Ceramic pressure measurement cell and method for production thereof
US-10330549-B2 · Jun 25, 2019 · US
Pressure measurement cell
US10585009B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10585009-B2 |
| Application number | US-201515532528-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2015 |
| Priority date | Dec 4, 2014 |
| Publication date | Mar 10, 2020 |
| Grant date | Mar 10, 2020 |
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Abstract
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A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The base body and/or the measuring membrane have/has a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane.
First claim
Opening claim text (preview).
The invention claimed is: 1. A pressure measurement cell comprising: a base body, substantially cylindrical, at least in sections; a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane; and a joining material that joins the perimeter joint between the base body and the measuring membrane, wherein the base body and/or the measuring membrane includes a stepped recess into which the joining material is at least partially disposed, the stepped recess structured to yield a minimum distance between the base body and the measuring membrane, wherein the stepped recess has a step height of at least 12 micrometers. 2. The pressure measurement cell of claim 1 , wherein the base body and/or the measuring membrane comprise a ceramic material. 3. The pressure measurement cell of claim 2 , wherein the ceramic material is aluminum oxide. 4. The pressure measurement cell of claim 1 , wherein the joining material comprises an active solder foil. 5. The pressure measurement cell of claim 4 , wherein the active solder foil comprises a zirconium-nickel-titanium alloy. 6. The pressure measurement cell of claim 4 , wherein the active solder foil has a thickness of at least 25 micrometers. 7. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of at least 16 micrometers. 8. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of at least 18 micrometers. 9. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 40 micrometers. 10. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 30 micrometers. 11. The pressure measurement cell of claim 1 , wherein the stepped recess has a step height of no more than 20 micrometers. 12. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 5 micrometers. 13. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 7 micrometers. 14. The pressure measurement cell of claim 1 , wherein the minimum distance is at least 9 micrometers. 15. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 15 micrometers. 16. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 13 micrometers. 17. The pressure measurement cell of claim 1 , wherein the minimum distance is no more than 12 micrometers. 18. The pressure measurement cell of claim 1 , the pressure measurement cell further comprising a transducer structured to convert a pressure-dependent position of the measuring membrane into a pressure-dependent signal. 19. The pressure measurement cell of claim 18 , wherein the transducer is a capacitive transducer that generates the pressure-dependent signal using a capacitance between a membrane electrode on the measuring membrane facing the base body and a measurement electrode on the base body facing the measuring membrane.
Assignees
Inventors
Classifications
- G01L9/0044Primary
Constructional details of non-semiconductive diaphragms · CPC title
- G01L9/0075Primary
using a ceramic diaphragm, e.g. alumina, fused quartz, glass · CPC title
with stress relieving means · CPC title
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- What does patent US10585009B2 cover?
- A pressure measurement cell is disclosed including a base body, substantially cylindrical at least in sections, a measuring membrane joined to the base body in a pressure-tight manner along a perimeter joint to form a measurement chamber between the base body and the measuring membrane, and a joining material that joins the perimeter joint between the base body and the measuring membrane. The b…
- Who is the assignee on this patent?
- Endress Hauser Gmbh Co Kg, Endress Hauser Se Co Kg
- What technology area does this patent fall under?
- Primary CPC classification G01L9/0044. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 10 2020 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 4 related publications on this page (citations in our corpus or others sharing the same primary CPC).