System and method for transport

Patent metadata

Field	Value
Publication number	US-10570516-B2
Application number	US-201514676982-A
Country	US
Kind code	B2
Filing date	Apr 2, 2015
Priority date	Apr 6, 2006
Publication date	Feb 25, 2020
Grant date	Feb 25, 2020

Abstract

A deposition system and method includes a deposition source, a roll conveyor and at least one shield positioned at a location proximate to the deposition source.

First claim

What is claimed is:

1. A method for depositing a material on a substrate, comprising:
transporting the substrate into a deposition chamber enclosed by a housing;
conveying the substrate, in a transport direction, at a plane of conveyance, on a roll conveyor located within the deposition chamber; the roll conveyor comprising:
a plurality of rollers having an elongated length perpendicular to the transport direction, and
a plurality of roller shafts having an elongated length perpendicular to the transport direction, wherein the plurality of roller shafts support and drive the plurality of rollers, wherein the plurality of roller shafts are longer than the plurality of rollers, and wherein the plurality of roller shafts have end portions at both ends of their elongated length extending beyond the elongated lengths of each of the plurality of rollers;

providing a vapor from a deposition source in the deposition chamber, wherein the deposition source is above the plane of conveyance;
directing the vapor toward a surface of the substrate having a temperature lower than the vapor, such that at least a portion of the vapor condenses on the substrate as a film; and
collecting an overspray of the vapor on a shield, wherein at least a portion of the shield is located below the plane of conveyance.

2. The method of claim 1 , wherein the shield is a collector ribbon.

3. The method of claim 2 , wherein the collector ribbon is a continuous loop.

4. The method of claim 1 , wherein the shield moves transverse to the transport direction.

5. The method of claim 1 , wherein the shield moves parallel to the transport direction.

6. The method of claim 1 , further comprising heating a roller of the plurality of rollers.

7. The method of claim 6 , wherein heating includes heating the roller to a temperature greater than 700° C.

8. The method of claim 6 , wherein heating comprises maintaining a temperature in a range of about 700-750° C. at a surface of the roller.

9. The method of claim 6 , wherein heating includes heating the roller to a temperature greater than 780° C.

10. The method of claim 1 , further comprising supporting the plurality of rollers using at least one back-up roller.

11. The method of claim 1 , wherein the shield is located entirely below the plane of conveyance.

12. The method of claim 1 , wherein collecting an overspray of the vapor on a shield, further comprises:
moving the shield in a continuous loop through the deposition chamber, wherein the shield is a collector ribbon or a shielding cable with a collecting surface, and wherein the continuous loop moves between adjacent ones of the plurality of rollers, between adjacent ones of the plurality of roller shafts, or above the end portions of the plurality of roller shafts, thereby reducing overspray buildup on the roll conveyor.

13. A method for depositing a material on a substrate, comprising:
transporting the substrate into a deposition chamber enclosed by a housing;
conveying the substrate, in a transport direction, at a plane of conveyance, on a roll conveyor located within the deposition chamber; the roll conveyor comprising:
a plurality of rollers having an elongated length perpendicular to the transport direction, wherein the plurality of rollers support and convey the substrate, the plurality of rollers each having end portions at both ends of their elongated length, wherein at least one roller, of the plurality of rollers, has an off-web portion extending beyond a substrate track width;

providing a vapor from a deposition source in the deposition chamber, wherein the deposition source is above the plane of conveyance;
directing the vapor toward a surface of the substrate having a temperature lower than the vapor, such that at least a portion of the vapor condenses on the substrate as a film;
positioning at least a portion of a shield between the deposition source and the off-web portion of the at least one roller; and
collecting an overspray of the vapor on the shield, wherein at least a portion of the shield is located below the plane of conveyance, and wherein the shield is a collector ribbon.

14. The method of claim 13 ,
wherein the at least one roller having an off-web portion is a drive roller.

15. The method of claim 13 , further comprising heating a roller of the plurality of rollers.

16. The method of claim 15 , wherein heating comprises maintaining a temperature in a range of about 700-750° C. at a surface of the roller.

17. The method of claim 13 , wherein at least a portion of the collector ribbon moves transverse to the transport direction.

18. The method of claim 13 , wherein at least a portion of the collector ribbon moves parallel to the transport direction.

19. A method for depositing a material on a substrate, comprising:
transporting the substrate into a deposition chamber enclosed by a housing;
conveying the substrate, in a transport direction, at a plane of conveyance, on a roll conveyor located within the deposition chamber; the roll conveyor comprising:
a plurality of rollers having an elongated length perpendicular to the transport direction, wherein the plurality of rollers support and convey the substrate, the plurality of rollers each having end portions at both ends of their elongated length, wherein at least one roller, of the plurality of rollers, has an off-web portion extending beyond a substrate track width;

providing a vapor from a deposition source in the deposition chamber, wherein the deposition source is above the plane of conveyance;
directing the vapor toward a surface of the substrate having a temperature lower than the vapor, such that at least a portion of the vapor condenses on the substrate as a film;
positioning at least a portion of a shield between the deposition source and the off-web portion of the at least one roller; and
collecting an overspray of the vapor on the shield, wherein the shield is located entirely below the plane of conveyance.

20. A method for depositing a material on a substrate, comprising:
transporting the substrate into a deposition chamber enclosed by a housing;
conveying the substrate, in a transport direction, at a plane of conveyance, on a roll conveyor located within the deposition chamber; the roll conveyor comprising:
a plurality of rollers having an elongated length perpendicular to the transport direction, wherein the plurality of rollers support and convey the substrate;

providing a vapor from a deposition source in the deposition chamber, wherein the deposition source is above the plane of conveyance;
directing the vapor toward a surface of the substrate having a temperature lower than the vapor, such that at least a portion of the vapor condenses on the substrate as a film; and
collecting an overspray of the vapor on a shield, wherein the shield is located entirely below the plane of conveyance, and wherein collecting an overspray of the vapor on the shield, further comprises: moving the shield in a continuous loop through the deposition chamber, wherein the shield is a collector ribbon or a shielding cable with a collecting surface, and wherein the continuous loop moves between adjacent ones of the plurality of rollers.

Assignees

• First Solar Inc

Inventors

• Powell Rick C

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title

• C23C16/4401

  Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber · CPC title

• C23C16/45591

  Fixed means, e.g. wings, baffles · CPC title

• C23C16/4585 Primary

  Devices at or outside the perimeter of the substrate support, e.g. clamping rings, shrouds · CPC title