Permanent magnet comprising a stack of N patterns

Patent metadata

Field	Value
Publication number	US-10600538-B2
Application number	US-201715480741-A
Country	US
Kind code	B2
Filing date	Apr 6, 2017
Priority date	Apr 6, 2016
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

A permanent magnet includes a stack of N patterns stacked immediately one above the other in a stacking direction, each pattern including an antiferromagnetic layer made of antiferromagnetic material, a ferromagnetic layer made of ferromagnetic material, the directions of magnetization of the various ferromagnetic layers of all the patterns all being identical to one another. At least one ferromagnetic layer includes a first sub-layer made of CoFeB whose thickness is greater than 0.05 nm, and a second sub-layer made of a ferromagnetic material different from CoFeB and whose thickness is greater than the thickness of the first sub-layer.

First claim

The invention claimed is:

1. A magnet comprising a stack of N patterns stacked immediately one above the other in a stacking direction, where N is an integer number greater than or equal to two, each pattern comprising:
i) an antiferromagnetic layer made of antiferromagnetic material,
ii) a ferromagnetic layer made of ferromagnetic material,
wherein
the direction of magnetization of the ferromagnetic layer is fixed by an exchange coupling with the antiferromagnetic layer of this pattern, and
the direction of magnetization of the ferromagnetic layer of N- 1 patterns is fixed by an exchange coupling with the antiferromagnetic layer of an immediately adjacent pattern in the stack,

wherein the directions of magnetization of the ferromagnetic layers of all the patterns in said stack are identical to one another,
wherein at least one ferromagnetic layer in said stack comprises:
a first sub-layer made of CoFeB whose thickness is greater than 0.05 nm, and
a second sub-layer made of a ferromagnetic material different from CoFeB and whose thickness is greater than the thickness of the first sub-layer,

wherein the magnet is a permanent magnet and wherein the permanent magnet has a total magnetic moment per unit area greater than 50×10 −3 A.

2. . The magnet according to claim 1 , wherein the first sub-layer is disposed at a distance of greater than or equal to 5 nm from the interface between the ferromagnetic layer of the pattern and the antiferromagnetic layer of the following pattern in the stacking direction, so that no sub-layer made of CoFeB is situated less than 5 nm from the antiferromagnetic layer of the following pattern.

3. The magnet according to claim 2 , wherein the first sub-layer is deposited directly on the antiferromagnetic layer of the pattern.

4. The magnet according to claim 2 , wherein the ferromagnetic layer comprises a third sub-layer made of a ferromagnetic material different from CoFeB and the first sub-layer is situated between these second and third sub-layers.

5. The magnet according to claim 1 , wherein the ferromagnetic layer of each pattern comprises a copy of the first sub-layer.

6. The magnet according to claim 1 , wherein the thickness of the first sub-layer is less than 5 nm.

7. The magnet according to claim 1 , wherein N is an integer number greater than or equal to five or ten.

8. The magnet according to claim 1 , wherein the first sub-layer comprises between 10% and 30% by mass of boron.

9. The magnet according to claim 1 , wherein the magnet exhibits an aspect ratio of greater than or equal to two, the aspect ratio being defined as the ratio of the length to the width of the parallelepiped of smallest volume entirely containing the stack and the direction of magnetization of each ferromagnetic layer of the permanent magnet is parallel to the length of this parallelepiped.

10. A magnetic field sensor comprising:
a substrate extending essentially in a plane perpendicular to the stacking direction,
at least one permanent magnet displaceable with respect to the substrate in response to a variation of the amplitude or of the direction of a magnetic field to be measured,
a transducer fixed on the substrate, able to convert a displacement of the permanent magnet into an electrical quantity representative of the amplitude or of the direction of the magnetic field to be measured,
wherein the permanent magnet is in accordance with claim 1 .

11. A process for fabricating a permanent magnet in accordance with claim 1 , said process comprising:
a) forming a stack comprising N patterns stacked immediately one above the other in a stacking direction, each pattern comprising:
an antiferromagnetic layer made of antiferromagnetic material, and
a ferromagnetic layer made of ferromagnetic material,
b) heating the stack so as to attain a temperature greater than an ordering temperature of the material of the magnetic layers of the stack,
c) when the temperature is greater than the ordering temperature, applying a first magnetic field so as to align the direction of magnetization of the ferromagnetic layers with a predetermined desired direction,
d) cooling the stack in the presence of a second magnetic field less than the first magnetic field so as to reveal an exchange coupling between the ferromagnetic layer and the antiferromagnetic layer of each pattern of the stack,
wherein step a) comprises forming, in at least one ferromagnetic layer:
a first sub-layer made of CoFeB whose thickness is greater than 0.05 nm, and
a second sub-layer made of a ferromagnetic material different from CoFeB, whose thickness is greater than the thickness of the first sub-layer.

12. The permanent magnet of claim 1 , wherein the permanent magnet has a total magnetic moment per unit area greater than 1000×10 -3 A.

13. The permanent magnet of claim 1 , wherein the permanent magnet has a total magnetic moment per unit area greater than 500×10 -3 A.

14. The permanent magnet of claim 1 , wherein the each ferromagnetic layer contains more than 95% by mass of a ferromagnetic material.

Assignees

• Commissariat Energie Atomique

Inventors

• Delaet Bertrand
• Giroud Sophie
• Hida Rachid

Classifications

• H01F10/30

  characterised by the composition of the intermediate layers {, e.g. seed, buffer, template, diffusion preventing, cap layers (H01F10/06 and H01F10/32 take precedence)} · CPC title

• G01R33/038

  using permanent magnets, e.g. balances, torsion devices · CPC title

• H01F10/16

  containing cobalt ({H01F10/126} , H01F10/13 take precedence) · CPC title

• H01F1/047 Primary

  Alloys characterised by their composition · CPC title

• H01F10/002

  Antiferromagnetic thin films, i.e. films exhibiting a Néel transition temperature (H01F10/3218 and H01F10/3268 take precedence) · CPC title