Sputtering target for forming magnetic recording film and method for producing same

Patent metadata

Field	Value
Publication number	US-10600440-B2
Application number	US-201515513017-A
Country	US
Kind code	B2
Filing date	Jul 7, 2015
Priority date	Sep 22, 2014
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

An FePt-based sintered sputtering target containing C and/or BN, wherein an area ratio of AgCu alloy grains on a polished surface of a cross section that is perpendicular to a sputtered surface of the sputtering target is 0.5% or more and 15% or less. An object of this invention is to provide a sputtering target capable of reducing particles generation during sputtering and efficiently depositing a magnetic thin film of a magnetic recording medium.

First claim

The invention claimed is:

1. An FePt-based sintered sputtering target having a sintered structure comprising a phase of FePt-based ferromagnetic alloy containing therein a dispersion of AgCu alloy grains as a sintering agent and non-magnetic particles of C and/or BN, wherein the AgCu alloy grains as a whole have an area ratio of 0.5% or more and 15% or less in a microstructure of a polished cross section made perpendicular to a sputtering face of the sputtering target.

2. The sputtering target according to claim 1 , wherein a total content of Ag and Cu constituting the AgCu alloy in a composition of the sputtering target is 1 to 20 mol %.

3. The sputtering target according to claim 2 , wherein a ratio of Cu content relative to the total content of Ag and Cu is 10 to 85 mol %.

4. The sputtering target according to claim 3 , wherein a Pt content in the composition of the sputtering target is 30 to 70 mol %.

5. The sputtering target according to claim 4 , wherein a C content in the composition of the sputtering target is 5 to 60 mol %.

6. The sputtering target according to claim 5 , wherein a BN content in the composition of the sputtering target is 2 to 40 mol %.

7. The sputtering target according to claim 6 , wherein one or more types of oxides of metals selected from the group consisting of Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Al, Ga, and Si are contained in the sputtering target in a total amount of 0.1 to 20 mol % relative to the composition of the sputtering target.

8. The sputtering target according to claim 7 , wherein the sputtering target has a relative density of 95% or higher.

9. The sputtering target according to claim 1 , wherein a Pt content in a composition of the sputtering target is 30 to 70 mol %.

10. The sputtering target according to claim 1 , wherein a C content in a composition of the sputtering target is 5 to 60 mol %.

11. The sputtering target according to claim 1 , wherein a BN content in a composition of the sputtering target is 2 to 40 mol %.

12. The sputtering target according to claim 1 , wherein one or more types of oxides of metals selected from the group consisting of Y, Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Mn, Fe, Co, Ni, Al, Ga, and Si are contained in the sputtering target in a total amount of 0.1 to 20 mol % relative to a composition of the sputtering target.

13. The sputtering target according to claim 1 , wherein the sputtering target has a relative density of 95% or higher.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Ogino Shin-Ichi

Classifications

• H01J37/3405

  Magnetron sputtering · CPC title

• C22C29/00

  Alloys based on carbides, oxides, nitrides, borides, or silicides, e.g. cermets, or other metal compounds, e.g. oxynitrides, sulfides {(C22C26/00 takes precedence)} · CPC title

• C22C5/04

  Alloys based on a platinum group metal · CPC title

• C23C14/3414

  Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy · CPC title

• B22F2998/10

  Processes characterised by the sequence of their steps · CPC title