extending from a gas inlet to a gas outlet, a valve in the gas flow path, a characterized flow restrictor in the gas flow path, and an apparatus controller having a memory;
b) providing a reference gas to the gas inlet of the gas flow control apparatus;
c) causing the gas flow control apparatus to flow the reference gas into a gas box of the system at a predetermined flow rate by opening the valve of the gas flow control apparatus;
d) using a pressure transducer to measure pressure within the gas box as the reference gas is provided to the gas box, the pressure transducer located downstream of both the valve and the characterized flow restrictor;
e) determining volume of the gas box based on the measured pressure of step d);
f) removing the reference gas from the gas box and closing the valve of the gas flow control apparatus;
g) providing a process gas to the gas inlet of the gas flow control apparatus;
h) causing the gas flow control apparatus to flow the process gas into the gas box by opening the valve of the gas flow control apparatus;
i) measuring pressure within the gas box using the pressure transducer as the process gas is provided to the gas box;
j) determining a gas map for the process gas based on the determined volume and the measured pressure of step i); and
k) storing the gas map in the memory of the apparatus controller.

15. The method of claim 14 wherein the pressure transducer is mounted to the gas flow control apparatus.

16. The method of claim 14 wherein the pressure transducer is mounted to the gas box.

17. The method of claim 14 wherein the apparatus controller further comprises a pressure transducer interface and a communication interface, an output from the pressure transducer measured by the pressure transducer interface and communicated to a data logger by the communication interface.

18. The method of claim 14 wherein the system further comprises a second gas flow control apparatus, the pressure transducer mounted to the second gas flow control apparatus.

19. An in-situ method of calibrating a gas flow control apparatus for supply of a process gas, the method comprising:
a. installing the gas flow control apparatus in a system for processing articles;
b. providing a reference gas to a gas box of the system at a predetermined flow rate using the gas flow control apparatus, the gas box being sealed;
c. measuring pressure within the gas box as the reference gas is provided to the gas box;
d. determining a volume of the gas box based on the measured pressure of step c);
e. removing the reference gas from the gas box;
f. providing the process gas to the gas box of the system at a plurality of flow rates using the gas flow control apparatus, the gas box being sealed;
g. measuring pressure within the gas box as the process gas is provided to the gas box; and
h. determining a gas map for the process gas based on the determined volume and the measured pressure of step g).

20. The method of claim 19 wherein the gas flow control apparatus is calibrated for a reference gas subsequent to step c.

Assignees

• Reno Tech Inc
• Ichor Systems Inc

Inventors

• Penley Sean
• Maeder Michael

Classifications

• G01F15/002 Primary

  for gases · CPC title

• G05D7/0623

  characterised by the set value given to the control element · CPC title

• G05D7/005

  characterised by the use of auxiliary non-electric power combined with the use of electric means · CPC title

• G05D7/0186 Primary

  without moving parts · CPC title

• G05B13/024

  in which a parameter or coefficient is automatically adjusted to optimise the performance · CPC title