Method for coating thin film in rolling manner and apparatus for coating thin film by using the same

Patent metadata

Field	Value
Publication number	US-10583452-B2
Application number	US-201715480863-A
Country	US
Kind code	B2
Filing date	Apr 6, 2017
Priority date	Sep 22, 2016
Publication date	Mar 10, 2020
Grant date	Mar 10, 2020

Abstract

A method for coating a thin film in a rolling manner and a thin film coating apparatus are provided. The method includes: floating a thin film material on a liquefied material; rolling a cylindrical substrate after contacting the cylindrical substrate with the thin film material; and coating the thin film material on a surface of the cylindrical substrate by using an attraction force between the surface of the cylindrical substrate and the thin film material.

First claim

What is claimed is:

1. A method for coating a thin film in a rolling manner, the method comprising:
removing a sacrificial layer after depositing a thin film material on the sacrificial layer;
floating the thin film material from which the sacrificial layer has been removed on a liquefied material;
rolling a cylindrical substrate after contacting the cylindrical substrate with the thin film material; and
coating the thin film material on a surface of the cylindrical substrate by using an attraction force between the surface of the cylindrical substrate and the thin film material.

2. The method of claim 1 , wherein the attraction force is greater than an adhesive force between the liquefied material and the thin film material.

3. The method of claim 1 , wherein the sacrificial layer comprises at least one of Cu and Ni.

4. The method of claim 3 , wherein, in the removing, the sacrificial layer is removed by using an etchant.

5. The method of claim 1 , wherein the thin film material comprises a plurality of layers.

6. The method of claim 5 , wherein the thin film material comprises a first thin film material and a second thin film material, and wherein the first thin film material and the second thin film material are different from each other.

7. A method for coating a thin film in a rolling manner, the method comprising:
forming a sacrificial layer on a planar substrate;
depositing a thin film material on the sacrificial layer;
removing the planar substrate and the sacrificial layer;
floating the thin film material from which the planar substrate and the sacrificial layer have been removed on a liquefied material;
rolling a cylindrical substrate after contacting the cylindrical substrate with the thin film material;
coating the thin film material on a surface of the cylindrical substrate during the rolling of the cylindrical substrate;
reinforcing the thin film material coated on the surface of the cylindrical substrate; and
completing a tubular thin film by removing the cylindrical substrate after reinforcing the thin film material.

8. The method of claim 7 , wherein the completing a tubular thin film comprises removing the cylindrical substrate by contracting the cylindrical substrate or by using an etchant.

Assignees

• Korea Advanced Inst Sci & Tech

Inventors

• Kim Taek-Soo
• Kang Sumin

Classifications

• C23C14/0005 Primary

  Separation of the coating from the substrate · CPC title

• C23C16/01

  on temporary substrates, e.g. substrates subsequently removed by etching · CPC title

• C23C14/025

  Metallic sublayers · CPC title

• C23C16/06

  characterised by the deposition of metallic material · CPC title

• B05D1/286

  using a temporary backing to which the coating has been applied · CPC title