Composition for forming a silica based layer, silica based layer, and electronic device
US-2016176718-A1 · Jun 23, 2016 · US
N—H free and SI-rich per-hydridopolysilzane compositions, their synthesis, and applications
US10647578B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10647578-B2 |
| Application number | US-201715661412-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 27, 2017 |
| Priority date | Dec 11, 2016 |
| Publication date | May 12, 2020 |
| Grant date | May 12, 2020 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH3)x(SiH2—)y], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.
First claim
Opening claim text (preview).
We claim: 1. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, wherein the catalyst is selected from the group consisting of B(C 6 F 5 ) 3 , BPh 3 , PdCl 2 , Co 2 (CO) 8 , Ru 3 (CO) 12 , and Zeolite Y (H) Si:Al. 2. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, further comprising mixing trisilylamine and the catalyst at room temperature and atmospheric pressure. 3. A method of synthesizing a N—H free, C-free, and Si-rich perhydropolysilazane composition, the method comprising mixing trisilylamine and a catalyst to produce the N—H free, C-free, and Si-rich perhydropolysilazane composition having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton, wherein the catalyst is B(C 6 F 5 ) 3 , further comprising adding a quenching agent when a N—H free, C-free, and Si-rich perhydropolysilazane composition obtains the desired molecular weight.
Assignees
Inventors
Classifications
the material being a silicon oxynitride, e.g. SiON or SiON:H · CPC title
the compound being a silazane · CPC title
Nitrogen atoms · CPC title
Si-containing organic compounds, e.g. silicone resins, (poly)silanes, (poly)siloxanes or (poly)silazanes · CPC title
with a well-defined oxygen content, e.g. oxycarbides · CPC title
Patent family
Related publications grouped by family.
External sources
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US10647578B2 cover?
- Solid or liquid N—H free, C-free, and Si-rich perhydropolysilazane compositions comprising units having the following formula [—N(SiH3)x(SiH2—)y], wherein x=0, 1, or 2 and y=0, 1, or 2 when x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 when x+y=3 are disclosed. Also disclosed are synthesis methods and applications for the same.
- Who is the assignee on this patent?
- Air Liquide, Air Liquide American
- What technology area does this patent fall under?
- Primary CPC classification C23C18/122. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue May 12 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).