Wafer processing device and method therefor

Patent metadata

Field	Value
Publication number	US-10658214-B2
Application number	US-201515531320-A
Country	US
Kind code	B2
Filing date	Nov 24, 2015
Priority date	Nov 26, 2014
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

Disclosed in this invention is a wafer processing apparatus and method for pre-alignment and edge exposure of a wafer. The wafer processing apparatus includes a pre-alignment module, an edge exposure module, a motion module, a control module and a rotary table. The motion module includes a rotation module, a lifting module and a translation module, which are disposed and interconnected above one another. The rotation module is connected at the top to the rotary table and is configured to drive the rotary table to rotate together with the wafer. The lifting module is configured to drive the rotation module and the rotary table to move vertically. The translation module is configured to drive the lifting module and the rotation module to move horizontally. The pre-alignment module and the edge exposure module are positioned in correspondence to opposing sides of the wafer. The invention reduces the number of objects to be controlled as well as the complexity in control and system structure. Additionally, it simplifies the pre-alignment operation and reduces equipment cost.

First claim

What is claimed is:

1. A wafer processing apparatus for pre-alignment and edge exposure of a wafer, comprising:
a rotary table, for carrying the wafer;
a motion module comprising, from top down, a rotation module, a lifting module and a translation module interconnected to one another, the rotation module being connected at a top thereof to the rotary table and configured to drive the rotary table to rotate together with the wafer, the lifting module being configured to drive the rotation module and the rotary table to move vertically and enabling the wafer to move at least between a first height and a second height, the translation module being configured to drive the lifting module and the rotation module to move in only one horizontal direction;
a pre-alignment module, configured to collect positional information of the wafer when the wafer is located at a pre-alignment height;
an edge exposure module, configured to perform edge exposure on the wafer, wherein the pre-alignment module and the edge exposure module are positioned at opposing sides of the wafer;
a control module, electrically connected to the pre-alignment module, the edge exposure module and the motion module and configured to receive the positional information of the wafer and to control, based on the received information, the motion module to adjust a position of the rotary table so as to accomplish pre-alignment of the wafer, the control module being further configured to control the edge exposure module to accomplish the edge exposure of the wafer, wherein the control module is configured to perform centering operation using only rotation and a single-axis linear movement in a plane of the wafer; and
a positioning table positioned between the first height and the second height, wherein the positioning table allows the rotary table but not the wafer to vertically pass therethrough, and wherein the positioning table is configured to retain the wafer by suction when the wafer is in proximity thereto.

2. The wafer processing apparatus according to claim 1 , further comprising a fixation module, wherein each of the pre-alignment module, the edge exposure module, the motion module and the control module is connected to the fixation module, and wherein the translation module is horizontally moveable on a surface of the fixation module.

3. The wafer processing apparatus according to claim 1 , wherein the pre-alignment module comprises a pre-alignment light source and a pre-alignment camera, the pre-alignment light source being mounted at a height that is lower than the pre-alignment height, the pre-alignment camera being mounted at a height that is higher than the pre-alignment height, wherein upon the wafer being located at the pre-alignment height, the pre-alignment light source emits light which illuminates an edge of the wafer and then reaches the pre-alignment camera, followed by collecting positional information of the edge of the wafer by an image sensor.

4. The wafer processing apparatus according to claim 3 , wherein the pre-alignment light source is a visible-spectrum light source.

5. The wafer processing apparatus according to claim 1 , wherein the pre-alignment of the wafer comprises horizontal alignment of a center of the wafer with a center of the rotary table.

6. The wafer processing apparatus according to claim 5 , wherein the control module comprises a data processing component configured to calculate an offset from the center of the wafer to the center of the rotary table and/or a position of an apex of a notch based on the collected positional information of the wafer.

7. The wafer processing apparatus according to claim 5 , wherein the edge exposure module comprises an edge exposure camera located above an exposure height for the wafer, the edge exposure camera having a central axis which, together with a central axis of the pre-alignment module, defines a plane passing through the center of the wafer, the edge exposure camera comprising an exposure light source and a diaphragm with a variable field of view, the exposure light source being disposed above the diaphragm, the exposure light source producing light which passes through the diaphragm and then exposes the wafer.

8. The wafer processing apparatus according to claim 7 , wherein the exposure height is either as same as the pre-alignment height or not.

9. The wafer processing apparatus according to claim 7 , wherein the exposure light source is an ultraviolet light source.

10. The wafer processing apparatus according to claim 1 , wherein central axes of the rotation module, the lifting module and the translation module are in coincidence with one another.

11. The wafer processing apparatus according to claim 1 , wherein the positioning table is a U-shaped structure open at one side, and wherein an opening defined by the U-shaped structure has a radial dimension that is greater than a radial dimension of the rotation module and a radial dimension of the rotary table and is smaller than a radius of the wafer.

12. The wafer processing apparatus according to claim 11 , wherein the positioning table retains the wafer in a two-point retention manner.

13. The wafer processing apparatus according to claim 11 , wherein one or more vacuum suction holes for absorptive retention of the wafer and several bumps for facilitating the retention are provided on each side of the opening defined by the positioning table.

14. The wafer processing apparatus according to claim 13 , wherein each of the vacuum suction holes is provided with a flexible suction cup that surrounds the vacuum suction hole.

15. The wafer processing apparatus according to claim 1 , wherein the wafer is selected from wafers of different sizes, and wherein the pre-alignment module and the edge exposure module are positioned at horizontal locations corresponding to respective locations at an edge of a wafer that has the largest one of the different sizes.

16. A method for pre-alignment and edge exposure of a wafer using the wafer processing apparatus as defined in claim 1 , comprising the steps of:
(1) initializing a position of the motion module;
(2) placing the wafer onto the rotary table such that the wafer is positionally fixed relative to the rotary table and determining a size of the wafer;
(3) based on the size of the wafer, the motion module moving the rotary table into positional correspondence with the pre-alignment module;
(4) the control module controlling the rotation module to rotate the rotary table together with the wafer, and concurrently the pre-alignment module collecting the positional information of the wafer and passing the information on to the control module;
(5) the control module controlling the motion module to adjust the position of the rotary table based on the received positional information of the wafer, thereby accomplishing the pre-alignment of the wafer;
(6) based on the size of the wafer, causing the motion module to drive the rotary table to move into positional correspondence with the edge exposure module; and
(7) the control module controlling the edge exposure module to perform the edge exposure of the wafer.

17. The method according to claim 16 , wherein the wafer processing apparatus further comprises a positioning table disposed between the first height and the second height, wherein the positioning table allows the rotary table but not the wafer to vertically pass therethrough, and wherein the positioning table is configured to retain the wafer by suction when the wafer is in proximity thereto.

18. The method according to clai

Assignees

• Shanghai Micro Electronics Equipment Group Co Ltd
• Shanghai Microelectronics Equi

Inventors

• Wang Gang
• Tian Cuixia
• Jiang Jie
• Wang Shaoyu
• Ruan Dong

Classifications

• G03F7/20

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F9/7003

  Alignment type or strategy, e.g. leveling, global alignment · CPC title

• H10P72/7611

  characterised by edge profile or support profile · CPC title

• H10P72/3206

  the substrate being handled substantially vertically · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title