High-performance thin-film battery with an interfacial layer

Patent metadata

Field	Value
Publication number	US-10658702-B2
Application number	US-201715722743-A
Country	US
Kind code	B2
Filing date	Oct 2, 2017
Priority date	Oct 2, 2017
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

An all solid-state lithium-based thin-film battery is provided. The all solid-state lithium-based thin-film battery includes a battery material stack of, from bottom to top, an anode-side electrode, an anode region, an aluminum oxide interfacial layer, a solid-state electrolyte layer, a cathode layer, and a cathode-side electrode layer. The all solid-state lithium-based thin-film battery stack is formed by first forming the anode-side of the battery stack and thereafter forming the cathode-side. All solid-state lithium-based thin-film batteries including the aluminum oxide interfacial layer located between the anode region and the solid-state electrolyte layer have improved performance, high capacity, and high reliability.

First claim

What is claimed is:

1. A solid-state lithium-based battery comprising:
a continuous anode-side electrode comprising a first horizontal anode-side electrode finger portion, a vertical anode-side electrode portion and a second horizontal anode-side electrode finger portion, wherein the first and second horizontal anode-side electrode finger portions are spaced apart by a gap and wherein the first horizontal anode-side electrode finger portion contacts a bottom portion of a first sidewall of the vertical anode-side electrode portion, and the second horizontal anode-side electrode finger portion contacts a top portion of the first sidewall of the vertical anode-side electrode portion;
a continuous aluminum oxide interfacial layer located on the sidewalls and topmost surface of first horizontal anode-side electrode finger portion, on the first sidewall of the vertical anode-side electrode portion, and on a bottommost surface, a sidewall surface and a topmost surface of the second horizontal anode-side electrode finger portion;
a lithium-based solid-state electrolyte layer located on the continuous aluminum oxide interfacial layer;
a lithiated cathode material layer located on the lithium-based solid-state electrolyte; and
a cathode-side electrode located on the lithiated cathode material, wherein the cathode-side electrode comprises a first horizontal cathode-side electrode finger portion, a vertical cathode-side electrode portion and a second horizontal cathode electrode finger portion, the first horizontal cathode-side electrode finger portion contacts a middle portion of a first sidewall of the vertical cathode-side electrode portion, and the second horizontal cathode-side electrode finger portion contacts a top portion of the first sidewall of the vertical cathode-side electrode portion, and wherein the first horizontal cathode-side electrode finger portion, and a portion of each of the aluminum oxide interfacial layer, the lithium-based solid-state electrolyte and the lithiated cathode material layer are present in the gap, and the second horizontal cathode-side electrode finger portion is located above the second horizontal anode-side electrode finger portion.

2. The solid-state lithium-based battery of claim 1 , further comprising an anode region located between the aluminum oxide interfacial layer and the anode-side electrode.

3. The solid-state lithium-based battery of claim 2 , wherein the anode region is a lithium accumulation region formed during a charging/recharging process.

4. The solid-state lithium-based battery of claim 3 , wherein the anode region is a deposited anode material.

5. The solid-state lithium-based battery of claim 1 , wherein the aluminum oxide interfacial layer has a thickness from 1 nm to 50 nm.

6. The solid-state lithium-based battery of claim 1 , wherein a bottommost surface of the first horizontal anode-side electrode portion is located directly on a topmost surface of a substrate.

7. The solid-state lithium-based battery of claim 1 , wherein the solid-state lithium-based battery has a charge rate of greater than 3 C.

8. A method of forming a solid-state lithium-based battery, the method comprising:
forming a continuous anode-side electrode on surface of a substrate, the continuous anode-side electrode comprising a first horizontal anode-side electrode finger portion, a vertical anode-side electrode portion and a second horizontal anode-side electrode finger portion, wherein the first and second horizontal anode-side electrode finger portions are spaced apart by a gap and wherein the first horizontal anode-side electrode finger portion contacts a bottom portion of a first sidewall of the vertical anode-side electrode portion, and the second horizontal anode-side electrode finger portion contacts a top portion of the first sidewall of the vertical anode-side electrode portion;
forming a continuous aluminum oxide interfacial layer on the sidewalls and topmost surface of first horizontal anode-side electrode finger portion, on the first sidewall of the vertical anode-side electrode portion, and on a bottommost surface, a sidewall surface and a topmost surface of the second horizontal anode-side electrode finger portion;
forming a lithium-based solid-state electrolyte layer on the aluminum oxide interfacial layer;
forming a lithiated cathode material layer on the lithium-based solid-state electrolyte layer; and
forming a cathode-side electrode on a physically exposed surface of the lithiated cathode material layer, wherein the cathode-side electrode comprises a first horizontal cathode-side electrode finger portion, a vertical cathode-side electrode portion and a second horizontal cathode electrode finger portion, the first horizontal cathode-side electrode finger portion contacts a middle portion of a first sidewall of the vertical cathode-side electrode portion, and the second horizontal cathode-side electrode finger portion contacts a top portion of the first sidewall of the vertical cathode-side electrode portion, and wherein the first horizontal cathode-side electrode finger portion, and a portion of each of the aluminum oxide interfacial layer, the lithium-based solid-state electrolyte and the lithiated cathode material layer are present in the gap, and the second horizontal cathode-side electrode finger portion is located above the second horizontal anode-side electrode finger portion.

9. The method of claim 8 , wherein a shadow mask in used during each of the forming of the continuous anode-side electrode, the continuous aluminum oxide interfacial layer, the lithium-based solid-state electrolyte layer, the lithiated cathode material layer, and the cathode-side electrode, and wherein a portion of the shadow mask is removed between each of the forming of the continuous anode-side electrode, the continuous aluminum oxide interfacial layer, the lithium-based solid-state electrolyte layer, the lithiated cathode material layer, and the cathode-side electrode.

Assignees

• IBM

Inventors

• Li Ning
• De Souza Joel P
• Lee Yun Seog
• Sadana Devendra K

Classifications

• H01M10/0525 Primary

  Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries · CPC title

• H01M10/0562

  Solid materials · CPC title

• H01M2220/30

  Batteries in portable systems, e.g. mobile phone, laptop · CPC title

• H01M4/0426

  Sputtering · CPC title

• H01M4/366

  as layered products · CPC title