Supply-liquid producing apparatus and supply-liquid producing method

Patent metadata

Field	Value
Publication number	US-10654017-B2
Application number	US-201716069862-A
Country	US
Kind code	B2
Filing date	Jan 13, 2017
Priority date	Jan 15, 2016
Publication date	May 19, 2020
Grant date	May 19, 2020

Abstract

A supply-liquid producing apparatus includes a mixer that mixes water and ozone gas to produce ozone water; a booster pump that increases the pressure of the water supplied to the mixer; a gas-liquid separation tank that separates the ozone water produced by the mixer into ozone water to be supplied to a use point and exhaust gas to be discharged from an exhaust port; a flowmeter that measures the flow rate of the ozone water supplied from the gas-liquid separation tank to the use point; a flow control unit that adjusts the (flow rate of the water supplied to the mixer by controlling the booster pump in response to the flow rate of the ozone water measured by the flowmeter; and an exhaust pressure control unit that controls the exhaust pressure to keep constant the water level in the gas-liquid separation tank.

First claim

The invention claimed is:

1. A supply-liquid producing apparatus comprising:
a mixing unit that mixes a first raw material and a second raw material to produce a mixed liquid;
a pump unit that changes a flow rate of the first raw material to be supplied to the mixing unit;
a gas-liquid separation tank unit that separates the mixed liquid produced by the mixing unit into a supply liquid to be supplied to a use point, and exhaust gas to be discharged from an exhaust port;
a first flow measuring unit that measures the flow rate of the supply liquid to be supplied from the gas-liquid separation tank unit to the use point;
an exhaust valve that adjusts an exhaust amount of the exhaust gas to be discharged from the exhaust port; and
an exhaust control unit that adjusts the exhaust amount of the exhaust gas to be discharged from the exhaust port by controlling the exhaust valve in response to the flow rate of the supply liquid measured by the first flow measuring unit such that the flow rate of the supply liquid to be supplied to the use point is kept at a constant flow rate, wherein
the exhaust control unit increases the exhaust amount of the exhaust gas to be discharged from the exhaust port in a case where the flow rate of the supply liquid measured by the first flow measuring unit increases with respect to the constant flow rate, and the exhaust control unit decreases the exhaust amount of the exhaust gas to be discharged from the exhaust port in a case where the flow rate of the supply liquid measured by the first flow measuring unit decreases with respect to the constant flow rate.

2. The supply-liquid producing apparatus according to claim 1 , further comprising
a flow control unit that adjusts the flow rate of the first raw material to be supplied to the mixing unit by controlling the pump unit in response to the flow rate of the supply liquid measured by the first flow measuring unit, wherein
the flow control unit controls such that flow rate of the supply liquid measured by the first flow measuring unit becomes the same as the flow rate of the first raw material to be supplied to the mixing unit.

3. The supply-liquid producing apparatus according to claim 2 , further comprising
a second flow measuring unit that measures the flow rate of the first raw material to be supplied to the mixing unit.

4. The supply-liquid producing apparatus according to claim 2 , further comprising
a liquid amount measuring unit that detects a liquid amount in the gas-liquid separation tank unit, wherein
the boosting control unit decreases the flow rate of the first raw material to be supplied to the mixing unit in a case where the liquid amount in the gas-liquid separation tank unit measured by the liquid amount measuring unit increases with respect to a predetermined liquid amount, and the boosting control unit increases the flow rate of the first raw material to be supplied to the mixing unit in a case where the liquid amount in the gas-liquid separation tank unit measured by the liquid amount measuring unit decreases with respect to the predetermined liquid amount.

