Apparatus and method for inducing high-speed variable-tilt wobble motions

Patent metadata

Field	Value
Publication number	US-10634626-B2
Application number	US-201816139634-A
Country	US
Kind code	B2
Filing date	Sep 24, 2018
Priority date	Sep 24, 2018
Publication date	Apr 28, 2020
Grant date	Apr 28, 2020

Abstract

An apparatus and method for inducing high-speed wobble motions to a sample of interest is provided. After the sample is securely attached to a sample mounting block, the sample is variably tilted by using a hexapod stage and simultaneously rotated at a high speed about a rotation axis that is substantially perpendicular to a planar top surface of the hexapod stage. The position of the sample is continuously adjusted during the wobble motion to align a surface center of the sample with a testing center of an X-ray diffractometer. The simultaneous variable tilting and high-speed rotation of the sample induces wobble motions to the sample for randomizing orientations of a sample material's crystallites relative to the source and detector of an X-ray diffractometer.

First claim

What is claimed is:

1. An apparatus for inducing high-speed wobble motions to a sample for identifying and quantifying crystalline phases of a material of the sample by using an X-ray diffractometer, wherein the X-ray diffractometer has a pre-defined testing center, the apparatus comprising:
a position adjustment structure disposed on a part of the X-ray diffractometer, wherein the position adjustment structure is configured to adjust the position of the sample with respect to the X-ray diffractometer, such that a surface center of the sample is aligned with the testing center of the X-ray diffractometer in a space defined by a longitudinal axis, a lateral axis and a vertical axis;
a hexapod stage disposed on the position adjustment structure, wherein the hexapod stage is configured to tilt the sample;
a rotation stage disposed on the hexapod stage, wherein the rotation stage is configured to rotate the sample about a rotation axis that is substantially perpendicular to a planar top surface of the hexapod stage; and
a sample mounting block disposed on the rotation stage, wherein the sample mounting block has a top surface on which the sample is securely mounted,
wherein the hexapod stage tilts the sample simultaneously with the rotation stage rotates the sample, such that wobble motions are induced to the sample for randomizing orientations of crystallites of the material.

2. The apparatus according to claim 1 , wherein the position adjustment structure is configured to adjust the position of the sample simultaneously with the tilting of the sample and the rotation of the sample.

3. The apparatus according to claim 1 ,
further comprising a vibration dampener connected to the part of the X-ray diffractometer in a stationary manner;
wherein the position adjustment structure is disposed on the vibration dampener; and
wherein the vibration dampener is configured to reduce transmission of vibration generated by the apparatus to the X-ray diffractometer.

4. The apparatus according to claim 1 , wherein the position adjustment structure comprises:
a height adjustment stage disposed on the vibration dampener, wherein the height adjustment stage is configured to adjust a vertical position of the surface center of the sample along the vertical axis, such that the vertical position of the surface center of the sample is aligned with the vertical position of the testing center when the hexapod stage tilts the sample; and
a translation stage disposed on the height adjustment stage, wherein the translation stage is configured to adjust a plane position of the surface center of the sample in the plane defined by the longitudinal axis and the lateral axis, such that the plane position of the surface center of the sample is aligned with the plane position of the testing center when the hexapod stage tilts the sample.

5. The apparatus according to claim 1 , wherein the position adjustment structure comprises:
a translation stage disposed on the vibration dampener, wherein the translation stage is configured to adjust a plane position of the surface center of the sample in the plane defined by the longitudinal axis and the lateral axis, such that the plane position of the surface center of the sample is aligned with the plane position of the testing center when the hexapod stage tilts the sample; and
a height adjustment stage disposed on the translation stage, wherein the height adjustment stage is configured to adjust a vertical position of the surface center of the sample along the vertical axis, such that the vertical position of the surface center of the sample is aligned with the vertical position of the testing center when the hexapod stage tilts the sample.

6. The apparatus according to claim 1 , wherein the hexapod stage is further configured to rotate the sample about the rotation axis in a limited range.

7. The apparatus according to claim 1 , wherein the hexapod stage is configured to tilt the sample in a range of 1° to 60° with respect to the surface center of the sample as a pivot point.

8. The apparatus according to claim 1 , wherein the rotation stage is configured to rotate the sample at a speed in a range of 10 rpm to 1000 rpm.

9. The apparatus according to claim 4 , wherein the height adjustment stage is configured to move the sample along the vertical axis by a distance that is in a range of 0.1 mm to 500 mm.

10. The apparatus according to claim 5 , wherein the height adjustment stage is configured to move the sample along the vertical axis by a distance that is in a range of 0.1 mm to 500 mm.

11. A method for inducing high-speed wobble motions to a sample for identifying and quantifying crystalline phases of a material of the sample by using an X-ray diffractometer, wherein the X-ray diffractometer has a pre-defined testing center, the method comprising:
securely supporting the sample on a sample mounting block;
tilting the sample by using a hexapod stage;
rotating the sample about a rotation axis that is substantially perpendicular to a planar top surface of the hexapod stage; and
adjusting the position of the sample with respect to the X-ray diffractometer, such that a surface center of the sample is aligned with the testing center of the X-ray diffractometer in a space defined by a longitudinal axis, a lateral axis and a vertical axis;
wherein the tilting the sample and the rotating the sample are implemented simultaneously to induce wobble motions to the sample, such that orientations of crystallites of the material of the sample are randomized.

12. The method according to claim 11 , wherein the adjusting the position of the sample is implemented simultaneously with the tilting the sample and the rotating the sample.

13. The method according to claim 11 , further comprising reducing transmission of vibration, which is generated during inducing the wobble motions to the sample, to the X-ray diffractometer by using a vibration dampener.

14. The method according to claim 11 , wherein the adjusting the position comprises:
adjusting a vertical position of the sample along the vertical axis, such that the vertical position of the sample is aligned with the vertical position of the testing center when the hexapod stage tilts the sample; and
adjusting a plane position of the sample in the plane defined by the longitudinal axis and the lateral axis, such that the plane position of the sample is aligned with the plane position of the testing center when the hexapod stage tilts the sample.

15. The method according to claim 11 , further comprising rotating the sample, by hexapod stage, about the rotation axis in a limited range.

16. The method according to claim 11 , wherein the tilting the sample comprises tilting the sample in a range of 1° to 60° with respect to the surface center of the sample as a pivot point.

17. The method according to claim 11 , wherein the rotating the sample comprises rotating the sample at a speed in a range of 10 rpm to 1000 rpm.

18. The method according to claim 14 , wherein the adjusting the vertical position of the sample comprises moving the sample along the vertical axis by a distance that is in a range of 0.1 mm to 500 mm.

19. An X-ray diffraction device for identifying and quantifying crystalline phases of a material of a sample through X-ray diffraction, the device comprising:
an X-ray diffractometer comprising:
a source for generating electromagnetic radiation or X-ray beams, and
a detector for sensing an intensity of the electromagnetic radiation or the X-ray beams generated by the source

Assignees

• IBM

Inventors

• Sunder Madhana
• Thomas Conor R

Classifications

• G01N2223/50

  Detectors · CPC title

• G01N2223/331

  rocking curve analysis · CPC title

• G01N2223/309

  support of sample holder · CPC title

• G01N2223/1016

  X-ray · CPC title

• G01N2223/0566

  analysing diffraction pattern · CPC title