Interconnects formed by a metal displacement reaction

Patent metadata

Field	Value
Publication number	US-10580696-B1
Application number	US-201816106246-A
Country	US
Kind code	B1
Filing date	Aug 21, 2018
Priority date	Aug 21, 2018
Publication date	Mar 3, 2020
Grant date	Mar 3, 2020

Abstract

Structures for interconnects and methods of forming interconnects. An interconnect opening in a dielectric layer includes a first portion and a second portion arranged over the first portion. A first conductor layer composed of a first metal is arranged inside the first portion of the interconnect opening. A second conductor layer composed of a second metal is arranged inside the second portion of the interconnect opening. The first metal is ruthenium.

First claim

What is claimed is:

1. A structure comprising:
a dielectric layer including an interconnect opening having a first portion and a second portion arranged over the first portion;
a first conductor layer that fills the first portion of the interconnect opening, the first conductor layer comprised of a first metal; and
a second conductor layer inside the second portion of the interconnect opening, the second conductor layer comprised of a second metal,
wherein the first metal is ruthenium, the first conductor layer has a first surface that projects out of the first portion of the interconnect opening and into the second portion of the interconnect opening, and the first surface of the first conductor layer is convexly curved.

2. The structure of claim 1 wherein the first conductor layer is in direct contact with surfaces of the dielectric layer bordering the first portion of the interconnect opening.

3. A structure comprising:
a dielectric layer including an interconnect opening having a first portion and a second portion arranged over the first portion;
a first conductor layer that fills the first portion of the interconnect opening, the first conductor layer comprised of a first metal;
a second conductor layer inside the second portion of the interconnect opening, the second conductor layer comprised of a second metal; and
a metal feature that is intersected by the interconnect opening, the metal feature comprised of a third metal,
wherein the first metal is ruthenium, the first conductor layer includes a first surface that defines a curved interface between the first metal of the first conductor layer and the third metal of the metal feature, and the first surface is arcuate and convex.

4. The structure of claim 3 wherein the first surface has a directly contacting arrangement with the metal feature along the curved interface.

5. The structure of claim 1 further comprising:
a barrier/liner layer arranged between the second conductor layer and the first surface of the first conductor layer,
wherein the first surface of the first conductor layer defines a curved interface between the first metal of the first conductor layer and the barrier/liner layer.

6. The structure of claim 1 wherein the first portion of the interconnect opening is a via opening, the first conductor layer is arranged in the via opening, the second portion of the interconnect opening is a trench arranged over the via opening, the second conductor layer is arranged in the trench, and the second metal is copper or cobalt.

7. The structure of claim 1 wherein the first portion of the interconnect opening has a first end intersecting the second portion of the interconnect opening and a second end, the second end is opposite from the first end, the first surface of the first conductor layer projects out of the first end of the first portion of the interconnect opening, and the surface of the first conductor layer defines a first curved interface between the first metal of the first conductor layer and the second metal of the second conductor layer.

8. The structure of claim 7 further comprising:
a metal feature that is intersected by the second end of the first portion of the interconnect opening, the metal feature comprised of a third metal,
wherein the first conductor layer has a second surface that projects out of the second end of the first portion of the interconnect opening, and the second surface of the first conductor layer defines a second curved interface between the first metal of the first conductor layer and the third metal of the metal feature.

9. A method comprising:
forming an interconnect opening in a dielectric layer;
forming a first conductor layer comprised of a first metal in the interconnect opening;
exposing the first conductor layer to a solution containing ions of a second metal having a standard reduction potential that is greater than a standard reduction potential of the first metal; and
forming a second conductor layer inside the interconnect opening by a displacement reaction in which the ions of the second metal provide atoms of the second metal that displace and replace atoms of the first metal of the first conductor layer,
wherein the second metal is ruthenium.

10. The method of claim 9 wherein the first metal of the first conductor layer is completely replaced by the second metal of the second conductor layer.

11. The method of claim 9 wherein the interconnect opening has a first portion and a second portion arranged over the first portion, the first conductor layer is formed in the first portion of the interconnect opening, and the second conductor layer is formed in the first portion of the interconnect opening by the displacement reaction.

12. The method of claim 11 wherein the second conductor layer is in direct contact with a plurality of surfaces of the dielectric layer bordering the first portion of the interconnect opening.

13. The method of claim 11 wherein a portion of the first conductor layer projects out of the first portion of the interconnect opening and includes a surface that has a dome shape, and the second conductor layer includes a first surface that has a curved shape after the displacement reaction.

14. The method of claim 13 wherein the interconnect opening opens onto a metal feature comprised of a third metal, and further comprising:
extending the displacement reaction to displace the third metal of a portion of the metal feature adjacent to the interconnect opening and replace the third metal with the second metal to extend the second conductor layer into the metal feature by the displacement reaction.

15. The method of claim 14 wherein, after extending the displacement reaction, the second conductor layer includes a second surface defining an interface between the second conductor layer and the metal feature, and the second surface has a curved shape.

16. The method of claim 11 wherein the first portion of the interconnect opening is a via opening, the second conductor layer is arranged in the via opening, the interconnect opening further includes a trench arranged in the dielectric layer over the via opening, and further comprising:
depositing a conductor inside the trench and over the second conductor layer.

17. The method of claim 11 further comprising:
after forming the second conductor layer, depositing a barrier/liner layer on surfaces of the dielectric layer and a surface of the second conductor layer bordering the second portion of the interconnect opening; and
after depositing the barrier/liner layer, depositing a third conductor layer inside the second portion of the interconnect opening,
wherein the third conductor layer is comprised of copper or cobalt.

18. The method of claim 11 wherein the first portion of the interconnect opening is a via opening having a first end and a second end opposite from the first end, the second portion of the interconnect opening is a trench that is intersected by the first end of the via opening, the first conductor layer has a first surface that projects out of the first end of the via opening and a second surface that projects out of the second end of the via opening, and the first surface and the second surface of the first conductor layer each have a curved shape.

19. The method of claim 9 further comprising:
before forming the first conductor layer, depositing a barrier layer on a plurality of surfaces of the dielectric layer bordering the interconnect opening; and
before forming the first conductor layer, depositing a liner la

Assignees

• Globalfoundries Inc

Inventors

• Lin Sean Xuan
• Witt Christian
• Raymond Mark V
• Licausi Nicholas V
• Ryan Errol Todd

Classifications

• H01L21/288

  Electricity · mapped topic

• H01L21/76883 Primary

  Electricity · mapped topic

• H01L21/76843

  Electricity · mapped topic

• H01L21/76879

  Electricity · mapped topic

• H01L21/76886

  Electricity · mapped topic