5. A supply-liquid producing method comprising the steps of:
mixing a first raw material and a second raw material to produce a mixed liquid by a mixing unit;
separating the mixed liquid produced by the mixing unit into a supply liquid to be supplied to a use point, and exhaust gas to be discharged from an exhaust port by a gas-liquid separation tank unit;
measuring a flow rate of the supply liquid to be supplied from the gas-liquid separation tank unit to the use point by a first flow measuring unit; and
adjusting an exhaust amount of the exhaust gas to be discharged from the exhaust port by an exhaust valve in response to the flow rate of the supply liquid measured by the first flow measuring unit such that the flow rate of the supply liquid to be supplied to the use point is kept at a constant flow rate, wherein
in the step of adjusting the exhaust amount of the exhaust gas, the exhaust amount of the exhaust gas to be discharged from the exhaust port is increased in a case where the flow rate of the supply liquid measured by the first flow measuring unit increases with respect to the constant flow rate, and the exhaust amount of the exhaust gas to be discharged from the exhaust port is decreased in a case where the flow rate of the supply liquid measured by the flow measuring unit decreases with respect to the constant flow rate.

6. A supply-liquid producing apparatus comprising:
a mixing unit that mixes a first raw material and a second raw material to produce a mixed liquid;
a pump unit that changes a flow rate of the first raw material to be supplied to the mixing unit;
a gas-liquid separation tank unit that separates the mixed liquid produced by the mixing unit into a supply liquid to be supplied to a use point, and exhaust gas to be discharged from an exhaust port;
a pressure measuring unit that measures pressure of the supply liquid to be supplied from the gas-liquid separation tank unit to the use point;
an exhaust valve that adjusts an exhaust amount of the exhaust gas to be discharged from the exhaust port; and
an exhaust control unit that adjusts the exhaust amount of the exhaust gas to be discharged from the exhaust port by controlling the exhaust valve in response to the pressure of the supply liquid measured by the pressure measuring unit such that the pressure of the supply liquid to be supplied to the use point is kept at constant pressure, wherein
the exhaust control unit increases the exhaust amount of the exhaust gas to be discharged from the exhaust port in a case where the pressure of the supply liquid measured by the pressure measuring unit increases with respect to the constant pressure, and the exhaust control unit decreases the exhaust amount of the exhaust gas to be discharged from the exhaust port in a case where the pressure of the supply liquid measured by the pressure measuring unit decreases with respect to the constant pressure.

7. The supply-liquid producing apparatus according to claim 6 , further comprising
a first flow measuring unit that measures the flow rate of the supply liquid to be supplied from the gas-liquid separation tank unit to the use point; and
a flow control unit that adjusts the flow rate of the first raw material to be supplied to the mixing unit by controlling the pump unit in response to the flow rate of the supply liquid measured by the first flow measuring unit, wherein
the flow control unit controls such that the flow rate of the supply liquid measured by the first flow measuring unit becomes the same as the flow rate of the first raw material to be supplied to the mixing unit.

8. The supply-liquid producing apparatus according to claim 7 , further comprising
a second flow measuring unit that measures the flow rate of the first raw material to be supplied to the mixing unit.

9. The supply-liquid producing apparatus according to claim 7 , further comprising
a liquid amount measuring unit that detects a liquid amount in the gas-liquid separation tank unit, wherein
the flow control unit decreases the flow rate of the first raw material to be supplied to the mixing unit in a case where the liquid amount in the gas-liquid separation tank unit measured by the liquid amount measuring unit increases with respect to a predetermined liquid amount, and the flow control unit increases the flow rate of the first raw material to be supplied to the mixing unit in a case where the liquid amount in the gas-liquid separation tank unit measured by the liquid amount measuring unit decreases with respect to the predetermined liquid amount.

10. A supply-liquid producing method comprising the steps of:

Assignees

• Ebara Corp

Inventors

• Ozawa Suguru
• Nakagawa Yoichi
• TAKAHASHI Muneto
• Xu Tao
• Yokoyama Toshio

Classifications

• G05D11/132

  by controlling the flow of the individual components (G05D11/133 takes precedence) · CPC title

• G05D11/135

  by sensing at least one property of the mixture (G05D11/139 takes precedence) · CPC title

• B01F2215/0096

  Operations & Transport · mapped topic

• B01F15/0243 Primary

  Operations & Transport · mapped topic

• B01F2003/04886

  Operations & Transport · mapped topic