Semiconductor device, method of manufacturing same, and power converter
US-2019057873-A1 · Feb 21, 2019 · US
US10587263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10587263-B2 |
| Application number | US-201716469537-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 6, 2017 |
| Priority date | Dec 14, 2016 |
| Publication date | Mar 10, 2020 |
| Grant date | Mar 10, 2020 |
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Provided are a load drive apparatus in which a semiconductor chip using DTI for inter-element separation is mounted, the load drive apparatus being capable of diagnosing a dielectric strength voltage of the DTI and highly reliable and a failure diagnosis method of the load drive apparatus. There is provided a load drive apparatus in which a semiconductor chip is mounted. The semiconductor chip includes a load drive output unit formed on a semiconductor substrate. The load drive output unit has a first region where an MOSFET that controls load driving is formed and a second region insulated and separated by DTI from the first region and includes a first leakage current detection element provided in the first region, a second leakage current detection element provided in the second region, and a failure detection unit that determines a failure of the load drive output unit.
Opening claim text (preview).
The invention claimed is: 1. A load drive apparatus in which a semiconductor chip is mounted, wherein the semiconductor chip includes a load drive output unit formed on a semiconductor substrate, the load drive output unit has a first region where an MOSFET that controls load driving is formed and a second region insulated and separated by DTI from the first region, and wherein the load drive output unit includes: a first leakage current detection element provided in the first region; a second leakage current detection element provided in the second region; and a failure detection unit that determines a failure of the load drive output unit. 2. The load drive apparatus according to claim 1 , wherein in a case where a potential difference is provided between the first leakage current detection element and the second leakage current detection element and a current equal to or more than a predetermined value is detected, the failure detection unit determines that the load drive output unit is faulty. 3. The load drive apparatus according to claim 1 , wherein in a case where a current is applied between the first leakage current detection element and the second leakage current detection element and a voltage equal to or less than a predetermined value is detected, the failure detection unit determines that the load drive output unit is faulty. 4. The load drive apparatus according to claim 1 , wherein the semiconductor chip includes a redundant output unit of the load drive output unit, wherein the redundant output unit includes a third region where an MOSFET that controls load driving is formed and a fourth region insulated and separated by DTI from the third region, and wherein the redundant output unit includes: a third leakage current detection element provided in the third region; and a fourth leakage current detection element provided in the fourth region. 5. The load drive apparatus according to claim 4 , wherein in a case where the failure detection unit determines that the load drive output unit is faulty, when a potential difference is provided between the third leakage current detection element and the fourth leakage current detection element and a current equal to or less than a predetermined value is detected, a load drive function is switched from the load drive output unit to the redundant output unit. 6. The load drive apparatus according to claim 4 , wherein in a case where the failure detection unit determines that the load drive output unit is faulty, when a current is applied between the third leakage current detection element and the fourth leakage current detection element and a voltage equal to or more than a predetermined value is detected, the load drive function is switched from the load drive output unit to the redundant output unit. 7. The load drive apparatus according to claim 1 , wherein the load drive apparatus includes a redundant output unit of the load drive output unit formed on a semiconductor substrate of another semiconductor chip different from the semiconductor chip, wherein the redundant output unit has a third region where an MOSFET that controls load driving is formed and a fourth region insulated and separated by DTI from the third region, and wherein the redundant output unit includes: a third leakage current detection element provided in the third region; and a fourth leakage current detection element provided in the fourth region. 8. The load drive apparatus according to claim 7 , wherein in a case where the failure detection unit determines that the load drive output unit is faulty, when a potential difference is provided between the third leakage current detection element and the fourth leakage current detection element and a current equal to or less than a predetermined value is detected, the load drive function is switched from the load drive output unit to the redundant output unit. 9. The load drive apparatus according to claim 7 , wherein in a case where the failure detection unit determines that the load drive output unit is faulty, when a current is applied between the third leakage current detection element and the fourth leakage current detection element and a voltage equal to or more than a predetermined value is detected, the load drive function is switched from the load drive output unit to the redundant output unit. 10. The load drive apparatus according to claim 1 , wherein the failure detection unit determines a failure of the load drive output unit on-board. 11. The load drive apparatus according to claim 10 , wherein immediately after the load of the load drive apparatus is driven or before a power source is turned off, the failure detection unit performs a failure diagnosis of the load drive output unit. 12. The load drive apparatus according to claim 1 , wherein the semiconductor substrate is an SOI substrate.
AC power supplies · CPC title
for testing field effect transistors, i.e. FET's · CPC title
of components or parts made of semiconducting materials; of LV components or parts (G01R31/18 takes precedence) · CPC title
Testing for short-circuits, leakage current or ground faults · CPC title
the devices being field-effect transistors · CPC title
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