Method for determining a beamlet position and method for determining a distance between two beamlets in a multi-beamlet exposure apparatus
US-9653259-B2 · May 16, 2017 · US
US10556753B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10556753-B2 |
| Application number | US-201816028277-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 5, 2018 |
| Priority date | Jun 7, 2011 |
| Publication date | Feb 11, 2020 |
| Grant date | Feb 11, 2020 |
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A device for separating piece goods to be stored in an automated storage facility is provided. The device includes a conveyor for conveying piece goods from a stock to a support surface of a collecting device, a controller for controlling the conveyor, a sensor, to detect the striking of the support surface by piece goods. The detector has an imager, which produces at least one recording of the underside of the support. A handling device is configured to remove a piece good from the support surface for further transport into the storage facility is coupled to the controller, which is further configured to control the handler according to the information.
Opening claim text (preview).
The invention claimed is: 1. A device for separating piece goods, the device comprising: a support surface configured to receive the piece goods from a conveyor; a light source arranged on a first side of the support surface, the light source configured to emit multiple luminous beams to illuminate a strip that extends over the support surface in a first direction, wherein the support surface is at least partially transparent to the multiple luminous beams; an imager configured to record images of an underside of the support surface using at least some of the multiple luminous beams; and a controller configured to: move the light source over the support surface in a second direction extending transverse to the first direction; and obtain information on a position and an orientation of one or more of the piece goods on the support surface based on the images, for control of a handler for removing the one or more of the piece goods from the support surface. 2. The device of claim 1 , further comprising the conveyor, wherein the controller is configured to operate the conveyor to move the piece goods to the support surface from a stock. 3. The device of claim 1 , wherein the imager is arranged on an opposing second side of the support surface. 4. The device of claim 3 , wherein the entire support surface is configured to scatter or deflect the at least some of the multiple luminous beams to illuminate the imager. 5. The device of claim 1 , wherein the light source is configured to emit the multiple luminous beams to transversely illuminate the strip that extends over the support surface in the first direction. 6. The device of claim 5 , wherein the multiple luminous beams are equally spaced apart along the first direction. 7. The device of claim 1 , further comprising a collector that includes a plate having an upper surface that forms the support surface. 8. A device for separating piece goods, the device comprising: a support surface configured to receive the piece goods from a conveyor; a light source arranged on a first side of the support surface, the light source comprising a plurality of light-emitting diodes that are spaced apart along a first direction on a substrate, wherein each light-emitting diode emits a luminous beam, and wherein the support surface is at least partially transparent to the luminous beams; an imager configured to record images of an opposing second side of the support surface using at least some of the luminous beams; and a controller configured to: move the light source over the support surface in a second direction extending transverse to the first direction; and obtain information on a position and an orientation of one or more of the piece goods on the support surface based on the images, for control of a handler for removing the one or more of the piece goods from the support surface. 9. The device of claim 8 , wherein the plurality of light-emitting diodes are configured to emit the luminous beams vertically downward toward the support surface. 10. The device of claim 8 , wherein the plurality of light-emitting diodes are configured to emit the luminous beams horizontally in a direction parallel to the support surface and wherein the light source further comprises a mirror arranged to deflect the luminous beams vertically downward toward the support surface and to move in the second direction. 11. The device of claim 8 , further comprising the conveyor, wherein the first direction extends transverse to a transport direction of the conveyor. 12. The device of claim 8 , wherein the controller is further configured to move the light source to continuously move a strip of illumination over the support surface in one pass. 13. The device of claim 8 , further comprising the handler, wherein the handler is suspended on a linear guide that is mounted above the support surface and extends in the second direction. 14. The device of claim 13 , wherein the light source is suspended and guided on the linear guide. 15. A method, comprising: detecting receipt of one or more piece goods on a support surface from a conveyor; operating a light source arranged on a first side of the support surface to emit multiple luminous beams that illuminate a strip that extends over the support surface in a first direction, wherein the support surface is at least partially transparent to the multiple luminous beams; moving the light source over the support surface in a second direction extending transverse to the first direction; recording images of an underside of the support surface using at least some of the multiple luminous beams during the moving; and obtaining information on a position and an orientation of the one or more piece goods on the support surface based on the images, for control of a handler for removing the one or more piece goods from the support surface. 16. The method of claim 15 , further comprising operating the handler to remove the one or more piece goods from the support surface according to the information. 17. The method of claim 16 , further comprising moving the one or more piece goods to a storage facility with the handler. 18. The method of claim 15 , further comprising moving the one or more piece goods to the support surface with the conveyor. 19. The method of claim 18 , wherein detecting receipt of one or more piece goods comprises detecting an imminent or actual impact of the one or more piece goods on the support surface. 20. The method of claim 19 , further comprising interrupting operation of the conveyor responsive to the detecting.
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