Mask frame assembly with alignment marks in both frame and mask plate, and evaporation apparatus

Patent metadata

Field	Value
Publication number	US-10627714-B2
Application number	US-201715737220-A
Country	US
Kind code	B2
Filing date	May 12, 2017
Priority date	May 13, 2016
Publication date	Apr 21, 2020
Grant date	Apr 21, 2020

Abstract

A mask frame assembly and an evaporation apparatus are disclosed. The mask frame assembly comprises a frame and a mask plate fixed on the frame. The mask frame assembly is provided with alignment marks, which comprise a first alignment hole arranged in the frame and a second alignment hole arranged in the mask plate. The first alignment hole is a through hole; or the first alignment hole is a blind hole, the deepest position at a bottom of the blind hole does not overlap with an orthographic projection of the second alignment hole on the frame. The mask frame assembly effectively solves a problem in which liquid residuals in alignment holes of the frame interfere with alignment.

First claim

What is claimed is:

1. A mask frame assembly, comprising a frame and a mask plate fixed on the frame,
wherein the mask frame assembly is provided with alignment marks, and each of the alignment marks comprises a first alignment hole which is arranged in the frame and a second alignment hole which is arranged in the mask plate, and
wherein the first alignment hole is a blind hole, the deepest position at a bottom of the blind hole does not overlap with an orthographic projection of the second alignment hole from the mask plate to the frame,
wherein the first alignment hole comprises a first segment, and the first segment has an inner wall which is not perpendicular with a plane in which the mask plate lies,
wherein the first alignment hole further comprises a second segment of a cylinder shape, and the second segment has an axis which is perpendicular with the plane in which the mask plate lies.

2. The mask frame assembly of claim 1 , wherein the first segment has a cone shape, and the first segment has an axis which is perpendicular with the plane in which the mask plate lies.

3. The mask frame assembly of claim 2 , wherein an orthographic projection of the second alignment hole on the frame is located on the inner wall of the first segment.

4. The mask frame assembly of claim 2 , wherein the first segment has a cone angle of 60 degrees -150 degrees and a height of 1.5 mm -2.0 mm.

5. The mask frame assembly of claim 1 , wherein the second segment has a height of 0.8 mm -1.2 mm.

6. The mask frame assembly of claim 1 , wherein the second alignment hole is a through hole.

7. The mask frame assembly of claim 1 , wherein the frame and the mask plate is made from a metallic material, and the mask plate is soldered to the frame.

8. The mask frame assembly of claim 1 , comprising 4 or more alignment marks.

9. An evaporation apparatus, comprising the mask frame assembly of claim 1 .

Assignees

• Boe Technology Group Co Ltd
• Ordos Yuansheng Optoelectronics Co Ltd

Inventors

• Ji Fengli
• Bai Shanshan
• Liang Yinan

Classifications

• H10P50/691

  for Group V materials or Group III-V materials · CPC title

• C23C14/042 Primary

  using masks · CPC title

• G03F1/68

  Preparation processes not covered by groups G03F1/20 - G03F1/50 · CPC title

• G03F1/66

  Containers specially adapted for masks, mask blanks or pellicles; Preparation thereof · CPC title

• C23C14/56

  Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks · CPC title