Diaphragm element arrangement and related method

Patent metadata

Field	Value
Publication number	US-10582304-B2
Application number	US-201816186971-A
Country	US
Kind code	B2
Filing date	Nov 12, 2018
Priority date	Nov 13, 2017
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

Diaphragm element arrangements including at least one bistable diaphragm element, which has a first stable state and a second stable state, and corresponding methods are provided. The bistable diaphragm element can be activated above a changeover threshold in order to change over between the first and the second stable state or below the changeover threshold.

First claim

What is claimed is:

1. A diaphragm element arrangement, comprising:
at least one bistable diaphragm element having a first stable state and a second stable state, and
a control system for activating the at least one diaphragm element,
wherein the control system is configured to activate a diaphragm element of the at least one bistable diaphragm element with a control signal above a changeover threshold in order to change over between the first stable state and the second stable state, and
to activate the diaphragm element or a further diaphragm element of the at least one bistable diaphragm element with an activation signal below the changeover threshold,
wherein the control system is configured to carry out the activation below the changeover threshold in order to increase a dynamic range and/or a modulation depth.

2. The diaphragm element arrangement as claimed in claim 1 , wherein the at least one bistable diaphragm element comprises a multiplicity of bistable diaphragm elements, which are grouped into a multiplicity of groups, wherein each of the groups is assigned to a bit,
wherein the control system is configured to activate a first part of the groups above the changeover threshold and to activate a second part of the groups below the changeover threshold.

3. The diaphragm element arrangement as claimed in claim 2 , wherein the control system is configured to activate the second part of the groups to compensate overswings produced by activating the first part of the groups above the changeover threshold.

4. A diaphragm element arrangement, comprising:
a bistable diaphragm element having a first stable state and a second stable state, and
a control system for activating the diaphragm element,
wherein the control system is configured to activate the diaphragm element to excite a self-resonant vibration, and to activate the diaphragm element with a control signal below a changeover threshold which, without the resonant vibration, would be necessary to change over between the stable states, in order to change over between the stable states, and wherein the control system is configured to activate a further diaphragm element in anti-phase to the diaphragm element in order to excite a self-resonant vibration.

5. The diaphragm element arrangement as claimed in claim 4 , wherein the activation to change over between the stable states comprises applying voltage pulses to a piezoelectric element coupled to the diaphragm.

6. A method, comprising:
activating a bistable diaphragm element having a first stable state and a second stable state above a changeover threshold in order to change over between the first and second stable state, and
activating the bistable diaphragm element or a further bistable diaphragm element below the changeover threshold, wherein the activation below the changeover threshold increases a dynamic range and/or a modulation depth.

7. The method as claimed in claim 6 , wherein the bistable diaphragm element and the further bistable diaphragm element are provided in a diaphragm element arrangement, wherein diaphragm elements of the diaphragm element arrangement are activated in groups, wherein each group is assigned to a bit, wherein at least one group assigned to a higher-value bit is activated above the changeover threshold, and at least one group assigned to a lower-value bit is activated below the changeover threshold.

8. The method as claimed in claim 6 , wherein the activation below the changeover threshold compensates overswings which are produced by the activation above the changeover threshold.

9. A method, comprising:
setting a diaphragm of a bistable diaphragm element vibrating at a self-resonant frequency of the diaphragm,
changing over the bistable diaphragm element between two stable states by activation below a changeover threshold which, without excitation to vibrate at the self-resonance, is necessary for the changeover, and
setting a further diaphragm of a further bistable diaphragm element vibrating at a natural frequency of the further diaphragm in anti-phase to the vibrations of the diaphragm.

10. The method as claimed in claim 9 , wherein the activation below the changeover threshold comprises applying voltage pulses to a piezoelectric element coupled to the diaphragm.

Assignees

• Infineon Technologies Ag

Inventors

• Dehe Alfons
• Dorfmeister Manuel
• Schmid Ulrich
• Schneider Michael

Classifications

• H04R2201/003

  Mems transducers or their use · CPC title

• H04R3/04

  for correcting frequency response · CPC title

• H04R7/06

  comprising a plurality of sections or layers · CPC title

• H04R17/00

  Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00}) · CPC title

• H04R17/10 Primary

  Resonant transducers, i.e. adapted to produce maximum output at a predetermined frequency · CPC title