Cross-point array device including conductive fuse material layer

Patent metadata

Field	Value
Publication number	US-10629653-B2
Application number	US-201916399856-A
Country	US
Kind code	B2
Filing date	Apr 30, 2019
Priority date	Jan 25, 2017
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

In an embodiment, a cross-point array device includes a pillar-shaped structure disposed in an intersection region where a first conductive line overlaps a second conductive line. The pillar-shaped structure includes a resistance change material layer disposed between the first conductive line and the second conductive line. The pillar-shaped structure includes one or more conductive fuse material layers, each of which is disposed between the first or second conductive line and the resistance change material layer. The melting point of the conductive fuse material layer is higher than the melting point of the resistance change material layer.

First claim

What is claimed is:

1. A cross-point array device, comprising:
a pillar-shaped structure disposed in an intersection region where a first conductive line overlaps a second conductive line,
wherein the pillar-shaped structure comprises:
a resistance change material layer disposed between the first conductive line and the second conductive line; and
one or more conductive fuse material layers, each of which is disposed between the first or second conductive line and the resistance change material layer,
wherein a melting point of the conductive fuse material layer is higher than a melting point of the resistance change material layer,
wherein the resistance change material layer and the conductive fuse material layer each include a chalcogenide material, and
wherein the conductive fuse material layer maintains a low resistance state within a first current range in which the resistance change material layer undergoes resistance change between the low resistance state and a high resistance state, and the conductive fuse material layer turns to the high resistance state at a second current range that is higher than the first current range.

2. The cross-point array device of claim 1 ,
wherein the pillar-shaped structure further comprises a threshold switching operation layer that is disposed above or below the resistance change material layer.

3. The cross-point array device of claim 1 ,
wherein the resistance change material layer comprises any one selected from a transition metal oxide material, a perovskite-based material, a ferroelectric material, and a ferromagnetic material.

4. The cross-point array device of claim 1 , further comprising:
a first electrode; and
a second electrode,
wherein the first electrode and the second electrode are disposed below and over the resistance change material layer, respectively, and
wherein each of the one or more conductive fuse material layers is disposed inside the first electrode or the second electrode.

5. The cross-point array device of claim 1 ,
wherein the one or more conductive fuse material layers contact the resistance change material layer.

6. The cross-point array device of claim 1 ,
wherein, the one or more conductive fuse material layers suppress an excessive current from passing through the pillar-shaped structure when the excessive current is provided to the one or more conductive fuse material layers, the excessive current being equal to or greater than a predetermined threshold current.

7. The cross-point array device of claim 6 ,
wherein the predetermined threshold current is greater than an operation current that passes through the resistance change material layer when the resistance change material layer is in a low resistance state.

8. The cross-point array device of claim 6 ,
wherein, when the excessive current is provided to the one or more conductive fuse material layers, a resistance state of the one or more conductive fuse material layers changes from a low resistance state to a high resistance state.

9. The cross-point array device of claim 8 ,
wherein the one or more conductive fuse material layers comprise a phase change material, the phase change material changing from a crystalline state to an amorphous state by the excessive current.

10. The cross-point array device of claim 1 ,
wherein the one or more conductive fuse material layers comprise a material, the material having a melting point that is lower than a melting point of an electrode layer in contact with the one or more conductive fuse material layers.

11. A cross-point array device, comprising:
a plurality of first conductive lines extending in a first direction;
a plurality of second conductive lines extending in a second direction that crosses the first direction;
a plurality of memory cells disposed in intersection regions where the first conductive lines overlap the second conductive lines, each of the plurality of memory cells including a resistance change material layer; and
one or more conductive fuse material layers disposed adjacent to the resistance change material layer in each of the plurality of memory cells,
wherein a melting point of the conductive fuse material layer is higher than a melting point of the resistance change material layer,
wherein the resistance change material layer and the conductive fuse material layer each include a chalcogenide material, and
wherein the conductive fuse material layer maintains a low resistance state within a first current range in which the resistance change material layer undergoes resistance change between the low resistance state and a high resistance state, and the conductive fuse material layer turns to the high resistance state at a second current range that is higher than the first current range.

12. The cross-point array device of claim 11 ,
wherein, when an excessive current is provided to one of the plurality of memory cells, one or more conductive fuse material layers suppress the excessive current from passing through the one memory cell to prevent an information error from occurring during a read operation or a write operation for a memory cell adjacent to the one memory cell, the excessive current being equal to or greater than a threshold current, the one or more conductive fuse material layers being disposed in the one memory cell, and
wherein the threshold current is greater than an operation current corresponding to a low resistance signal stored in the one memory cell.

13. The cross-point array device of claim 11 ,
wherein each of the plurality of memory cells comprises a pillar-shaped structure including a first electrode, the resistance change material layer, and a second electrode, and
wherein one or both of the first electrode and the second electrode comprises the one or more conductive fuse material layers, each of the one or more conductive fuse material layers being included in each of the one or both of the first electrode and the second electrode.

14. The cross-point array device of claim 13 ,
wherein the one or more conductive fuse material layers are disposed inside at least one of the first electrode and the second electrode.

15. The cross-point array device of claim 13 ,
wherein the one or more conductive fuse material layers contact the resistance change material layer.

16. The cross-point array device of claim 11 ,
wherein each of the plurality of memory cells comprises a pillar-shaped structure including the resistance change material layer, and
wherein each of the one or more conductive fuse material layers is disposed between one of the first conductive lines or one of the second conductive lines and the resistance change material layer.

17. The cross-point array device of claim 11 ,
wherein each of the plurality of memory cells comprises a pillar-shaped structure including a first electrode, the resistance change material layer, a second electrode, a threshold switching operation layer, and a third electrode, and
wherein at least one of the first to third electrodes comprises the one or more conductive fuse material layers.

18. The cross-point array device of claim 17 ,
wherein each of the one or more conductive fuse material layers is disposed inside each of the at least one of the first to third electrodes.

19. The cross-point array device of claim 17 ,
wherein each of the one or more conductive fuse material layers is disposed at each of at least one of a first interface between the first electrode and the resistance change material layer, a second interfac

Assignees

• Sk Hynix Inc

Inventors

• Lee Jaeyeon

Classifications

• H01L45/141

  Electricity · mapped topic

• H01L27/2481 Primary

  Electricity · mapped topic

• H01L45/1233

  Electricity · mapped topic

• H01L45/06

  Electricity · mapped topic

• H01L45/1253

  Electricity · mapped topic