Cooling system for processing chamber
US-2024393018-A1 · Nov 28, 2024 · US
US10612822B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10612822-B2 |
| Application number | US-201515536567-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 28, 2015 |
| Priority date | Dec 15, 2014 |
| Publication date | Apr 7, 2020 |
| Grant date | Apr 7, 2020 |
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Official abstract text for this publication.
A bent pipe and a semiconductor refrigerator having the same are provided. The bent pipe for a fluid to flow therein includes a plurality of bent portions; a plurality of connecting pipe sections, each connecting two adjacent bent portions; and a retention member, which is successively fixed at different locations along the length thereof to the bent portions on the same side of the bent pipe. At least some of the pipe sections of the bent pipe can be kept in the bent shape by a retention member.
Opening claim text (preview).
What is claimed is: 1. A bent pipe for a refrigerant to flow therein, the bent pipe comprising: a plurality of bent portions; a plurality of connecting pipe sections, each of the plurality of connecting pipe sections connecting two adjacent bent portions; and a retention member, which is successively fixed at different locations along the length thereof to the bent portions on the same side of the bent pipe, wherein: a first end of the bent pipe is an open end which allows the refrigerant to flow into or flow out from the bent pipe, and a second end of the bent pipe is a closed end which prevents the refrigerant from flowing into or flowing out from the bent pipe. 2. The bent pipe according to claim 1 , characterized in that each of the connecting pipe sections is a straight pipe. 3. The bent pipe according to claim 1 , further comprising a further retention member, which is successively fixed at different locations along the length thereof to the bent portions on an other side of the bent pipe. 4. The bent pipe according to claim 3 , characterized in that the retention member and the further retention member are arranged parallel to each other. 5. The bent pipe according to claim 1 , characterized in that the retention member is a retention slat or a drawstring. 6. The bent pipe according to claim 1 , characterized in that the retention member has an elastic modulus of 190 Gpa or more. 7. The bent pipe according to claim 1 , characterized in that fixing the retention member successively at different locations along the length thereof to the bent portions on the same side of the bent pipe is implemented by welding the retention member successively at different locations along the length thereof to a top hump of each of the bent portions on the same side of the bent pipe. 8. The bent pipe according to claim 1 , characterized in that pipe walls of the bent pipe that are in contact with the retention member are all fixed to the retention member. 9. A semiconductor refrigerator, comprising a liner, a semiconductor cooler, a heat exchanging device and a housing, the heat exchanging device being provided with a heat exchanging part which allows a refrigerant to flow therein and undergo phase-change heat exchange and a plurality of refrigerant pipelines with one end connecting to an inner cavity or pipeline of the heat exchanging part for transferring heat from the hot end of the semiconductor cooler to the housing, or transferring cold from the cold end of the semiconductor cooler to a storage compartment of the liner, characterized in that each of the refrigerant pipelines is a bent pipe according to claim 1 .
using Peltier effect; using Nernst-Ettinghausen effect · CPC title
Devices using a combination of a cooling mode associated with refrigerating machinery with a cooling mode not associated with refrigerating machinery · CPC title
the conduits having a particular shape, e.g. non-circular cross-section, annular (F28D15/0241, F28D15/0266 take precedence) · CPC title
by liquids or two-phase fluids · CPC title
for mounting refrigerating machinery components · CPC title
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