Light detection device

Patent metadata

Field	Value
Publication number	US-10656020-B2
Application number	US-201615764943-A
Country	US
Kind code	B2
Filing date	Sep 27, 2016
Priority date	Oct 2, 2015
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector; and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.

First claim

The invention claimed is:

1. A light detection device comprising:
a Fabry-Perot interference filter having a first mirror and a second mirror, a distance therebetween is variable, and provided with a light transmission region on a predetermined line, the light transmission region configured to transmit light corresponding to the distance between the first mirror and the second mirror;
a light detector arranged on a first side of the Fabry-Perot interference filter on the line, the light detector configured to detect light transmitted through the light transmission region;
a package having an opening positioned on a second side of the Fabry-Perot interference filter on the line, the package configured to accommodate the Fabry-Perot interference filter and the light detector;
a light transmitting unit arranged on an inner surface of the package so as to close the opening and including a band pass filter configured to transmit light incident on the light transmission region; and
a bonding member, wherein
when viewed from a direction parallel to the line, an outer edge of the Fabry-Perot interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter,
the band pass filter has a polygonal plate shape,
the package has a first wall part formed with the opening, a second wall part facing the first wall part with the Fabry-Perot interference filter, the band pass filter, and the light detector interposed therebetween, and a cylindrical side wall part surrounding the Fabry-Perot interference filter, the band pass filter, and the light detector,
the bonding member fixes the band pass filter to an inner surface of the first wall part, and
an outer edge of the band pass filter is positioned outside the outer edge of the Fabry-Perot interference filter when viewed from a direction parallel to the line.

2. The light detection device according to claim 1 ,
wherein the light transmitting unit further includes a light transmitting member provided with the hand pass filter, and
an other edge of the light transmitting member is positioned outside the outer edge of the Fabry-Perot interference filter when viewed from a direction parallel to the line.

3. The light detection device according to claim 2 ,
Wherein a thickness of the light transmitting member is a value larger than or equal to a value obtained by multiplying a distance between the Fabry-Perot interference filter and the light transmitting member by 0.5.

4. The light detection device according to claim 2 ,
wherein the Fabry-Perot interference filter has a silicon substrate configured to support the first mirror and the second mirror, and
the light detector has an InGaAs substrate formed with a photoelectric conversion region.

5. The light detection device according to claim 2 ,
wherein the band pass filter is provided on a light emitting surface of the light transmitting member.

6. The light detection device according to claim 2 , further comprising:
a lead pin penetrating through the package; and
a wire electrically connecting a terminal of the Fabry-Perot interference filter and the lead pin.

7. The light detection device according to claim 1 , further comprising:
a light transmitting member arranged on the inner surface of the first wall part so as to close the opening,
wherein the band pass filter is fixed to an inner surface of the light transmitting member by the bonding member, and
the bonding member is arranged over an entire region of a light incident surface of the band pass filter facing the inner surface of the light transmitting member.

8. The light detection device according to claim 1 , further comprising:
a light transmitting member arranged on the inner surface of the first wall part so as to close the opening,
wherein the band pass filter is fixed to an inner surface of the light transmitting member by the bonding member, and
the bonding member is not arranged at a region excluding a corner region in a light incident surface of the band pass filter facing the inner surface of the light transmitting member but is arranged at the corner region.

9. The light detection device according to claim 1 ,
wherein the band pass filter is fixed to the inner surface of the first wall part by the bonding member, and
the bonding member is arranged at a region excluding an opposed region facing the opening in a light incident surface of the band pass filter facing the inner surface of the first wall part.

10. The light detection device according to claim 1 ,
wherein the band pass filter is fixed to the inner surface of the first wall part by the bonding member, and
the bonding member is not arranged at a region excluding a corner region in a light incident surface of the band pass filter facing the inner surface of the first wall part but is arranged at the corner region.

11. The light detection device according to claim 7 ,
wherein the bonding member protrudes outward from the outer edge of the band pass filter when viewed from a direction parallel to the line, and
a part of the bonding member protruding outward from the outer edge of the band pass filter is in contact with a side surface of the band pass filter.

12. The light detection device according to claim 1 ,
wherein the opening has a circular shape when viewed from a direction parallel to the line.

13. The light detection device according to claim 1 ,
wherein the band pass filter has a rectangular plate shape.

14. The light detection device according to claim 1 , wherein the package is formed of a metal material.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Hirose Masaki
• Shibayama Katsumi
• Kasahara Takashi
• Kawai Toshimitsu
• Oyama Hiroki
• TERAMACHI Yumi

Classifications

• G02B26/00

  Optical devices or arrangements for the control of light using movable or deformable optical elements (control of light by modification of the optical properties of the media of the elements involved therein G02F1/00) · CPC title

• G01J3/26 Primary

  using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters · CPC title

• G01J5/045

  Sealings; Vacuum enclosures; Encapsulated packages; Wafer bonding structures; Getter arrangements (getter arrangements per se H10W76/48, H10P36/03) · CPC title

• G01J5/20

  using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices · CPC title

• G01J3/0256

  Compact construction · CPC title