Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components

Patent metadata

Field	Value
Publication number	US-10599043-B2
Application number	US-201715675101-A
Country	US
Kind code	B2
Filing date	Aug 11, 2017
Priority date	Aug 12, 2016
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

Implementations described herein generally relate to methods for leveling a component above a substrate. In one implementation, a test substrate is placed on a substrate support inside of a processing chamber. A component, such as a mask, is located above the substrate. The component is lowered to a position so that the component and the substrate are in contact. The component is then lifted and the particle distribution on the test substrate is reviewed. Based on the particle distribution, the component may be adjusted. A new test substrate is placed on the substrate support inside of the processing chamber, and the component is lowered to a position so that the component and the new test substrate are in contact. The particle distribution on the new test substrate is reviewed. The process may be repeated until a uniform particle distribution is shown on a test substrate.

First claim

The invention claimed is:

1. A method, comprising:
placing a test substrate onto a substrate support inside of a processing chamber, wherein a component is located above the test substrate;
lowering the component to a first position so that the component and the test substrate are in contact;
lifting the component from the test substrate;
reviewing a first particle distribution on the test substrate; and
adjusting the component.

2. The method of claim 1 , further comprising placing a new test substrate onto the substrate support inside of the processing chamber after adjusting the component.

3. The method of claim 2 , further comprising lowering the component to a second position so that the component and the new test substrate are in contact.

4. The method of claim 3 , further comprising reviewing a second particle distribution on the new test substrate.

5. The method of claim 1 , wherein the component is a mask.

6. The method of claim 1 , wherein adjusting the component comprises turning one or more screws.

7. A method, comprising:
placing a test substrate onto a substrate support inside of a processing chamber, wherein a mask is located above the test substrate;
lowering the mask to a first position so that the mask and the test substrate are in contact;
lifting the mask from the test substrate;
reviewing a first particle distribution on the test substrate;
adjusting the mask;
placing a new test substrate onto the substrate support inside of the processing chamber;
lowering the mask to a second position so that the mask and the new test substrate are in contact; and
reviewing a second particle distribution on the new test substrate.

8. The method of claim 7 , wherein adjusting the mask comprises turning one or more screws.

9. The method of claim 7 , wherein the mask comprises an annular protrusion extending toward the test substrate.

10. The method of claim 7 , further comprising determining the mask and the test substrate are in contact by friction or resistance sensed with a motor used for lowering and lifting the mask.

11. The method of claim 7 , further comprising adjusting the mask after reviewing the second particle distribution on the new test substrate.

12. The method of claim 11 , further comprising:
placing a second new test substrate onto the substrate support inside of the processing chamber;
lowering the mask to a third position so that the mask and the second new test substrate are in contact;
reviewing a third particle distribution on the second new test substrate; and
adjusting the mask after reviewing the third particle distribution on the second new test substrate.

13. A method, comprising:
placing a test substrate onto a substrate support inside of a processing chamber, wherein a component is located above the test substrate;
lowering the component to a first position so that the component and the test substrate are in contact;
lifting the component from the test substrate;
reviewing a first particle distribution on the test substrate;
placing a first new test substrate onto the substrate support inside of the processing chamber;
lowering the component to a second position that is higher than the first position; and
reviewing a second particle distribution on the first new test substrate.

14. The method of claim 13 , wherein the second position is higher than the first position by 1 mil.

15. The method of claim 13 , further comprising placing a second new substrate onto the substrate support inside of the processing chamber.

16. The method of claim 15 , further comprising lowering the component to a third position that is higher than the second position, and reviewing a third particle distribution on the second new test substrate.

17. The method of claim 13 , wherein the component is a mask.

18. The method of claim 17 , wherein the mask comprises an annular protrusion extending toward the test substrate.

19. The method of claim 13 , further comprising leveling the component with respect to the test substrate after reviewing the first particle distribution on the test substrate and prior to placing the first new test substrate onto the substrate support inside of the processing chamber.

20. The method of claim 19 , wherein the component is a mask.

Assignees

• Applied Materials Inc

Inventors

• Ogiso Hiroyuki
• Zhou Jianhua
• Su Zonghui
• Rocha-Alvarez Juan Carlos
• Lee Jeongmin
• Narasimha Karthik Thimmavajjula
• Gilbert Rick
• Park Sang Heon
• Khaja Abdul Aziz
• Prabhakar Vinay

Classifications

• H10P74/23

  characterised by multiple measurements, corrections, marking or sorting processes · CPC title

• H10P72/78

  using vacuum or suction, e.g. Bernoulli chucks · CPC title

• H10P14/6502

  of treatments performed before formation of the materials · CPC title

• G03F7/70283 Primary

  Mask effects on the imaging process · CPC title

• G03F7/70058

  Mask illumination systems · CPC title