Adjustable side gas plenum for edge rate control in a downstream reactor

Patent metadata

Field	Value
Publication number	US-10622189-B2
Application number	US-201615151650-A
Country	US
Kind code	B2
Filing date	May 11, 2016
Priority date	May 11, 2016
Publication date	Apr 14, 2020
Grant date	Apr 14, 2020

Abstract

A side tuning ring for a gas distribution device of a substrate processing system includes a first ring adjacent to a faceplate of the gas distribution device. The first ring surrounds the faceplate and defines a first plenum, communicates with a first gas source, and includes a first plurality of holes arranged to direct gas from the first gas source into a process chamber at a first angle. A second ring is adjacent to the first ring. The second ring surrounds the first ring and defines a second plenum, communicates with at least one of the first gas source and a second gas source, and includes a second plurality of holes arranged to direct gas from the at least one of the first gas source and the second gas source into the process chamber at the first angle or a second angle. The first ring and the second ring are detachable from the faceplate of the gas distribution device.

First claim

What is claimed is:

1. A side tuning ring for a gas distribution device of a substrate processing system, the side tuning ring comprising:
a first ring adjacent to a faceplate of the gas distribution device, wherein
the first ring surrounds the faceplate and defines a first plenum, and
the first ring communicates with a first gas source and includes a first plurality of holes arranged to direct gas from the first gas source into a process chamber at a first angle; and

a second ring adjacent to the first ring, wherein
the second ring surrounds the first ring and defines a second plenum, and
the second ring communicates with at least one of the first gas source and a second gas source and includes a second plurality of holes arranged to direct gas from the at least one of the first gas source and the second gas source into the process chamber at a second angle,

wherein the first ring and the second ring are detachable from the faceplate of the gas distribution device,
wherein the first ring is detachable from the second ring, and
wherein the first angle and the second angle are different.

2. The side tuning ring of claim 1 , wherein the first angle corresponds to one of inward with respect to the faceplate, outward with respect to the faceplate, and directly downward from the first ring, and wherein the second angle corresponds to another one of inward with respect to the faceplate, outward with respect to the faceplate, and directly downward from the second ring.

3. The side tuning ring of claim 1 , wherein at least one of the first ring and the second ring is arranged above an outer edge of a substrate in the process chamber.

4. A system comprising the side tuning ring of claim 1 , and further comprising:
the first gas source;
the second gas source; and
a controller.

5. The system of claim 4 , wherein the first gas source includes a first gas and the second gas source includes a second gas different from the first gas.

6. The system of claim 4 , wherein the controller independently controls first gas flow from the first gas source through the first ring and second gas flow from the second gas source through the second ring.

7. The system of claim 6 , wherein the first gas flow is provided to a first plurality of injection points in a top side of the first ring and the second gas flow is provided to a second plurality of injection points in a top side of the second ring.

Assignees

• Lam Res Corp

Inventors

• Bravo Andrew Stratton
• Guha Joydeep
• Kumar Jatinder

Classifications

• C23C16/45544

  characterized by the apparatus · CPC title

• H01J37/32449 Primary

  Gas control, e.g. control of the gas flow · CPC title

• H01J37/3244

  Gas supply means · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title