Substrate storage container

Patent metadata

Field	Value
Publication number	US-10559484-B2
Application number	US-201615557720-A
Country	US
Kind code	B2
Filing date	Feb 22, 2016
Priority date	Apr 10, 2015
Publication date	Feb 11, 2020
Grant date	Feb 11, 2020

Abstract

[Solution] The present invention relates to a substrate storage container (1) that is provided with: a container main body (2), which stores a substrate (W), and which has at least one side open; and a removable cover body (3) capable of opening/closing an opening (5) of the container main body (2). In the substrate storage container (1), the inside of the container main body (2) is provided with a first holding section (12) having a first holding groove (12a) for holding a rear portion of the substrate (W), the inner side of the cover body (3) is provided with a second holding section (25) having a second holding groove (25a) for holding a front portion of the substrate (W), and at least the first holding groove (12a) of the first holding section (12) is configured from an alloy resin having a polycarbonate resin and a polybutylene terephthalate resin as main components.

First claim

The invention claimed is:

1. A substrate storage container comprising: a container body for storing substrates, wherein at least one side of the container body is open; and a lid removable to open and close an opening of the container body, wherein
the substrate storage container comprises, in the container body, first holding portions with first holding grooves for holding rear parts of the substrates,
the substrate storage container comprises, inside of the lid, second holding portions with second holding grooves for holding front parts of the substrates,
at least the first holding grooves in the first holding portions and at least the second holding grooves in the second holding portions are made of an alloy resin mainly containing a polycarbonate resin and a polybutylene terephthalate resin, and
the alloy resin making at least the first holding grooves contains an amount equal to or more than 25% by mass and equal to or less than 40% by mass of polybutylene terephthalate resin and equal to or more than 60% and equal to or less than 75% of polycarbonate resin with respect to the mass of the resin components of the alloy resin.

2. The substrate storage container of claim 1 , wherein
the container body comprises support portions including shelves for supporting the substrates at certain intervals, on inner surfaces on both left and right sides of the substrates as viewed from the opening,
the first holding portions are provided on a deep side in the support portions as viewed from the opening,
the first holding portions comprise, inside of the first holding portions, inclined surfaces that can lift up ends of the substrates on the deep side from upper surfaces of the shelves to support the substrates, and
when the lid is attached to the opening of the container body, the substrates in the container body are placed between the first holding grooves and the second holding grooves and are lifted up from the shelves and held.

3. The substrate storage container of claim 2 , wherein
the support portions are bodies different from the container body and are removably attached to the container body.

4. The substrate storage container of claim 1 , wherein the alloy resin making the second holding grooves contains equal to or more than 70% by mass and equal to or less than 75% by mass of polybutylene terephthalate resin with respect to the mass of the resin components of the alloy resin.

5. The substrate storage container of claim 1 , wherein the alloy resin making the second holding grooves mainly contains polybutylene terephthalate resin.

Assignees

• Shinetsu Polymer Co

Inventors

• Kato Katsuhiko
• Mimura Hiroshi
• Hagano Masaru

Classifications

• H10P72/1921

  characterised by substrate supports · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/1914

  characterised by locking systems · CPC title

• H10P72/1906

  specially adapted for containing masks, reticles or pellicles · CPC title

• H10P72/1912 Primary

  characterised by shock absorbing elements, e.g. retainers or cushions · CPC title