Atomic layer deposition apparatus and method for processing substrates using an apparatus

Patent metadata

Field	Value
Publication number	US-10648078-B2
Application number	US-201515322653-A
Country	US
Kind code	B2
Filing date	Nov 3, 2015
Priority date	Nov 4, 2014
Publication date	May 12, 2020
Grant date	May 12, 2020

Abstract

An atomic layer deposition apparatus, having a first series of high pressure gas injection openings and a first series of exhaust openings that are positioned such that they together create a first high pressure/suction zone within each purge gas zone, wherein each first high pressure/suction zone extends over substantially the entire width of the process tunnel and wherein the distribution of the gas injection openings that are connected to the second purge gas source and the distribution of the gas exhaust openings within the first high pressure/suction zone, as well as the pressure of the second purge gas source and the pressure at the gas exhaust openings are such that the average pressure within the first high pressure/suction zone deviates less than 30% from a reference pressure which is defined by the average pressure within process tunnel when no substrate is present.

First claim

The invention claimed is:

1. An atomic layer deposition apparatus, comprising:
a lower wall including a plurality of gas injection openings;
an upper wall extending parallel to the lower wall including a plurality of gas injection openings;
a first and a second side wall extending substantially perpendicularly relative to the lower wall;
a plurality of gas exhaust openings in the first and second sidewalls or directly adjacent the first and second sidewalls, in the upper wall or the lower wall;
wherein the lower wall, the upper wall and the first and the second side walls bound a process tunnel having a length extending in a transport direction (T) and having a width (W) extending transversally to the transport direction (T) and defining a vertical middle plane that is positioned centrally between the first and the second side wall;
the apparatus additionally including:
at least one substrate to be processed, accommodated within the process tunnel;
a first precursor gas source connected to series of gas injection openings of the plurality of gas injection openings, each series extending over the entire width (W) of the process tunnel and the respective series being spatially arranged along the transport direction (T) of the process tunnel, so as to create first precursor gas injection zones that extend over substantially the entire width (W) of the process tunnel and that are spatially arranged along the transport direction (T) of the process tunnel;
a purge gas source connected to series of gas injection openings of the plurality of gas injection openings, each series extending over the entire width (W) of the process tunnel and the respective series being spatially arranged along the transport direction (T) of the process tunnel, so as to create purge gas injection zones that extend over substantially the entire width (W) of the process tunnel and that are spatially arranged along the transport direction (T) of the process tunnel;
a second precursor gas source connected to series of gas injection openings of the plurality of gas injection openings, each series extending over the entire width (W) of the process tunnel and the respective series being spatially arranged along the transport direction (T) of the process tunnel, so as to create second precursor gas injection zones that extend over substantially the entire width (W) of the process tunnel and that are spatially arranged along the transport direction (T) of the process tunnel;
wherein the connections of the first precursor gas source, the purge gas source and the second precursor gas source to the respective gas injection openings are such that a plurality of successive process sections is created in the process tunnel along the transport direction (T), wherein each process section includes successively a first precursor gas injection zone, a purge gas zone, a second precursor gas injection zone, and a purge gas zone;
wherein
(i) the distribution of the gas injection openings in the lower wall and the upper wall;
(ii) a ratio between a thickness of the at least one substrate (S) to be processed and a distance (D) between the lower wall and the upper wall;
(iii) the supply of gas through the gas injection openings; and
(iv) the exhaust of gas through the gas exhaust openings are such that, in use:
gas bearings are formed above and below the at least one substrate (S) that is present in the process tunnel; and
within each first precursor gas zone, each purge gas zone and each second precursor gas zone two opposite lateral flows of gas exist that are substantially perpendicularly to the transport direction (T) and that flow from the vertical middle plane of the tunnel in the direction of respectively the first and second side wall;

the apparatus additionally including:
a second purge gas source of which the pressure is higher than the first purge gas source;
a first series of high pressure gas injection openings in at least one of the upper and the lower wall, which first series of high pressure gas injection openings is positioned within a purge gas zone over substantially the entire width (W) of the process tunnel and that is connected to the second purge gas source;
a first series of gas exhaust openings associated with the first series of high pressure gas injection openings is provided in at least one of the upper and the lower wall and that is distributed over substantially the entire width (W) of the process tunnel and that is connected to a gas exhaust channel;
wherein the gas exhaust openings of the first series of gas exhaust openings are positioned intermittently between the high pressure gas injection openings of the first series of high pressure gas injection openings such that they together create a first high pressure/suction zone within each purge gas zone, wherein each first high pressure/suction zone extends over substantially the entire width (W) of the process tunnel; and
wherein the distribution of the gas injection openings that are connected to the second purge gas source and the distribution of the gas exhaust openings of the first series of gas exhaust openings within each first high pressure/suction zone, as well as the pressure of the second purge gas source and the pressure at the gas exhaust openings are such that the average pressure within each first high pressure/suction zone deviates less than 30%, preferably less than 10%, and preferably less than 5%, from a reference pressure which is defined by the average pressure within the first precursor gas zones, the second precursor gas zones and the purge gas zones when the at least one substrate is not present,
the apparatus additionally including:
a second series of high pressure gas injection openings in at least one of the upper and the lower wall, which second series of high pressure gas injection openings is positioned parallel to the first series of high pressure gas injection openings over substantially the entire width of the process tunnel within each purge gas zone, and wherein the second series of high pressure gas injection openings is connected to the second purge gas source; and
a second series of exhaust openings, provided parallel to the first series of exhaust openings in at least one of the upper and the lower wall, which second series of exhaust openings is distributed over substantially the entire width of the process tunnel and that is connected to a gas exhaust channel;
wherein the second series of high pressure gas injection openings and the second series of exhaust openings are positioned such that they together create a second high pressure/suction zone within each purge gas zone that is positioned parallel to the first high pressure/suction zone, wherein the second high pressure/suction zone extends over substantially the entire width of the process tunnel,
wherein the gas exhaust channel to which the first series of exhaust openings is connected is separated from the gas exhaust channel to which the second series of exhaust openings is connected, such that, in use:
gas exhausted via the first series of gas exhaust openings comprises substantially a mixture of purge gas and the first precursor gas,
gas exhausted via the second series of gas exhaust openings comprises substantially a mixture of purge gas and the second precursor gas.

2. The atomic layer deposition apparatus according to claim 1 , wherein the distribution of the gas injection openings connected to the second purge gas source and the distribution of the gas exhaust openings within each high pressure/suction zone, as well as the pressure of the second purge gas source and the pressure at the gas exhaust openings are such that, in use, the average pressure within each high pressure/suction zone is substantially equal to the reference pressure.

3. The atomic layer deposition apparatus according to claim 1 , w

Assignees

• Asm Int Nv

Inventors

• Granneman Ernst Hendrik August
• Hu Leilei

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/36

  using air tracks · CPC title

• C23C16/4408

  by purging residual gases from the reaction chamber or gas lines · CPC title

• C23C16/4583

  the substrate being supported substantially horizontally · CPC title

• C23C16/4401 Primary

  Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber · CPC title