Miniature fluid control device

Patent metadata

Field	Value
Publication number	US-10584695-B2
Application number	US-201615392061-A
Country	US
Kind code	B2
Filing date	Dec 28, 2016
Priority date	Jan 29, 2016
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

First claim

What is claimed is:

1. A miniature fluid control device, comprising:
a piezoelectric actuator comprising:
a suspension plate, wherein the suspension plate is a square structure, the length of the suspension plate is in a range between 7.5 mm and 12 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion;
an outer frame arranged around the suspension plate;
at least one bracket connected between the suspension plate and the outer frame for elastically supporting the suspension plate; and
a piezoelectric ceramic plate, wherein the piezoelectric ceramic plate is a square structure, a length of the piezoelectric ceramic plate is not larger than a length of the suspension plate, and the piezoelectric ceramic plate is attached on a first surface of the suspension plate, wherein when a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration; and

a housing comprising:
a gas collecting plate, wherein the gas collecting plate is a frame body with a sidewall, and one surface of the gas collecting plate is concaved to define a gas-collecting chamber, wherein the piezoelectric actuator is accommodated within the gas-collecting chamber; and
a base sealing a bottom of the piezoelectric actuator, and having a central aperture corresponding to the middle portion of the suspension plate;
wherein the gas collecting plate comprises a plurality of perforations passing therethrough, wherein when the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

2. The miniature fluid control device according to claim 1 , wherein the suspension plate further comprises a bulge, and the bulge is formed on a second surface of the suspension plate.

3. The miniature fluid control device according to claim 2 , wherein a thickness of the bulge is in a range between 0.02 mm and 0.08 mm.

4. The miniature fluid control device according to claim 2 , wherein the bulge is a circular convex structure, and a diameter of the bulge is 0.55 times as large as a short side length of the suspension plate.

5. The miniature fluid control device according to claim 1 , wherein the at least one bracket is a connecting part connected between the suspension plate and the outer frame.

6. The miniature fluid control device according to claim 5 , wherein the connecting part has two ends, and the two ends are opposed to each other and arranged along the same horizontal line.

7. The miniature fluid control device according to claim 5 , wherein the connecting part is connected with the outer frame and the suspension plate at an inclined angle between 0 to 45 degrees.

8. The miniature fluid control device according to claim 1 , wherein the at least one bracket comprises: an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate; a first connecting part arranged between the intermediate part and the suspension plate; and a second connecting part arranged between the intermediate part and the outer frame, wherein the first connecting part and the second connecting part are opposed to each other and arranged along the same horizontal line.

9. The miniature fluid control device according to claim 1 , wherein a thickness of the suspension plate is in a range between 0.1 mm and 0.4 mm.

10. The miniature fluid control device according to claim 1 , wherein a thickness of the piezoelectric ceramic plate is in a range between 0.05 mm and 0.3 mm.

11. The miniature fluid control device according to claim 1 , wherein the base comprises a gas inlet plate and a resonance plate, the gas inlet plate comprises a first surface, a second surface and the at least one inlet, the at least one inlet runs through the first surface and the second surface of the gas inlet plate, wherein at least one convergence channel is formed in the first surface of the gas inlet plate, and the at least one convergence channel is corresponding to and in communication with the at least one inlet of the gas inlet plate, wherein a central cavity is formed in the gas inlet plate and located at a central convergence area of the at least one convergence channel, wherein after the fluid is introduced into the at least one convergence channel through the at least one inlet, the fluid is guided by the at least one convergence channel and converged to the central cavity, wherein the central cavity forms a convergence chamber for temporarily storing the fluid.

12. The miniature fluid control device according to claim 1 , wherein the miniature fluid control device further comprises two insulation plates and a conducting plate, wherein the conducting plate is disposed between the two insulation plates, and the two insulation plates and the conducting plate are located under the piezoelectric actuator, wherein the profiles of the two insulation plates and the conducting plate match the profile of the outer frame of the piezoelectric actuator.

13. The miniature fluid control device according to claim 1 , wherein the gas collecting plate comprises a fiducial surface and a plurality of perforations, wherein a first pressure-releasing chamber and a first outlet chamber are formed in the fiducial surface of the gas collecting plate, wherein the plurality of perforations comprises a first perforation and at least one second perforation, a first end of the first perforation is in communication with the gas-collecting chamber, a second end of the first perforation is in communication with the first pressure-releasing chamber, and one end of the at least one second perforation is in communication with the first outlet chamber, wherein the gas collecting plate further comprises a raised structure corresponding to the first outlet chamber.

14. The miniature fluid control device according to claim 1 , wherein the miniature fluid control device is configured to cooperate with a miniature valve device, the miniature valve device comprises a valve plate and a gas outlet plate stacked on each other and positioned on the gas collecting plate of the miniature fluid control device, wherein the valve plate has a valve opening aligned with the raised structure corresponding to the first outlet chamber of the gas collecting plate, the gas outlet plate comprises a fiducial surface, a second surface, a pressure-releasing perforation and an outlet perforation, and the pressure-releasing perforation and the outlet perforation run through the fiducial surface and the second surface, wherein the fiducial surface of the gas outlet plate is concaved to define a second pressure-releasing chamber and a second outlet chamber, the second pressure-releasing chamber is aligned with the pressure-releasing perforation, the second outlet chamber is aligned with the outlet perforation, wherein the gas outlet plate further comprises a communication channel between the second pressure-releasing chamber and the second outlet chamber for allowing the gas to go through, wherein a first end of the pressure-releasing perforation is in communication with the second pressure-releasing chamber, and the gas outlet plate comprises a convex structure beside the first end of the pressure-releasing perforation, wherein the valve opening of the valve plate is contacted with and closed by the raised structure, the fluid in the gas-collecting plate isn't reversely returned to the first outlet chamber, and the first press

Assignees

• Microjet Technology Co Ltd

Inventors

• Chen Shih-Chang
• Huang Chi-Feng
• Han Yung-Lung
• Liao jia-yu
• Chen Shou-Hung
• Huang Che-Wei
• Liao Hung-Hsin
• Chen Chao-Chih
• Chen Jheng-Wei
• Chang Ying-Lun
• Chang Chia-Hao
• Lee Wei-Ming

Classifications

• F16K99/0048

  using piezoelectric means · CPC title

• F16K2099/0094

  Micropumps · CPC title

• F04B43/046 Primary

  with piezoelectric drive · CPC title

• F16K99/0015

  Diaphragm or membrane valves · CPC title

• H01L41/09

  Electricity · mapped topic