Wafer probing

Patent metadata

Field	Value
Publication number	US-10598480-B2
Application number	US-201715471565-A
Country	US
Kind code	B2
Filing date	Mar 28, 2017
Priority date	Apr 8, 2016
Publication date	Mar 24, 2020
Grant date	Mar 24, 2020

Abstract

A method of determining a minimum permissible tip diameter of probing needles of a probe card for wafer probing is described. The method includes performing a plurality of contact procedures of at least one probing needle to a plurality of bonding pads on a wafer. The plurality of contact procedures is performed at different stress applied by the at least one probing needle to the bonding pads. A chart of indentation depths of the plurality of bonding pads caused by the contact procedures at different stress is determined. A set of calibration coefficients based on the chart is determined, wherein the set of calibration coefficients allows to compute a predicted indentation depth as a function of stress. The minimum permissible probing needle tip diameter is determined based on an evaluation of the function.

First claim

What is claimed is:

1. A method of determining a minimum permissible tip diameter of probing needles of a probe card for wafer probing, the method comprising:
performing a plurality of contact procedures of at least one probing needle to a plurality of bonding pads on a wafer, wherein the plurality of contact procedures is performed at different stress applied by the at least one probing needle to the bonding pads;
determining a chart of indentation depths of the plurality of bonding pads caused by the contact procedures at different stress;
determining a set of calibration coefficients based on the chart, wherein the set of calibration coefficients allows to compute a predicted indentation depth as a function of the stress; and
determining the minimum permissible probing needle tip diameter based on an evaluation of the function.

2. The method of claim 1 , wherein performing a plurality of contact procedures comprises:
performing at least one touch-down of a probe card on a wafer, wherein the probe card comprises a plurality of probing needles contacting the plurality of bonding pads on the wafer.

3. The method of claim 2 , further comprising:
measuring the tip diameters of the plurality of probing needles of the probe card; and
determining the set of calibration coefficients based on the measured tip diameters.

4. The method of claim 1 , wherein determining the minimum permissible probing needle tip diameter comprises:
evaluating the function at a predetermined maximum permissible predicted indentation depth to yield a maximum permissible stress; and
determining the minimum permissible probe tip diameter based on the maximum permissible stress and one of a touch-down force and a touch-down overdrive to be applied to the probe card during wafer probing.

5. The method of claim 1 , wherein the function comprises the relation h/t=1−exp[−(k×σ) m ], wherein h is the predicted indentation depth, t is a bond pad thickness, σ is the stress, and (k, m) is a subset or the set of calibration coefficients.

6. The method of claim 1 , wherein the function comprises the relation h/t=1−(1−b)exp[−(k×σ) m ], wherein h is the predicted indentation depth, t is a bond pad thickness, σ is the stress, and (k, m, b) is a subset or the set of calibration coefficients.

7. A method of adjusting tip diameters of probing needles of a probe card for wafer probing, the method comprising:
determining a minimum permissible probing needle tip diameter of the probing needles according to claim 1 ;
measuring the tip diameters of the plurality of probing needles of the probe card; and
adjusting the probing needle tip diameters so as to be equal to or greater than the minimum permissible probing needle tip diameter.

8. The method of claim 7 , wherein measuring the tip diameters of each of the plurality of probing needles is done by optical inspection.

9. A wafer test equipment, comprising:
a wafer support configured to place a wafer thereon;
a probe card holder configured to hold a probe card;
a manipulator configured vary the distance between the wafer support and the probe card holder, the probe card comprising a plurality of probing needles for contacting bonding pads on the wafer; and
a computation unit configured
to determine a set of calibration coefficients, wherein the set of calibration coefficients allows to compute a predicted indentation depth of a probing needle on a bonding pad as a function of stress applied by the probing needle to the bonding pad, and
to determine the minimum permissible probing needle tip diameter based on an evaluation of the function.

10. The wafer test equipment of claim 9 , further comprising:
an indentation depth analyzer configured to determine a chart of individual indentation depths on the bonding pads caused by the individual probing needles.

11. The wafer test equipment of claim 9 , further comprising:
a tip diameter measuring device configured to measure the tip diameters of the plurality of probing needles of the probe card.

12. A computer program for determining a minimum permissible probing needle tip diameter of probing needles of a probe card for wafer probing, which, when running on a computer or loaded in a computer carries out or is capable of carrying out a method comprising:
recording a chart of indentation depths on bonding pads caused by a plurality of contact procedures of at least one probing needle to a plurality of bonding pads on the wafer, wherein the contact procedures are performed at different stress applied by the at least one probing needle to the bonding pads; determining a set of calibration coefficients based on the chart;
computing based on the set of calibration coefficients a predicted indentation depth as a function of the stress; and
determining the minimum permissible probing needle tip diameter based on an evaluation of the function.

13. The computer program of claim 12 , wherein the function comprises the relation h/t=1−exp[−(k×σ) m ] or the relation h/t=1−(1−b)exp[−(k×σ) m ], wherein h is the predicted indentation depth, t is a bond pad thickness, σ is the stress,
(k, m) is a subset or the set of calibration coefficients and
(k, m, b) is a subset or the set of calibration coefficients.

Assignees

• Infineon Technologies Ag

Inventors

• Penjovic Ivan
• Nagler Oliver

Classifications

• G01R1/0675

  Needle-like · CPC title

• G01B11/08 Primary

  for measuring diameters · CPC title

• G01R1/06738 Primary

  related to tip portion · CPC title