Substrate storage container

Patent metadata

Field	Value
Publication number	US-10242896-B2
Application number	US-201314376964-A
Country	US
Kind code	B2
Filing date	Apr 1, 2013
Priority date	Apr 4, 2012
Publication date	Mar 26, 2019
Grant date	Mar 26, 2019

Abstract

To provide a substrate storage container capable of keeping low a relative humidity in an internal closed space for a long period of time even after purging, a substrate storage container including a constitutive material, which includes a shell body, a door and an on-off valve, defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours, and thereby, an actual requirement is objectively satisfied in terms of water release suppression ability under JIS K 7209 or ISO 62 to significantly suppress releasing of water into the internal closed space 3 through the shell body, the door and the on-off valve.

First claim

The invention claimed is:

1. A substrate storage container for storing a substrate in an internal closed space thereof, comprising a constitutive material defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours,
wherein the specific constitutive material comprises: a single cyclic olefin resin (A component) of 100 parts by mass; a carbon fiber (B component) of 6 to 14 parts by mass to the A component of 100 parts by mass; and a single polyolefin-based thermoplastic elastomer as an impact resistance improver (C component) of 12 to 14 parts by mass to the A component of 100 parts by mass or a single polystyrene-based thermoplastic elastomer product as an impact resistance improver (C component) of 5 to 24 parts by mass to the A component of 100 parts by mass,
the polyolefin-based thermoplastic elastomer product is ethylene and 1-butene random copolymers,
the polystyrene-based thermoplastic elastomer product is made by block copolymerizing a polystyrene portion with a hard segment and a soft segment which is composed of polybutylene, polyethylene, butadiene, or isoprene,
the specific constitutive material further comprises a polyethylene (D component) having a viscosity-average molecular weight of 1 million or more,
the D component is 1 to 15 parts by mass to 100 parts by mass of the sum of the A component, the B component, and the C component, and
the specific constitutive material has a surface resistance value of 1.0×E+10Ω or less.

2. The substrate storage container according to claim 1 , wherein the internal closed space is set so that a relative humidity therein remains at 10% or less based on the specific constitutive material when left standing in standard atmosphere temperature and pressure for 24 hours on a starting basis of a state of the relative humidity of 0%.

3. The substrate storage container according to claim 1 , wherein the specific constitutive material has a total amount of outgassing of 40 ppm or less in measuring by a headspace method under a condition at 150 degree C. for 20 minutes.

4. The substrate storage container according to claim 1 , wherein the specific constitutive material further comprises a particulate conductive filler (E component) having an n-dibutyl phthalate oil absorption of 180 mL/100 g or more.

5. The substrate storage container according to claim 1 , wherein the D component is 5 to 15 parts by mass to 100 parts by mass of the sum of the A component, the B component, and the C component.

6. The substrate storage container according to claim 4 , wherein the E component is 1 to 15 parts by mass to the A component of 100 parts by mass.

7. The substrate storage container according to claim 6 , wherein the E component is 5 to 12 parts by mass to the A component of 100 parts by mass.

8. A substrate storage container for storing a substrate in an internal closed space thereof, comprising a constitutive material defining the internal closed space, the constitutive material being formed of a specific constitutive material having a water absorption of 0.1 wt. % or less when immersed in water at 23 degree C. for 24 hours,
wherein the specific constitutive material comprises: a single cyclic olefin resin product (A component) of 100 parts by mass; a carbon fiber (B component) of 6 to 14 parts by mass to the A component of 100 parts by mass; and a single polyolefin-based thermoplastic elastomer product as an impact resistance improver (C component) of 12 to 14 parts by mass to the A component of 100 parts by mass or a single polystyrene-based thermoplastic elastomer product as an impact resistance improver (C component) of 5 to 24 parts by mass to the A component of 100 parts by mass,
the polyolefin-based thermoplastic elastomer product is ethylene and 1-butene random copolymers,
the polystyrene-based thermoplastic elastomer product is made by block copolymerizing a polystyrene portion as a hard segment and a portion composed of a polybutylene, a polyethylene, a butadiene, or an isoprene as a soft segment, and
the specific constitutive material has a surface resistance value of 1.0×E+10Ω or less.

Assignees

• Shinetsu Polymer Co

Inventors

• Suzuki Tsutomu
• Odashima Satoshi
• Mimura Hiroshi
• Ogawa Osamu

Classifications

• H10P72/1911

  characterised by materials, roughness, coatings or the like · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H01L21/67393 Primary

  Electricity · mapped topic

• H01L21/67366

  Electricity · mapped topic