Color imaging for CMP monitoring

Patent metadata

Field	Value
Publication number	US-10565701-B2
Application number	US-201514942777-A
Country	US
Kind code	B2
Filing date	Nov 16, 2015
Priority date	Nov 16, 2015
Publication date	Feb 18, 2020
Grant date	Feb 18, 2020

Abstract

A polishing system includes a polishing station including a platen to support a polishing pad, a support to hold a substrate, an in-line metrology station to measure the substrate before or after polishing of a surface of the substrate in the polishing station, and a controller. The in-line metrology station includes a color line-scan camera, a white light source, a frame supporting the light source and the camera, and a motor to cause relative motion between the camera and the support along a second axis perpendicular to the first axis to cause the light source and the camera to scan across the substrate. The controller is configured to receive a color data from the camera, to generate a 2-dimensional color image from the color data, and to control polishing at the polishing station based on the color image.

First claim

What is claimed is:

1. A polishing system, comprising:
a polishing station including a platen to support a polishing pad;
a support to hold a substrate;
an in-line metrology station to measure the substrate before or after polishing of a surface of the substrate in the polishing station, the in-line metrology station including
a color line-scan camera having detector elements arranged along a first axis that is parallel to the surface of the substrate during scanning of the substrate and that span a width of the substrate such that a field of view of the line scan camera spans the width of the substrate without perspective distortion,
an elongated white light source having a longitudinal axis parallel to the first axis and configured to direct light toward the substrate at a non-zero incidence angle during scanning of the substrate and illuminate a linear elongated region that spans the width of the substrate,
a frame supporting the light source and the camera, and
a motor to cause relative motion between the frame and the support along a second axis perpendicular to the first axis to cause the light source and the camera to scan across the substrate; and

a controller configured to receive a color data from the camera, to generate a 2-dimensional color image from the color data, and to control polishing at the polishing station based on the color image.

2. The system of claim 1 , comprising a diffuser in a path of light between the light source and the substrate.

3. The system of claim 1 , wherein the non-zero incidence angle is between 5° and 85°.

4. The system of claim 1 , wherein the motor is coupled to the frame and controller is configured to cause the substrate to be held stationary while the motor moves the frame with the light source to cause the line-scan camera to scan across the substrate.

5. The system of claim 1 , wherein the frame is fixed and the motor is coupled to the support and the controller is configured to cause the motor to move the support while the light source and the camera remain stationary to scan across the substrate.

6. The system of claim 1 , comprising a circular polarizer in a light path between the substrate and the camera.

7. The system of claim 1 , wherein the support comprises a carrier head to hold the substrate against the polishing pad and the in-line metrology station is positioned between the polishing station and one of another polishing station or a transfer station.

8. The system of claim 1 , wherein the support comprises a transfer robot and the in-line metrology station is positioned in a cassette interface unit.

9. A polishing system, comprising:
a polishing station including a platen to support a polishing pad;
a support to hold a substrate;
a metrology system comprising a white light source and a color camera to receive light reflected from the substrate; and
a controller configured to receive color data from the camera, to generate a 2-dimensional color image from the color data, to transform the color image to a hue-saturation-luminance color space, to compare hue and saturation values from the color image in the hue-saturation-luminance color space to respective predetermined hue and saturation values, and to, based on the comparison, at least one of control polishing at the polishing station or generate a thresholded image.

10. The system of claim 9 , wherein the controller is configured to not compare luminance values from the color image in the hue-saturation-luminance color space to a threshold in determining whether a pixel is on or off in the thresholded image.

11. The system of claim 9 , wherein the controller is configured to analyze the color image to find a wafer alignment feature and to transform the color image to a standard coordinate system.

12. The system of claim 9 , wherein the controller is configured to normalize the color image.

13. The system of claim 9 , wherein the controller is configured to apply a high-pass spatial filter to the image.

14. The system of claim 13 , wherein the controller is configured to generate a smoothed image by averaging pixel values within a threshold distance and to generate a filtered image by dividing the color image by the smoothed image.

15. The system of claim 14 , comprising a motor to cause relative motion between the camera and the support along an axis, and wherein the averaging is performed only along the axis.

16. The system of claim 9 , wherein the controller is configured to apply an image mask to the color image.

17. The system of claim 9 , wherein the predetermined hue and saturation values are first thresholds, and the controller is configured to count a number of pixels in the color image that fail to meet the first thresholds and to compare the number of pixels to a second threshold.

18. The system of claim 17 , wherein the controller is configured to count a number of pixels for each die on the substrate in the color image.

19. The system of claim 17 , wherein the controller is configured to count a number of pixels for the whole substrate in the color image.

20. The system of claim 9 , wherein the predetermined hue and saturation values are target values, and comprising generating an error signal for control of polishing at the polishing station based on the comparison to the target values.

Assignees

• Applied Materials Inc

Inventors

• Benvegnu Dominic J
• Tolles Robert D
• Swedek Boguslaw A
• Ravid Abraham

Classifications

• G06T7/0004

  Industrial image inspection · CPC title

• G06F3/0486

  Drag-and-drop · CPC title

• G06T2207/20024

  Filtering details · CPC title

• G06T2207/10024

  Color image · CPC title

• G06F3/04842

  Selection of displayed objects or displayed text elements (G06F3/0482 takes precedence) · CPC title