Alignment of single and multi-mode optical fibers using piezoelectric actuators

Patent metadata

Field	Value
Publication number	US-10649158-B2
Application number	US-201616098406-A
Country	US
Kind code	B2
Filing date	Jul 1, 2016
Priority date	Jul 1, 2016
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

Embodiments of the invention include an optoelectronic package that allows for in situ alignment of optical fibers. In an embodiment, the optoelectronic package may include an organic substrate. Embodiments include a cavity formed into the organic substrate. Additionally, the optoelectronic package may include an actuator formed on the organic substrate that extends over the cavity. In one embodiment, the actuator may include a first electrode, a piezoelectric layer formed on the first electrode, and a second electrode formed on the piezoelectric layer. According to an additional embodiment of the invention, the actuator may include a first portion and a second portion. In order to allow for resistive heating and actuation driven by thermal expansion, a cross-sectional area of the first portion of the beam may be greater than a cross-sectional area of the second portion of the beam.

First claim

What is claimed is:

1. An optoelectronic package, comprising:
an organic substrate;
a cavity formed into the organic substrate; and
an actuator formed on the organic substrate and extending over the cavity, wherein the actuator comprises:
a first electrode;
a piezoelectric layer formed on the first electrode; and
a second electrode formed on the piezoelectric layer, and wherein the actuator is actuatable in a plane parallel to a top surface of the organic substrate, and wherein the first electrode is formed below the piezoelectric layer and along a first sidewall of the piezoelectric layer, and wherein the second electrode is formed along a second sidewall of the piezoelectric layer that is opposite to the first sidewall.

2. The optoelectronic package of claim 1 , wherein the first electrode and the second electrode are electrically coupled to anchors on the organic substrate.

3. The optoelectronic package of claim 1 , wherein the second electrode is also formed over a portion of a top surface of the piezoelectric layer.

4. The optoelectronic package of claim 1 , wherein the actuator extends out from a sidewall of the cavity.

5. The optoelectronic package of claim 4 , further comprising a second actuator formed above the first actuator and separated from the first actuator by a layer of the substrate.

6. The optoelectronic package of claim 1 , further comprising:
a fiber block positioned in the cavity, wherein one or more optical fibers pass through the fiber block.

7. The optoelectronic package of claim 6 , wherein the actuator contacts a sidewall of the fiber block when actuated.

8. The optoelectronic package of claim 6 , further comprising a plurality of actuators formed around the perimeter of the cavity, wherein each of the actuators contacts a sidewall of the fiber block when actuated.

9. The optoelectronic package of claim 8 , wherein the plurality of actuators are actuatable to displace the fiber block within the cavity.

10. The optoelectronic package of claim 6 , further comprising:
an optical engine mounted proximate to the cavity, wherein one or more of the optical fibers are optically coupled to the optical engine.

11. The optoelectronic package of claim 6 , further comprising:
one or more linear motors mounted to the substrate, wherein the linear motors are extendable towards the fiber block.

12. The optoelectronic package of claim 11 , wherein the linear motors are electro-motors or piezoelectric motors.

13. The optoelectronic package of claim 1 , wherein the piezoelectric layer is lead zirconate titanate (PZT), potassium sodium niobate (KNN), zinc oxide (ZnO), and/or aluminum nitride (AlN).

14. The optoelectronic package of claim 1 , further comprising an etchstop layer formed on a bottom surface of the cavity.

15. An optoelectronic package comprising:
an organic substrate;
a cavity formed into the organic substrate; and
a plurality of actuators formed around a perimeter of the cavity, wherein each of the actuators includes a beam that extends over the cavity, and wherein the actuators are actuatable in a plane parallel to a top surface of the organic substrate, wherein the beam of each actuator comprises:
a first electrode;
a piezoelectric layer formed on the first electrode; and
a second electrode formed on the piezoelectric layer, wherein the first electrode is formed below the piezoelectric layer and along a first sidewall of the piezoelectric layer, and wherein the second electrode is formed along a second sidewall of the piezoelectric layer that is opposite to the first sidewall.

16. The optoelectronic package of claim 15 , wherein the plurality of actuators are coupled to the substrate by anchors.

17. The optoelectronic package of claim 15 , wherein the piezoelectric layer is lead zirconate titanate (PZT), potassium sodium niobate (KNN), zinc oxide (ZnO), and/or aluminum nitride (AlN).

18. An optoelectronic package, comprising:
an organic substrate;
a cavity formed in the organic substrate;
a fiber block positioned in the cavity, wherein the fiber block includes one or more optical fibers;
an optical engine formed on the organic substrate, wherein the optical engine includes transmission and/or receiving lines, each having a centerline that is aligned to the same height as one of the optical fibers; and
a plurality of actuators formed around a perimeter of the cavity, wherein each of the actuators includes a beam that extends over the cavity, and wherein the plurality of actuators contact a sidewall of the fiber block when actuated.

19. The optoelectronic package of claim 18 , further comprising:
one or more linear motors coupled to the substrate, wherein the linear motors are extendable towards the fiber block.

20. The optoelectronic package of claim 18 , wherein the plurality of actuators each comprise:
a first electrode;
a piezoelectric layer formed on the first electrode; and
a second electrode formed on the piezoelectric layer, wherein the first electrode is formed below the piezoelectric layer and along a first sidewall of the piezoelectric layer, and wherein the second electrode is formed along a second sidewall of the piezoelectric layer that is opposite to the first sidewall.

21. The optoelectronic package of claim 20 , wherein the piezoelectric layer is lead zirconate titanate (PZT), potassium sodium niobate (KNN), zinc oxide (ZnO), and/or aluminum nitride (AlN).

Assignees

• Intel Corp

Inventors

• Swan Johanna M
• Aleksov Aleksandar
• Oster Sasha N
• Eid Feras
• Bicen Baris
• Sounart Thomas L
• Liff Shawna M
• Rao Valluri R

Classifications

• G02B6/4226 Primary

  Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount · CPC title

• G02B6/366

  the additional structures allowing for adjustment or alignment in all dimensions, i.e. 3D microoptics arrangements, e.g. free space optics on the microbench, microhinges or spring latches, with associated microactuating elements for fine adjustment or alignment · CPC title