Fabrication method of all solid-state thin-film battery

Patent metadata

Field	Value
Publication number	US-10581109-B2
Application number	US-201715474570-A
Country	US
Kind code	B2
Filing date	Mar 30, 2017
Priority date	Mar 30, 2017
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

A method of forming an all solid-state thin-film battery that can be scaled down and be integrated into a CMOS process is provided. The method includes a lift-off process in which battery material layers formed upon a patterned sacrificial material are removed from a bottom electrode, while battery material layers that are formed directly on a surface of the bottom electrode remain after performing the lift-off process. In some embodiments, a solid-state lithium based battery can be formed that includes a thin lithiated cathode material layer (thickness of less than 200 nm) composed of LiCoO 2 . Such a solid-state lithium based battery exhibits enhanced battery performance in terms of charge rate and specific charge capacity.

First claim

What is claimed is:

1. A method of forming an all solid-state thin-film battery, the method comprising:
forming a patterned sacrificial material directly on a surface of a bottom electrode, wherein the patterned sacrificial material consists of a pre-patterned metallic material that is applied directly to the surface of the bottom electrode by a mechanical force and contains an opening that physically exposes a portion of the surface of the bottom electrode;
forming an all solid-state battery stack on an entirety of a sidewall and a topmost surface of the patterned sacrificial material and on the physically exposed portion of the bottom electrode in the opening; and
performing a lift-off process to remove the patterned sacrificial material and the all solid-state battery stack formed on the topmost surface of the patterned sacrificial material from the bottom electrode, while maintaining the all solid-state battery stack on the physically exposed portion of the surface of the bottom electrode, wherein the lift-off process comprises releasing the mechanical force.

2. The method of claim 1 , further comprising forming an air and/or moisture impermeable structure on physically exposed surfaces of the bottom electrode and surrounding the all solid-state battery stack that remains on the surface of the bottom electrode.

3. The method of claim 1 , wherein the all solid-state battery stack comprises, from bottom to top, a cathode layer, a solid-state electrolyte layer and a top electrode.

4. The method of claim 3 , wherein the all solid-state battery stack further comprises an anode region located between solid-state electrolyte layer and the top electrode.

5. The method of claim 4 , wherein the all solid-state battery stack further comprises a liner located between the solid-state electrolyte layer and the anode region.

6. The method of claim 3 , wherein the all solid-state battery stack is a solid-state lithium based battery stack, the cathode layer is composed of a lithiated cathode material, and the solid-state electrolyte layer is composed of a lithium-based solid-state electrolyte.

7. The method of claim 6 , wherein the all solid-state battery stack further comprises an anode region located between solid-state electrolyte layer and the top electrode, wherein the anode region comprises a lithium ion generator or lithium intercalation active material.

8. The method of claim 7 , wherein the all solid-state battery stack further comprises a liner located between the solid-state electrolyte layer and the anode region, wherein the liner comprises a nucleation enhancement liner.

9. The method of claim 1 , wherein the bottom electrode is formed on a textured surface of a substrate prior to forming the patterned sacrificial material on the bottom electrode.

10. The method of claim 1 , wherein the bottom electrode is formed on a non-textured surface of a substrate prior to forming the patterned sacrificial material on the bottom electrode.

11. A method of forming an all solid-state thin-film battery, the method comprising:
forming a patterned sacrificial material on a surface of a bottom electrode, wherein the patterned sacrificial material consists of pre-patterned metallic material that is applied to the surface of the bottom electrode by an adhesive and contains an opening that physically exposes a portion of the surface of the bottom electrode;
forming an all solid-state battery stack on an entirety of a sidewall and a topmost surface of the patterned sacrificial material and on the physically exposed portion of the bottom electrode in the opening; and
performing a lift-off process to remove the patterned sacrificial material and the all solid-state battery stack formed on the patterned sacrificial material from the bottom electrode, while maintaining the all solid-state battery stack on the physically exposed portion of the surface of the bottom electrode, wherein the lift-off process comprises peeling the patterned sacrificial material from the adhesive.

Assignees

• IBM

Inventors

• De Souza Joel P
• Lee Yun Seog
• Mukherjee Kunal
• Sadana Devendra K

Classifications

• H01M10/0562

  Solid materials · CPC title

• H01M2220/30

  Batteries in portable systems, e.g. mobile phone, laptop · CPC title

• H01M4/525

  of mixed oxides or hydroxides containing iron, cobalt or nickel for inserting or intercalating light metals, e.g. LiNiO2, LiCoO2 or LiCoOxFy · CPC title

• H01M10/0436 Primary

  Small-sized flat cells or batteries for portable equipment · CPC title

• H01M2300/0068

  inorganic · CPC title