Lift printing of multi-composition material structures

Patent metadata

Field	Value
Publication number	US-10629442-B2
Application number	US-201415024674-A
Country	US
Kind code	B2
Filing date	Oct 7, 2014
Priority date	Oct 14, 2013
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A method for material deposition includes providing a transparent donor substrate ( 56, 60 ) having opposing first and second surfaces and multiple donor films ( 62, 64 ) including different, respective materials on the second surface. The donor substrate is positioned in proximity to an acceptor substrate ( 41 ), with the second surface facing toward the acceptor substrate. Pulses of laser radiation are directed to pass through the first surface of the donor substrate and impinge on the donor films so as to induce ejection of molten droplets containing a bulk mixture of the different materials from the donor films onto the acceptor substrate.

First claim

The invention claimed is:

1. A method of material transfer, comprising:
providing a donor substrate, having a first surface and a second surface, wherein the first surface and the second surface are on opposite sides of the donor substrate, and a plurality of donor films is on the second surface, the plurality of donor films comprising at least a first film of a first component and a second film of a second component, different from the first component;
positioning the donor substrate in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate; and
irradiating the plurality of donor films with pulses of laser radiation transmitted through the first surface of the donor substrate and incident on the plurality of donor films at a location and melting at least a substantial thickness of the plurality of donor films at the location to form a molten droplet and induce ejection of the molten droplet, from the plurality of donor films onto the acceptor substrate, an entire volume of the molten droplet forming a mixture of the first component and the second component;
wherein the irradiating the plurality of donor films comprises controlling relative proportions of the first component and the second component in the molten droplet by selecting the location on the plurality of the donor films on which the pulses are incident.

2. The method according to claim 1 , wherein at least one of the plurality of donor films has a thickness that varies over the second surface.

3. The method according to claim 1 , wherein the first film and the second film are interleaved transversely across the second surface.

4. The method according to claim 1 , wherein the first film and the second film are different with respect to at least one of a size, a shape, a polycrystalline structure and a morphological structure.

5. The method according to claim 1 , wherein an entire thickness of the plurality of donor films at the location on the plurality of donor films is melted into the molten droplet.

6. A method of material transfer, comprising:
providing a donor substrate, having a first surface and a second surface, wherein the first surface and the second surface are on opposite sides of the donor substrate, and a plurality of donor films in a non-uniform distribution is on the second surface;
positioning the donor substrate in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate; and
irradiating the plurality of donor films with pulses of laser radiation transmitted through the first surface of the donor substrate and incident on the plurality of donor films at a location determined based on the non-uniform distribution, and melting at least a substantial thickness of the plurality of donor films to form a molten droplet and induce ejection of the molten droplet from the plurality of donor films onto the acceptor substrate,
wherein the plurality of donor films comprises at least a first film of a first component and a second film of a second component, and wherein the irradiating the plurality of donor films comprises controlling relative proportions of the first component, and the second component in the molten droplet by selecting the location, and
wherein an entire volume of the molten droplet forming a mixture of the first component and the second component.

7. The method according to claim 6 , wherein at least one of the plurality of donor films has the thickness that varies over the second surface.

8. The method according to claim 6 , wherein the first film and the second film are interleaved transversely across the second surface.

9. The method according to claim 6 , wherein the first film and the second film are different with respect to at least one of a size, a shape, a polycrystalline structure and a morphological structure.

10. The method according to claim 6 , wherein a thickness of the first film is different from a thickness of the second film.

11. The method according to claim 6 , wherein a morphological structure of the first film is different from a morphological structure of the second film.

12. The method according to claim 6 , further comprising controlling an amount of laser energy absorbed by the plurality of donor films by choosing an order of the plurality of donor films on the donor substrate.

13. The method according to claim 6 , further comprising controlling a deposition rate of the molten droplet onto the acceptor substrate by choosing an order of the plurality of donor films on the donor substrate.

14. The method according to claim 6 , wherein at least one of the plurality of donor films comprises a composite matrix.

15. The method according to claim 6 , further comprising electrically charging at least one of the plurality of donor films, thereby forming electrets on the acceptor substrate.

16. The method according to claim 6 , further comprising forming at least one amorphous layer of molten material on the acceptor substrate by controlling a temperature of the molten droplet.

17. The method according to claim 6 , further comprising forming a hybrid structure of a crystalline material and an amorphous material across the acceptor substrate, by controlling a temperature of the molten droplet.

18. The method according to claim 6 , wherein, the first film is a semiconductor material and the second film is a dielectric material, and wherein the irradiating the plurality of donor films comprises forming a quantum dot on the acceptor substrate, the quantum dot comprising the semiconductor material and the dielectric material.

19. A method of material transfer, comprising:
specifying a composition to be transferred onto an acceptor substrate;
providing a donor substrate, having a first surface and a second surface, wherein the first surface and the second surface are on opposite sides of the donor substrate, and a plurality of donor films is on the second surface, the plurality of donor films comprising at least a first film of a first component of the specified composition and a second film of a second component, different from the first component, of the specified composition, wherein thicknesses of the plurality of donor films are selected to produce the specified composition;
positioning the donor substrate in proximity to an acceptor substrate, with the second surface facing toward the acceptor substrate; and
irradiating the plurality of donor films with pulses of laser radiation transmitted through the first surface of the donor substrate and incident on the plurality of donor films at a location, and melting at least a substantial thickness of the plurality of donor films at the location to form a molten droplet and induce ejection of the molten droplet from the plurality of donor films onto the acceptor substrate, an entire volume of the molten droplet forming a mixture of the specified component.

20. The method according to claim 19 wherein at least one of the plurality of donor films has a thickness that varies over the second surface.

21. The method according to claim 19 , wherein the first film and the second film are interleaved transversely across the second surface.

22. The method according to claim 19 , further comprising controlling an amount of laser energy absorbed by the plurality of donor films by choosing an order of the plurality of donor films on the donor substrate.

23. The method according to claim 19 , further comprising controlling a deposition rate

Assignees

• Orbotech Ltd

Inventors

• Zenou Michael
• Kotler Zvi

Classifications

• H10P14/46

  using a liquid · CPC title

• H10P14/3461

  Nanoparticles · CPC title

• H10P14/20

  of semiconductor materials · CPC title

• H10P34/42 Primary

  with electromagnetic radiation, e.g. laser annealing (laser cutting H10P54/20) · CPC title

• C23C26/02 Primary

  applying molten material to the substrate · CPC title