Piezoelectric drive apparatus for motor and method for manufacturing the same, motor, robot, and pump

Patent metadata

Field	Value
Publication number	US-10644222-B2
Application number	US-201615367524-A
Country	US
Kind code	B2
Filing date	Dec 2, 2016
Priority date	Dec 3, 2015
Publication date	May 5, 2020
Grant date	May 5, 2020

Abstract

A piezoelectric drive apparatus for a motor, the apparatus including a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction, a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode, and a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body, wherein the longitudinal direction of the substrate roughly coincides with a direction in which Young's modulus is minimized in a plane of the substrate.

First claim

What is claimed is:

1. A piezoelectric drive apparatus for a motor, the apparatus comprising:
a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction;
a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode; and
a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body,
wherein the longitudinal direction of the substrate coincides with a direction in which Young's modulus is minimized in a plane of the substrate,
the substrate is a silicon single crystal substrate,
the substrate is a {110} substrate, and
the longitudinal direction of the substrate coincides with a <100> direction.

2. The piezoelectric drive apparatus for a motor according to claim 1 ,
wherein the substrate and the piezoelectric element form a chip,
the chip is formed of a plurality of chips, and
the plurality of chips are arranged in a thickness direction of the substrate.

3. A motor comprising:
the piezoelectric drive apparatus for a motor according to claim 1 ; and
a rotor rotated by the piezoelectric drive apparatus for a motor.

4. A robot comprising:
a plurality of links;
joints that connect the plurality of links to each other; and
the piezoelectric drive apparatus for a motor according to claim 1 and causing the plurality of links to pivot at the joints.

5. A pump comprising:
the piezoelectric drive apparatus for a motor according to claim 1 ;
a tube through which liquid is transported; and
a plurality of fingers that block the tube when the piezoelectric drive apparatus for a motor is driven.

6. A piezoelectric drive apparatus for a motor, the apparatus comprising:
a substrate having a longitudinal direction and a widthwise direction perpendicular to the longitudinal direction;
a piezoelectric element provided on the substrate and having a first electrode, a second electrode, and a piezoelectric body positioned between the first electrode and the second electrode; and
a contact section that is attached to a front end section of the substrate in the longitudinal direction thereof or in contact with the front end section of the substrate in the longitudinal direction thereof and comes into contact with a driven body,
wherein the longitudinal direction of the substrate coincides with a direction in which a value of Ey/Ex/Gxy is maximized in a plane of the substrate, where Gxy represents a shear elastic coefficient of the substrate in the widthwise direction thereof, Ex represents Young's modulus of the substrate in the longitudinal direction thereof, and Ey represents Young's modulus of the substrate in the widthwise direction thereof.

7. A motor comprising:
the piezoelectric drive apparatus for a motor according to claim 6 ; and
a rotor rotated by the piezoelectric drive apparatus for a motor.

8. A robot comprising:
a plurality of links;
joints that connect the plurality of links to each other; and
the piezoelectric drive apparatus for a motor according to claim 6 and causing the plurality of links to pivot at the joints.

9. A pump comprising:
the piezoelectric drive apparatus for a motor according to claim 6 ;
a tube through which liquid is transported; and
a plurality of fingers that block the tube when the piezoelectric drive apparatus for a motor is driven.

Assignees

• Seiko Epson Corp

Inventors

• Takahashi Tomoaki

Classifications

• B25J9/12 Primary

  electric · CPC title

• F04B23/02

  having reservoirs · CPC title

• H02N2/108

  around multiple axes of rotation, e.g. spherical rotor motors · CPC title

• F04B43/082

  the tubular flexible member being pressed against a wall by a number of elements, each having an alternating movement in a direction perpendicular to the axes of the tubular member and each having its own driving mechanism · CPC title

• H02N2/004

  Rectangular vibrators · CPC title