Method for transferring graphene pieces onto a substrate

Patent metadata

Field	Value
Publication number	US-10593762-B2
Application number	US-201615771423-A
Country	US
Kind code	B2
Filing date	Nov 16, 2016
Priority date	Dec 12, 2015
Publication date	Mar 17, 2020
Grant date	Mar 17, 2020

Abstract

Transferring graphene pieces onto a substrate, by the following steps: a) selecting a substrate comprising a plurality of placeholders for the graphene pieces; b) disposing and aligning the substrate on a substrate holder in a chamber; c) selecting a transfer layer having openings as placeholders for the graphene pieces; d) disposing and aligning the transfer layer on the substrate holder over the substrate so that the openings of the transfer layer are aligned over the placeholders on the substrate; e) adding liquid to the chamber to above the transfer layer, and raising the transfer layer on the liquid column; f) introducing graphene pieces onto the liquid film in the openings of the transfer layer; and g) reducing the distance between the substrate and the graphene pieces until the graphene pieces are disposed on the placeholders of the substrate. A substrate and a device for carrying out the method.

First claim

The invention claimed is:

1. A method for transferring a plurality of at least three graphene pieces onto a substrate, comprising:
a) selecting a substrate comprising a plurality of at least three placeholders located on a first surface of the substrate, each placeholder of the plurality of at least three placeholders being a placeholder for a graphene piece from among the plurality of at least three graphene pieces, said each placeholder having an area less than a total area of said first surface;
b) disposing the substrate on a substrate holder at a first height in a chamber;
c) selecting a transfer layer having a plurality of openings;
d) disposing the transfer layer in the chamber above the substrate;
e) relatively aligning the substrate and transfer layer so that the openings in the transfer layer are aligned over the placeholders on the substrate;
f) after said aligning, adding a liquid to the chamber, wherein the transfer layer floats in the liquid of the chamber so as to elevate relative to the substrate, the substrate remaining secure on the substrate holder at the first height in the chamber, and wherein a portion of the liquid occupies the plurality of openings of the transfer layer;
g) after said adding, for each one graphene piece among the plurality of at least three graphene pieces, introducing said one graphene piece into a corresponding opening among the plurality of openings in the transfer layer; and
h) reducing a distance between the substrate and the transfer layer until said each one graphene piece among the plurality of at least three graphene pieces is disposed on a corresponding placeholder among the plurality of at least three placeholders of the substrate; and
wherein said each one graphene piece has an area no greater than an area of the corresponding placeholder on which said one graphene piece is disposed, said each one graphene piece remaining in said corresponding opening during said reducing;
wherein the placeholders of the substrate and the openings of the transfer layer for the graphene pieces are aligned with respect to one another by way of a plurality of fixing pins.

2. The method of claim 1 , wherein the transfer layer comprises cut-outs at the edge of the transfer layer which are guided into mating alignment with the fixing pins.

3. A device for carrying out a method for transferring a plurality of at least three graphene pieces onto a substrate, the method comprising:
a) selecting a substrate comprising a plurality of at least three placeholders located on a first surface of the substrate, each placeholder of the plurality of at least three placeholders being a placeholder for a graphene piece from among the plurality of at least three graphene pieces, said each placeholder having an area less than a total area of said first surface;
b) disposing the substrate on a substrate holder at a first height in a chamber;
c) selecting a transfer layer having a plurality of openings;
d) disposing the transfer layer in the chamber above the substrate;
e) relatively aligning the substrate and transfer layer so that the openings in the transfer layer are aligned over the placeholders on the substrate;
f) after said aligning, adding a liquid to the chamber, wherein the transfer layer floats in the liquid of the chamber so as to elevate relative to the substrate, the substrate remaining secure on the substrate holder at the first height in the chamber, and wherein a portion of the liquid occupies the plurality of openings of the transfer layer;
g) after said adding, for each one graphene piece among the plurality of at least three graphene pieces, introducing said one graphene piece into a corresponding opening among the plurality of openings in the transfer layer; and
h) reducing a distance between the substrate and the transfer layer until said each one graphene piece among the plurality of at least three graphene pieces is disposed on a corresponding placeholder among the plurality of at least three placeholders of the substrate; and
wherein said each one graphene piece has an area no greater than an area of the corresponding placeholder on which said one graphene piece is disposed, said each one graphene piece remaining in said corresponding opening during said reducing; and

the device comprising:
a chamber, which can be loaded with liquid, and having therein a substrate holder for a substrate and a plurality of fixing pins for fixing orientation of the transfer layer in an X-Y plane defined by the transfer layer while permitting movement of the transfer layer along a Z-axis orthogonal to the X-Y plane; and
means for rotating the substrate within the X-Y plane to align the substrate and the transfer layer disposed above the substrate.

4. The device according to claim 3 , further comprising an intake valve and/or discharge valve for the liquid.

5. The device according to claim 3 , further comprising a lifting mechanism for raising the substrate holder along said Z-axis.

6. The device according to claim 3 , further comprising a thin flexible film as the transfer layer.

7. A method for transferring a plurality of at least three graphene pieces onto a substrate, comprising:
a) selecting a substrate comprising a plurality of at least three placeholders located on a first surface of the substrate, each placeholder of the plurality of at least three placeholders being a placeholder for a graphene piece from among the plurality of at least three graphene pieces, said each placeholder having an area less than a total area of said first surface;
b) disposing the substrate on a substrate holder at a first height in a chamber;
c) selecting a transfer layer having a plurality of openings;
d) disposing the transfer layer in the chamber above the substrate;
e) relatively aligning the substrate and transfer layer so that the openings in the transfer layer are aligned over the placeholders on the substrate;
f) after said aligning, adding a liquid to the chamber, wherein the transfer layer floats in the liquid of the chamber so as to elevate relative to the substrate, the substrate remaining secure on the substrate holder at the first height in the chamber, and wherein a portion of the liquid occupies the plurality of openings of the transfer layer;
g) after said adding, for each one graphene piece among the plurality of at least three graphene pieces, introducing said one graphene piece into a corresponding opening among the plurality of openings in the transfer layer; and
h) reducing a distance between the substrate and the transfer layer until said each one graphene piece among the plurality of at least three graphene pieces is disposed on a corresponding placeholder among the plurality of at least three placeholders of the substrate; and
wherein said each one graphene piece has an area no greater than an area of the corresponding placeholder on which said one graphene piece is disposed, said each one graphene piece remaining in said corresponding opening during said reducing;
wherein the substrate is a wafer comprising a plurality of chip areas in a checkerboard-like pattern, each chip area among said chip areas having peripheral borders;
wherein the transfer layer has surface lines which extend in first and second directions; and
wherein said relatively aligning comprises rotating one of the transfer layer and substrate relative to the other of the transfer layer and substrate so that peripheral borders of said chip areas precisely align with the surface lines of the transfer layer.

8. A method for transferring a plurality of at least three graphene pieces onto a substrate, comprising:
a) selecting a substrate comprising a plurality of at least three placeholders located on a first surface of the su

Assignees

• Forschungszentrum Juelich Gmbh

Inventors

• Kireev Dmitry
• Sarik Dario
• Wolfrum Bernhard
• Offenhausser Andreas

Classifications

• B32B37/18

  involving the assembly of discrete sheets or panels only · CPC title

• C01B32/194 Primary

  After-treatment · CPC title

• B32B3/14

  characterised by a face layer formed of separate pieces of material {which are juxtaposed side-by-side (B32B5/02 takes precedence)} · CPC title

• B32B2457/00

  Electrical equipment · CPC title

• B32B2313/04

  Carbon · CPC title